JPS61106024U - - Google Patents
Info
- Publication number
- JPS61106024U JPS61106024U JP19146484U JP19146484U JPS61106024U JP S61106024 U JPS61106024 U JP S61106024U JP 19146484 U JP19146484 U JP 19146484U JP 19146484 U JP19146484 U JP 19146484U JP S61106024 U JPS61106024 U JP S61106024U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- leak gas
- manufacturing apparatus
- semiconductor manufacturing
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Pipeline Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19146484U JPS61106024U (US08066781-20111129-C00013.png) | 1984-12-19 | 1984-12-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19146484U JPS61106024U (US08066781-20111129-C00013.png) | 1984-12-19 | 1984-12-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61106024U true JPS61106024U (US08066781-20111129-C00013.png) | 1986-07-05 |
Family
ID=30748903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19146484U Pending JPS61106024U (US08066781-20111129-C00013.png) | 1984-12-19 | 1984-12-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61106024U (US08066781-20111129-C00013.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111936A (ja) * | 1986-10-28 | 1988-05-17 | Ulvac Corp | 真空処理装置用着脱自在可動式被処理物搬入・搬出装置 |
JPS63111937A (ja) * | 1986-10-28 | 1988-05-17 | Ulvac Corp | 真空処理装置用着脱自在可動式被処理物搬入・搬出装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4417881Y1 (US08066781-20111129-C00013.png) * | 1965-12-08 | 1969-08-02 | ||
JPS58156593A (ja) * | 1982-03-10 | 1983-09-17 | Nippon Telegr & Teleph Corp <Ntt> | 気相エピタキシヤル成長装置 |
-
1984
- 1984-12-19 JP JP19146484U patent/JPS61106024U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4417881Y1 (US08066781-20111129-C00013.png) * | 1965-12-08 | 1969-08-02 | ||
JPS58156593A (ja) * | 1982-03-10 | 1983-09-17 | Nippon Telegr & Teleph Corp <Ntt> | 気相エピタキシヤル成長装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111936A (ja) * | 1986-10-28 | 1988-05-17 | Ulvac Corp | 真空処理装置用着脱自在可動式被処理物搬入・搬出装置 |
JPS63111937A (ja) * | 1986-10-28 | 1988-05-17 | Ulvac Corp | 真空処理装置用着脱自在可動式被処理物搬入・搬出装置 |