JPS6111049A - マイクロ波放電プラズマ殺菌装置 - Google Patents

マイクロ波放電プラズマ殺菌装置

Info

Publication number
JPS6111049A
JPS6111049A JP13090084A JP13090084A JPS6111049A JP S6111049 A JPS6111049 A JP S6111049A JP 13090084 A JP13090084 A JP 13090084A JP 13090084 A JP13090084 A JP 13090084A JP S6111049 A JPS6111049 A JP S6111049A
Authority
JP
Japan
Prior art keywords
sterilization
vacuum container
microwave
sterilized
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13090084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237183B2 (de
Inventor
前羽　良保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP13090084A priority Critical patent/JPS6111049A/ja
Publication of JPS6111049A publication Critical patent/JPS6111049A/ja
Publication of JPH0237183B2 publication Critical patent/JPH0237183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatus For Disinfection Or Sterilisation (AREA)
JP13090084A 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置 Granted JPS6111049A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13090084A JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13090084A JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Publications (2)

Publication Number Publication Date
JPS6111049A true JPS6111049A (ja) 1986-01-18
JPH0237183B2 JPH0237183B2 (de) 1990-08-22

Family

ID=15045342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13090084A Granted JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Country Status (1)

Country Link
JP (1) JPS6111049A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005089818A1 (ja) * 2004-03-19 2005-09-29 Japan Science And Technology Agency マイクロ波プラズマ滅菌方法および装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865796A (de) * 1971-12-13 1973-09-10
JPS52156074A (en) * 1976-06-21 1977-12-26 Lilly Co Eli Plasma sterilizing method
JPS56102248A (en) * 1980-01-11 1981-08-15 Baiofuijikusu Research Ando Co Pasturization due to gas plasma added with seed
JPS56148354A (en) * 1980-04-18 1981-11-17 Tokyo Shibaura Electric Co Sterilizing treating device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865796A (de) * 1971-12-13 1973-09-10
JPS52156074A (en) * 1976-06-21 1977-12-26 Lilly Co Eli Plasma sterilizing method
JPS56102248A (en) * 1980-01-11 1981-08-15 Baiofuijikusu Research Ando Co Pasturization due to gas plasma added with seed
JPS56148354A (en) * 1980-04-18 1981-11-17 Tokyo Shibaura Electric Co Sterilizing treating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005089818A1 (ja) * 2004-03-19 2005-09-29 Japan Science And Technology Agency マイクロ波プラズマ滅菌方法および装置
JPWO2005089818A1 (ja) * 2004-03-19 2008-01-31 独立行政法人科学技術振興機構 マイクロ波プラズマ滅菌方法および装置
US7700039B2 (en) 2004-03-19 2010-04-20 Japan Science And Technology Agency Microwave plasma sterilizing method and device
JP4716457B2 (ja) * 2004-03-19 2011-07-06 独立行政法人科学技術振興機構 マイクロ波プラズマ滅菌装置およびそれを用いた滅菌方法

Also Published As

Publication number Publication date
JPH0237183B2 (de) 1990-08-22

Similar Documents

Publication Publication Date Title
CA1316666C (en) Sterilization method and apparatus
EP0278623B1 (de) Sterilisationsverfahren mit Wasserstoffperoxidplasma
US4348357A (en) Plasma pressure pulse sterilization
AU592576B2 (en) Hydrogen peroxide plasma sterilization system
EP0465569B1 (de) Vorrichtung und verfahren für trockensterilisierung medizinischer geräte und materialien
US6113851A (en) Apparatus and process for dry sterilization of medical and dental devices and materials
US6342187B1 (en) Process and apparatus for dry sterilization of medical devices and materials
AU762074B2 (en) Method of enhanced sterilization with improved material compatibility
US5184046A (en) Circular waveguide plasma microwave sterilizer apparatus
US5897831A (en) Process for dry sterilization of medical devices and materials
US5741460A (en) Process for dry sterilization of medical devices and materials
US20050269199A1 (en) Process for the plasma sterilization of dielectric objects comprising a hollow part
JPH11501530A (ja) プラズマ殺菌用装置と方法
JP2003501147A (ja) 大気圧プラズマ浄化／消毒チャンバ
US6707254B1 (en) Low temperature plasma sterilising system and method
JP2003310720A (ja) プラズマ滅菌装置
US5163458A (en) Method for removing contaminants by maintaining the plasma in abnormal glow state
US5068002A (en) Ultrasonic glow discharge surface cleaning
JPS6111049A (ja) マイクロ波放電プラズマ殺菌装置
AU6169596A (en) Process and apparatus for dry sterilization of medical devices and materials
Roth et al. Increasing the surface energy and sterilization of nonwoven fabrics by exposure to a one atmosphere uniform glow discharge plasma (OAUGDP)
CN111150863A (zh) 一种大气压低温等离子体快速灭菌装置和灭菌方法
JPS6058980B2 (ja) プラズマ放電殺菌装置
EP1459771A2 (de) Verfahren zur Verminderung von Reststerilisierungsmitteln
JP2020151043A (ja) 除染方法