JPS61106027U - - Google Patents
Info
- Publication number
- JPS61106027U JPS61106027U JP19120184U JP19120184U JPS61106027U JP S61106027 U JPS61106027 U JP S61106027U JP 19120184 U JP19120184 U JP 19120184U JP 19120184 U JP19120184 U JP 19120184U JP S61106027 U JPS61106027 U JP S61106027U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- developer
- wafer chuck
- chuck
- developer container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19120184U JPS61106027U (cs) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19120184U JPS61106027U (cs) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61106027U true JPS61106027U (cs) | 1986-07-05 |
Family
ID=30748641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19120184U Pending JPS61106027U (cs) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61106027U (cs) |
-
1984
- 1984-12-17 JP JP19120184U patent/JPS61106027U/ja active Pending