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JPS6110736A - Manufacture of pressure sensor - Google Patents

Manufacture of pressure sensor

Info

Publication number
JPS6110736A
JPS6110736A JP13152484A JP13152484A JPS6110736A JP S6110736 A JPS6110736 A JP S6110736A JP 13152484 A JP13152484 A JP 13152484A JP 13152484 A JP13152484 A JP 13152484A JP S6110736 A JPS6110736 A JP S6110736A
Authority
JP
JAPAN
Prior art keywords
base
provided
recess part
surface
made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13152484A
Other versions
JPH0580609B2 (en
Inventor
Yoshio Ashida
Hide Kobayashi
Hidefumi Saito
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP59131524A priority Critical patent/JPH0580609B2/ja
Publication of JPS6110736A publication Critical patent/JPS6110736A/en
Publication of JPH0580609B2 publication Critical patent/JPH0580609B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

PURPOSE:To enhance sensitivity, in providing a fixed electrode on a base, by laminating very thin coating films on the bottom of a coarse recess part, which is provided in the surface of the base, adjusting the depth of the recess part in this way, and providing the fixed electrode on the laminated body. CONSTITUTION:A coarse recess part 2 is provided in the surface of a base 1 comprising auqrtz glass and the like. When the base 1 is made of the quartz glass, many very thin coating films 3 made of burned glass of alkoxide of Si, which is an insulating material having the same quality as that of the quartz glass, are laminated in the recess part 2, and a laminated body 4 is formed. A fixed electrode 5 is provided on the laminated body 4 by metal evaporation coating and the like. A position varying electrode 7 is provided at a specified position of the inner surface of a deflecting plate 6. The plate 6 is stuck to the surface of the base 1 through a bonding agent so as to form a unitary body. The electrodes 5 and 7 are provided in a vacuum gap 8 so as to face each other. Thus a pressure sensor is formed. In this way, an interval D between the electrodes is made to be an arbitrary minute gap.
JP59131524A 1984-06-25 1984-06-25 Expired - Lifetime JPH0580609B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59131524A JPH0580609B2 (en) 1984-06-25 1984-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59131524A JPH0580609B2 (en) 1984-06-25 1984-06-25

Publications (2)

Publication Number Publication Date
JPS6110736A true JPS6110736A (en) 1986-01-18
JPH0580609B2 JPH0580609B2 (en) 1993-11-09

Family

ID=15060071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59131524A Expired - Lifetime JPH0580609B2 (en) 1984-06-25 1984-06-25

Country Status (1)

Country Link
JP (1) JPH0580609B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002036521A1 (en) * 2000-10-27 2002-05-10 Yamatake Corporation Jointing material and joining method
EP1653209A1 (en) * 2003-07-03 2006-05-03 Toyo Communication Equipment Co., Ltd. Quartz type pressure sensor, and production method therefor
US7809089B2 (en) 2004-03-12 2010-10-05 University Of Tsukuba Decorrelating discrimination system of code division multiple access signals
WO2011006741A1 (en) * 2009-07-15 2011-01-20 Endress+Hauser Gmbh+Co. Kg Capacitive ceramic load cell and pressure sensor having such a load cell

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942938U (en) * 1982-09-14 1984-03-21

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942938B2 (en) * 1979-05-31 1984-10-18 Matsushita Electric Works Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942938U (en) * 1982-09-14 1984-03-21

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002036521A1 (en) * 2000-10-27 2002-05-10 Yamatake Corporation Jointing material and joining method
US7198666B2 (en) 2000-10-27 2007-04-03 Yamatake Corporation Jointing material comprising a mixture of boron oxide and aluminum oxide and method of jointing utilizing said jointing material
EP1653209A1 (en) * 2003-07-03 2006-05-03 Toyo Communication Equipment Co., Ltd. Quartz type pressure sensor, and production method therefor
EP1653209A4 (en) * 2003-07-03 2007-03-07 Toyo Communication Equip Quartz type pressure sensor, and production method therefor
US7809089B2 (en) 2004-03-12 2010-10-05 University Of Tsukuba Decorrelating discrimination system of code division multiple access signals
WO2011006741A1 (en) * 2009-07-15 2011-01-20 Endress+Hauser Gmbh+Co. Kg Capacitive ceramic load cell and pressure sensor having such a load cell
US8966989B2 (en) 2009-07-15 2015-03-03 Endress + Hauser Gmbh + Co. Kg Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell

Also Published As

Publication number Publication date
JPH0580609B2 (en) 1993-11-09

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