JPS61111427A - フ−リエ変換スペクトロメ−タの干渉信号処理方法 - Google Patents

フ−リエ変換スペクトロメ−タの干渉信号処理方法

Info

Publication number
JPS61111427A
JPS61111427A JP22008085A JP22008085A JPS61111427A JP S61111427 A JPS61111427 A JP S61111427A JP 22008085 A JP22008085 A JP 22008085A JP 22008085 A JP22008085 A JP 22008085A JP S61111427 A JPS61111427 A JP S61111427A
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth layer
signal
measured
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22008085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62442B2 (enrdf_load_stackoverflow
Inventor
Masashi Yamamoto
山本　正志
Masahiko Ozawa
正彦 小沢
Koji Masutani
浩二 増谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Hitachi Ltd
Original Assignee
Jeol Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Hitachi Ltd filed Critical Jeol Ltd
Priority to JP22008085A priority Critical patent/JPS61111427A/ja
Publication of JPS61111427A publication Critical patent/JPS61111427A/ja
Publication of JPS62442B2 publication Critical patent/JPS62442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP22008085A 1985-10-04 1985-10-04 フ−リエ変換スペクトロメ−タの干渉信号処理方法 Granted JPS61111427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22008085A JPS61111427A (ja) 1985-10-04 1985-10-04 フ−リエ変換スペクトロメ−タの干渉信号処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22008085A JPS61111427A (ja) 1985-10-04 1985-10-04 フ−リエ変換スペクトロメ−タの干渉信号処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15101678A Division JPS5578203A (en) 1978-12-08 1978-12-08 Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it

Publications (2)

Publication Number Publication Date
JPS61111427A true JPS61111427A (ja) 1986-05-29
JPS62442B2 JPS62442B2 (enrdf_load_stackoverflow) 1987-01-08

Family

ID=16745618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22008085A Granted JPS61111427A (ja) 1985-10-04 1985-10-04 フ−リエ変換スペクトロメ−タの干渉信号処理方法

Country Status (1)

Country Link
JP (1) JPS61111427A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104011497A (zh) * 2011-12-27 2014-08-27 佳能株式会社 用于产生信息信号的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104011497A (zh) * 2011-12-27 2014-08-27 佳能株式会社 用于产生信息信号的方法
US9600444B2 (en) 2011-12-27 2017-03-21 Canon Kabushiki Kaisha Method for generating information signal

Also Published As

Publication number Publication date
JPS62442B2 (enrdf_load_stackoverflow) 1987-01-08

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