JPS61109134U - - Google Patents
Info
- Publication number
- JPS61109134U JPS61109134U JP19423284U JP19423284U JPS61109134U JP S61109134 U JPS61109134 U JP S61109134U JP 19423284 U JP19423284 U JP 19423284U JP 19423284 U JP19423284 U JP 19423284U JP S61109134 U JPS61109134 U JP S61109134U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- core tube
- reactor core
- semiconductor manufacturing
- small cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423284U JPS61109134U (fi) | 1984-12-20 | 1984-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423284U JPS61109134U (fi) | 1984-12-20 | 1984-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61109134U true JPS61109134U (fi) | 1986-07-10 |
Family
ID=30751678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19423284U Pending JPS61109134U (fi) | 1984-12-20 | 1984-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61109134U (fi) |
-
1984
- 1984-12-20 JP JP19423284U patent/JPS61109134U/ja active Pending
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