JPS6110736A - Manufacture of pressure sensor - Google Patents
Manufacture of pressure sensorInfo
- Publication number
- JPS6110736A JPS6110736A JP13152484A JP13152484A JPS6110736A JP S6110736 A JPS6110736 A JP S6110736A JP 13152484 A JP13152484 A JP 13152484A JP 13152484 A JP13152484 A JP 13152484A JP S6110736 A JPS6110736 A JP S6110736A
- Authority
- JP
- Japan
- Prior art keywords
- base
- pressure sensor
- fixed electrode
- recess
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は、超精密圧力測定に使用される圧力センサの製
造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method of manufacturing a pressure sensor used for ultra-precision pressure measurement.
（ロ）従来の技術
圧力センサの一種には、第５図に示すように、石英ガラ
ス等からなるベースａの表面に凹部すを設け、該ベース
ａの表面に同質ガラスで成形した薄板状のたわみプレー
ト（感圧プレート）Ｃを貼設しである微小間隔に設定し
た真空間隙ｄを形成するとともに、その真空間′Ｗｐｄ
を挟むベースａとたわみプレートＣとに、固定電極ｅと
可変位電極ｆとを対設してなる構造のものがある。すな
わち、この構造に係るものでは、そのたわみプレー１−
ｃに圧力が作用すると、該プレー）Ｃが内面の１丁変
位電極ｆと共に変位して、真空間隙ｄの間隔あるいは容
量が圧力に応じて変化することを利用するようにしたも
のであって、具体的には、可変位電極ｆと固定電極ｅと
の間の静電容量の変化や間隔変化による共振周波数の変
化を電気的に検出して圧力を精密測定できるようにして
いる。(b) As shown in Fig. 5, one type of conventional pressure sensor has a concave portion formed on the surface of a base a made of quartz glass, etc. A deflection plate (pressure sensitive plate) C is pasted to form a vacuum gap d set at a certain minute interval, and the vacuum space 'Wpd
There is a structure in which a fixed electrode e and a variable electrode f are disposed opposite to a base a and a flexible plate C which sandwich the same. That is, in this structure, the deflection play 1-
When pressure is applied to c, the plate C is displaced together with one displacement electrode f on the inner surface, and the spacing or capacity of the vacuum gap d changes in accordance with the pressure. Specifically, pressure can be precisely measured by electrically detecting changes in resonance frequency due to changes in capacitance and changes in spacing between variable electrode f and fixed electrode e.
しかして、この種の構成、原理にもとづく圧力センサに
あっては、前記真空間隙ｄの設定間隔を可及的小さなも
のとすること、即ち、前記電極ｅ、ｆの電極間圧＃ Ｄ
、を可及的小さなものとすることが技術的に指向される
。つまり、この種構造のものでは、その圧力検出感度が
、前記対向配置される電極ｅ、ｆの間隔を小さくしてそ
の静電容量を可及的増大することにより一層鋭敏なもの
とされるからである。Therefore, in a pressure sensor based on this type of configuration and principle, the set interval of the vacuum gap d should be as small as possible, that is, the interelectrode pressure #D between the electrodes e and f should be kept as small as possible.
, is technically oriented to make it as small as possible. In other words, in this type of structure, the pressure detection sensitivity is made even more sensitive by reducing the distance between the opposing electrodes e and f and increasing the capacitance as much as possible. It is.
ところが、現状では主にその製造技術上の困難に起因し
て上記の高感度化指向に限界を来たしているのが実情で
ある。従来、この種圧カセンサをつくる方法としては、
表面に所要の加工を施こしタベースに別体のたわみプレ
ートを貼設することにより行なわれている。すなわち、
前記ベースａの表面に必要な前記凹部すを機械的に研削
加工して設け、その底部に前記固定電極ｅをコーティン
ングして設ける一方、同様にその内面に予め前記町変位
電極ｆを設けた別体の前記たわみプレートＣを適宜の接
着剤を介してベースの表面に貼り合せるようにするのが
通例である。しかし、このよ。However, the current situation is that the above-mentioned trend toward higher sensitivity has reached its limit, mainly due to difficulties in manufacturing technology. Conventionally, the method for making this type of pressure sensor is as follows:
This is done by applying the necessary processing to the surface and attaching a separate flexible plate to the table base. That is,
The necessary concave portions are provided on the surface of the base a by mechanical grinding, and the fixed electrodes e are coated on the bottom thereof, while the town displacement electrodes f are similarly provided in advance on the inner surface thereof. It is customary to attach the separate flexible plate C to the surface of the base via a suitable adhesive. But this.
うにして得られるものでは、ベースａに対する加工精度
の点からその凹部すの深さを薄くすること一定の限界（
具体的には１５ＩＬｍ程度以上）があり、そのため真空
間隙ｄの間隔寸法、従って、その電極ｅ、ｆの電極間距
離り、を狭めることにも轟然限度がある不都合を招来し
ている。However, there is a certain limit (
Specifically, it is about 15 ILm or more), which brings about the disadvantage that there is a limit to narrowing the interval dimension of the vacuum space d, and therefore the distance between the electrodes e and f.
（ハ）発明が解決しようとする問題点
本発明は、かかる従来技術の問題点に着目してなされた
もので、上記に特定される種類の圧力センサの製造方法
として、特にその真空間隙を挟む前記対向電極の電極間
距離をより狭いものに自在に調整できるようにしたもの
、換言すればより高感度の圧力センサをつくり出すこと
ができるようにしたもの提供することを目的としている
。(c) Problems to be Solved by the Invention The present invention has been made by paying attention to the problems of the prior art, and provides a method for manufacturing a pressure sensor of the type specified above, especially by sandwiching the vacuum gap. It is an object of the present invention to provide a device in which the distance between the opposing electrodes can be freely adjusted to a narrower one, in other words, a pressure sensor with higher sensitivity can be created.
（ニ）問題点を解決するための手段
本発明は、このような目的を達成するために、ベースの
表面に設けた凹部にたわみプレートを貼設して該凹部内
を真空間隙に形成するとともに、この真空間隙を挟むベ
ースとたわみプレートとに固定電極と可変位電極とを対
設してなる圧力センサの製造方法であって、前記ベース
に前記固定電極を設けるにさいし、まずベースの表面に
粗凹郡を設け１次にこの粗四部の底部に極薄の被覆膜を
積層して凹部深さを調節し、この被覆膜の積層体の上に
前記固定電極を設けるようにしたことを特徴としている
。(d) Means for Solving the Problems In order to achieve the above object, the present invention provides a method in which a flexible plate is attached to a recess provided on the surface of the base to form a vacuum gap within the recess. , a method for manufacturing a pressure sensor in which a fixed electrode and a variable electrode are provided oppositely on a base and a flexible plate that sandwich the vacuum gap, and in providing the fixed electrode on the base, first, the surface of the base is Rough depressions are firstly formed, and then an ultra-thin coating film is laminated on the bottom of these four rough areas to adjust the depth of the depression, and the fixed electrode is provided on top of this stack of coating films. It is characterized by
（ホ）作用
すなわち、本発明の製造方法は、まずベースの表面に適
宜の手段により粗凹部を設け１次にアルコキシドの焼成
ガラスのような極薄の被覆膜の積層体をもって該粗凹部
を底上げするようにすることにより、従来の加工精度の
限界を超えて、固定電極が設けられるその凹部深さを自
在に調整できるようにしたものである。(e) Effect: In the manufacturing method of the present invention, first, rough depressions are formed on the surface of the base by an appropriate means, and then the rough depressions are filled with a laminate of an extremely thin coating film such as fired glass of alkoxide. By raising the bottom, the depth of the recess in which the fixed electrode is provided can be freely adjusted, exceeding the limits of conventional processing accuracy.
（へ）実施例 以下、本発明の実施例を図面を参照して説明する。(f) Example Embodiments of the present invention will be described below with reference to the drawings.
第１図は、先に第５図で示した従来法に係るものと勾比
して示すところの、本発明に係る圧力センサの構成を示
している。そこで、このものを例に、その製造工程を説
明すると、まず石英ガラス等からなるベース１の表面に
、従来と同様にして機械的な研削加工等により粗凹部２
を設けている。次にこの粗凹部２には、第２図に示すよ
うに、その底部に対して極薄の被覆膜３を多層に積層し
、それら積層体４で底部を底上げしている。FIG. 1 shows the configuration of a pressure sensor according to the present invention, which is shown in contrast to the conventional method shown in FIG. Therefore, to explain the manufacturing process using this product as an example, first, the surface of the base 1 made of quartz glass or the like is mechanically ground to form rough recesses 2.
has been established. Next, as shown in FIG. 2, in this rough recess 2, multiple layers of extremely thin coating films 3 are laminated on the bottom of the rough recess 2, and the bottom is raised with these laminates 4.
この被覆膜３の積層数は、粗四部２の加工深さと設定電
極間距離に応じて適宜の暦数に選定される。また、この
被覆膜３を構成する物質としては、フラットな極薄膜の
ものに仕上げられて底上げ微調整が可能なものであると
同時に、望ましくはベース１と同質の絶縁材料を構成す
るものを使用する。いま、ベース１が石英ガラスである
場合について説明すると、かかる物質の好適な具体例と
して、Ｓｌのアルコキシドの焼成ガラスが挙げられる。The number of laminated layers of the coating film 3 is selected as an appropriate number depending on the machining depth of the rough four portions 2 and the set distance between the electrodes. Furthermore, the material constituting the coating film 3 should be a flat, ultra-thin film that can be finely adjusted to raise the bottom, and preferably be made of the same insulating material as the base 1. use. Now, to explain the case where the base 1 is quartz glass, a preferred specific example of such a material is a fired glass of Sl alkoxide.
すなわち、Ｓｉのアルコキシド（特にケイ酸エチル；
Ｓ ｉ （ＯｃＪＨｆ）４が好適である）は溶媒と共に
塗布して０．１〜０．２４ｍ程度の極めて薄い膜状体と
して均一に被覆することが容易にできるし、これを加水
分解させて焼成すると、最終的にべ−ス１と同質の５ｉ
ＯＪを構成することになるからである（ちなみに、この
Ｓｌのアルコキシド焼成ガラスによる積層体４では、被
覆Ｗｔ３とベース１および各被覆膜３同士が完全に一体
均質化することになる）。That is, Si alkoxide (especially ethyl silicate;
S i (OcJHf)4 is suitable) can be easily coated with a solvent to uniformly coat it as an extremely thin film of about 0.1 to 0.24 m, and this can be hydrolyzed and baked. Then, the final result is 5i, which is the same as base 1.
This is because OJ will be constituted (Incidentally, in the laminate 4 made of this Sl alkoxide fired glass, the coating Wt3, the base 1, and each coating film 3 will be completely homogenized together).
かくして、粗凹部２の底部を被覆膜３の積層体４で底−
ヒげし、その凹部深さを任意に調節したベース１には、
その積層体４の上に従来と同様にして固定電極５が設け
られ、さらにひき続き常法の如くしてたわみプレート６
が貼設される。すなわち、前記積層体４の上に金属蒸着
等によるコーティングで所要の固定電極５を設けるとと
もに、予めその内面所定位置に可変位電極７を設けであ
るたわみプレート６をベース１の表面に適宜接着剤（例
えば前記と同様のアルコキシド）を介し真空中で貼設一
体化することにより、その真空間隙８に電極５．７を対
設をしてなる圧力センサが得られる。このようにして得
られる圧力センサでは、その真空間隙８を挟む固定電極
５と可変位電極７との電極間距離りを、被覆層３の積層
により調節して従来品のそれよりも小さい（Ｄ ＜ Ｄ
、）任意の微小間隔に制御することが容易に可能となる
。In this way, the bottom of the rough recess 2 is covered with the laminate 4 of the coating film 3.
The base 1 has a beard and the depth of the recess is adjusted arbitrarily.
A fixed electrode 5 is provided on the laminate 4 in a conventional manner, and a flexible plate 6 is subsequently attached in a conventional manner.
will be affixed. That is, a required fixed electrode 5 is provided on the laminate 4 by coating with metal vapor deposition or the like, and a flexible plate 6, which has a variable displacement electrode 7 provided at a predetermined position on its inner surface, is attached to the surface of the base 1 with an appropriate adhesive. (For example, the same alkoxide as described above) is bonded and integrated in a vacuum, thereby obtaining a pressure sensor in which the electrodes 5.7 are disposed opposite to each other in the vacuum gap 8. In the pressure sensor obtained in this way, the inter-electrode distance between the fixed electrode 5 and the variable electrode 7, which sandwich the vacuum gap 8, is adjusted by laminating the covering layer 3 to be smaller than that of the conventional product (D <D
,) It becomes possible to easily control the distance to an arbitrary minute interval.
次に、第３図、第４図に示される他の実施例について説
明する。本発明の製造方法では、ベース１に設けられる
四部の電極設置面に当る底部は、最終的には被覆膜３の
積層により任意の深さでかつフラットなものに仕上げる
ことが可能である。Next, other embodiments shown in FIGS. 3 and 4 will be described. In the manufacturing method of the present invention, the bottom part corresponding to the four electrode mounting surfaces provided on the base 1 can finally be finished to any desired depth and flat by laminating the coating film 3.
従って、ベース１に最初の工程で設ける粗凹部２は、左
程の加工精度を必要とせず、それ数種々の簡便な加工手
段を採用することが可能である。Therefore, the rough recess 2 formed in the base 1 in the first step does not require such high processing precision, and a variety of simple processing methods can be employed.
第３図に示す圧力センサの例では、その粗凹部２−１を
円弧面に成形するようにして凹設し、その底部を被覆膜
３の積層体４で平坦化している。つまり、このようにす
ると、ベースｌに対する加工の便宜が図られる。In the example of the pressure sensor shown in FIG. 3, the rough recess 2-1 is formed into an arcuate surface, and the bottom thereof is flattened with a laminate 4 of the coating film 3. In other words, by doing so, it is possible to facilitate processing of the base l.
また、第４図に示すものの例では、ベース１のプレーン
面に別体の薄膜リング状のスペーサ９を貼設して所要の
粗凹部２−２を設けるようにしている。この場合では、
研削加工を必要としないから加工の簡便化が期待できる
。Further, in the example shown in FIG. 4, a separate thin film ring-shaped spacer 9 is pasted on the plain surface of the base 1 to provide a required rough recess 2-2. In this case,
Since no grinding is required, processing can be expected to be simplified.
なお、以上に述べた実施例では、ベース１に石英ガラス
を用いる場合を例に一説明したか、ベース１の材質は勿
論これに限定されず、その他種々の材料が使用できる。In the embodiments described above, the base 1 is made of quartz glass, but the material of the base 1 is of course not limited to this, and various other materials can be used.
そして、特にガラス質のもののベース材料の場合では、
やはりその成分に対応するアルコキシドの焼成ガラスを
被覆膜３の構成材料とすればよい６例えば、ＡＩｔＯ，
系ガラスに対しては、Ａ１のアルコキシドの焼成ガラス
をもって被覆膜３を構成するのである。And especially in the case of glassy base materials,
After all, the constituent material of the coating film 3 may be a fired glass of an alkoxide corresponding to the component6.For example, AItO,
For the type glass, the coating film 3 is composed of the fired glass of the alkoxide A1.
（ト）発明の詳細
な説明したように、本発明の製造方法では、ベース表面
にまず粗凹部を設け、次いでその凹部深さを極薄の被覆
膜を積層して調節し、その上に固定電極を設けるように
したものであるから、圧力センサとしてその電極間距離
を狭ばめたもの、つまり非常に高感度のものをつくり出
すことが可能である。そして、その製造工程においては
、粗四部の形成にあまり加工精度を要求されなくなるか
ら、この魚加工上有利であるし、また最終的に真空間隙
乃至電極間距離を決定するその凹部深さは、被覆膜によ
り微調整できるから品質安定化の上でも好都合なもので
ある。(G) As described in detail of the invention, in the manufacturing method of the present invention, a rough recess is first provided on the base surface, then the depth of the recess is adjusted by laminating an extremely thin coating film, and then Since fixed electrodes are provided, it is possible to create a pressure sensor with a narrowed distance between the electrodes, that is, a pressure sensor with extremely high sensitivity. In the manufacturing process, the formation of the rough four parts does not require much processing precision, which is advantageous for processing the fish, and the depth of the recess, which ultimately determines the vacuum gap or the distance between the electrodes, is Fine adjustment can be made using the coating film, which is advantageous in terms of quality stabilization.
第１図は、本発明の一実施例に係る圧力センサの構造を
示す概略断面図であり、第２図は、その要部拡大図であ
る。第３図と第４図は、本発明の他の実施例に係る圧力
センサの構造を示す各概略断面図である。第５図は、従
来法により得られる圧力センサの構造を示す概略断面図
である。
１・・・ベース
２．２−１． ２−２・・・粗凹部
３・・・被覆膜 ４・・・積層体
５・・拳固定電極
６Ｏ拳・たわみプレート
７・・・可変位電極 ８・・・真空間隙９・・争スペー
サ。FIG. 1 is a schematic sectional view showing the structure of a pressure sensor according to an embodiment of the present invention, and FIG. 2 is an enlarged view of the main parts thereof. 3 and 4 are schematic sectional views showing the structure of a pressure sensor according to another embodiment of the present invention. FIG. 5 is a schematic sectional view showing the structure of a pressure sensor obtained by a conventional method. 1...Base 2.2-1. 2-2...Rough concave portion 3...Coating film 4...Laminated body 5...Fist fixed electrode 6O fist/deflection plate 7...Variable position electrode 8...Vacuum gap 9...War spacer .
Claims (2)
設して該凹部内を真空間隙に形成するとともに、この真
空間隙を挟むベースとたわみプレートとに固定電極と可
変位電極とを対設してなる圧力センサの製造方法であっ
て、前記ベースに前記固定電極を設けるにさいし、まず
ベースの表面に粗凹部を設け、次にこの粗凹部の底部に
極薄の被覆膜を積層して凹部深さを調節し、この被覆膜
の積層体の上に前記固定電極を設けるようにしたことを
特徴とする圧力センサの製造方法。(1) A flexible plate is attached to a recess provided on the surface of the base to form a vacuum gap within the recess, and a fixed electrode and a variable electrode are provided oppositely to the base and flexible plate that sandwich this vacuum gap. A method of manufacturing a pressure sensor comprising the steps of: providing the fixed electrode on the base; first providing a rough recess on the surface of the base; then laminating an extremely thin coating film on the bottom of the rough recess; A method for manufacturing a pressure sensor, characterized in that the depth of the recess is adjusted by adjusting the depth of the recess, and the fixed electrode is provided on the layered body of the coating film.
の焼成ガラスからなることを特徴とする特許請求の範囲
第１項記載の圧力センサの製造方法。(2) The method for manufacturing a pressure sensor according to claim 1, wherein the base is made of glass and the coating film is made of fired alkoxide glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13152484A JPS6110736A (en) | 1984-06-25 | 1984-06-25 | Manufacture of pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13152484A JPS6110736A (en) | 1984-06-25 | 1984-06-25 | Manufacture of pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6110736A true JPS6110736A (en) | 1986-01-18 |
| JPH0580609B2 JPH0580609B2 (en) | 1993-11-09 |
Family
ID=15060071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13152484A Granted JPS6110736A (en) | 1984-06-25 | 1984-06-25 | Manufacture of pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6110736A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002036521A1 (en) * | 2000-10-27 | 2002-05-10 | Yamatake Corporation | Jointing material and joining method |
| EP1653209A1 (en) * | 2003-07-03 | 2006-05-03 | Toyo Communication Equipment Co., Ltd. | Quartz type pressure sensor, and production method therefor |
| US7809089B2 (en) | 2004-03-12 | 2010-10-05 | University Of Tsukuba | Decorrelating discrimination system of code division multiple access signals |
| WO2011006741A1 (en) * | 2009-07-15 | 2011-01-20 | Endress+Hauser Gmbh+Co. Kg | Capacitive ceramic load cell and pressure sensor having such a load cell |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5942938U (en) * | 1982-09-14 | 1984-03-21 | 松下電器産業株式会社 | Capacitive pressure sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5942938B2 (en) * | 1979-05-31 | 1984-10-18 | 松下電工株式会社 | Breaker trip mechanism |
-
1984
- 1984-06-25 JP JP13152484A patent/JPS6110736A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5942938U (en) * | 1982-09-14 | 1984-03-21 | 松下電器産業株式会社 | Capacitive pressure sensor |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002036521A1 (en) * | 2000-10-27 | 2002-05-10 | Yamatake Corporation | Jointing material and joining method |
| US7198666B2 (en) | 2000-10-27 | 2007-04-03 | Yamatake Corporation | Jointing material comprising a mixture of boron oxide and aluminum oxide and method of jointing utilizing said jointing material |
| EP1653209A1 (en) * | 2003-07-03 | 2006-05-03 | Toyo Communication Equipment Co., Ltd. | Quartz type pressure sensor, and production method therefor |
| EP1653209A4 (en) * | 2003-07-03 | 2007-03-07 | Toyo Communication Equip | Quartz type pressure sensor, and production method therefor |
| US7809089B2 (en) | 2004-03-12 | 2010-10-05 | University Of Tsukuba | Decorrelating discrimination system of code division multiple access signals |
| WO2011006741A1 (en) * | 2009-07-15 | 2011-01-20 | Endress+Hauser Gmbh+Co. Kg | Capacitive ceramic load cell and pressure sensor having such a load cell |
| US8966989B2 (en) | 2009-07-15 | 2015-03-03 | Endress + Hauser Gmbh + Co. Kg | Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580609B2 (en) | 1993-11-09 |
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