JPS61111150U - - Google Patents
Info
- Publication number
- JPS61111150U JPS61111150U JP13218584U JP13218584U JPS61111150U JP S61111150 U JPS61111150 U JP S61111150U JP 13218584 U JP13218584 U JP 13218584U JP 13218584 U JP13218584 U JP 13218584U JP S61111150 U JPS61111150 U JP S61111150U
- Authority
- JP
- Japan
- Prior art keywords
- inner diameter
- gas
- reaction tube
- tube
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984132185U JPH0517877Y2 (ru) | 1984-08-31 | 1984-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984132185U JPH0517877Y2 (ru) | 1984-08-31 | 1984-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61111150U true JPS61111150U (ru) | 1986-07-14 |
| JPH0517877Y2 JPH0517877Y2 (ru) | 1993-05-13 |
Family
ID=30690750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984132185U Expired - Lifetime JPH0517877Y2 (ru) | 1984-08-31 | 1984-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517877Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58175823A (ja) * | 1982-04-09 | 1983-10-15 | Kokusai Electric Co Ltd | プラズマ気相成長装置の反応管 |
-
1984
- 1984-08-31 JP JP1984132185U patent/JPH0517877Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58175823A (ja) * | 1982-04-09 | 1983-10-15 | Kokusai Electric Co Ltd | プラズマ気相成長装置の反応管 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517877Y2 (ru) | 1993-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU99109124A (ru) | Предварительно собранный фитинг для использования с гофрированным трубопроводом | |
| CA2114509A1 (en) | Fuel Injection | |
| JPS58119862U (ja) | スプレ−ガン | |
| JPS61111150U (ru) | ||
| JPS6217394U (ru) | ||
| JPS60116485U (ja) | フレア管継手 | |
| JPS6182189U (ru) | ||
| JPS61171818U (ru) | ||
| JPS62122U (ru) | ||
| JPH03125253U (ru) | ||
| JPS62145325U (ru) | ||
| JPS6173987U (ru) | ||
| JPS63141820U (ru) | ||
| JPS6111092U (ja) | 管端密封装置 | |
| JPS61101614U (ru) | ||
| JPS61155113U (ru) | ||
| JPS59180097U (ja) | 混合ガスボンベ | |
| JPH01144640U (ru) | ||
| JPH01144639U (ru) | ||
| JPH0188753U (ru) | ||
| JPH0466316U (ru) | ||
| JPS63189356U (ru) | ||
| JPH0466315U (ru) | ||
| JPS61173326U (ru) | ||
| JPH0292016U (ru) |