JPS61105436A - Pressure detecting device - Google Patents
Pressure detecting deviceInfo
- Publication number
- JPS61105436A JPS61105436A JP22811184A JP22811184A JPS61105436A JP S61105436 A JPS61105436 A JP S61105436A JP 22811184 A JP22811184 A JP 22811184A JP 22811184 A JP22811184 A JP 22811184A JP S61105436 A JPS61105436 A JP S61105436A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- pressure detection
- pressure detecting
- detecting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、小型コンパクトな計器等に圧力計を内蔵する
場合において、狭い空間を有効に活用できる簡単な構成
で実現できるものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention can be realized with a simple configuration that can effectively utilize a narrow space when a pressure gauge is built into a small and compact instrument.
従来例の構成とその問題点
従来の圧力計は、ダイヤフラムの両面の圧力差で前記ダ
イヤフラムが変移を生じ、その変移量を電気信号または
、光信号等に変換して圧力を読みとっていた。また、ベ
ローズにガスを封入し、そのガスの圧力に応じて変移が
生じ、その変移量に応じて指針を回転運動に変換して圧
力を読みとっていた。前者は低圧測定に、後者は高圧測
定に適している。しかし、後者の場合は一般的に構造が
大きく、また、前者の場合も電気信号を取出すためのコ
イルや比較的大きな対向電極、光信号を取出すための光
学的な構成が比較的大きく、狭い空間を利用して圧力を
計測する為には構成上コンパクトにはならない問題があ
った。Structure of the conventional example and its problems In the conventional pressure gauge, the diaphragm causes a displacement due to the pressure difference between the two sides of the diaphragm, and the pressure is read by converting the amount of displacement into an electric signal or an optical signal. In addition, gas was sealed in the bellows, and a shift occurred depending on the pressure of the gas, and the pressure was read by converting the pointer into rotational motion depending on the amount of shift. The former is suitable for low pressure measurements, and the latter is suitable for high pressure measurements. However, in the latter case, the structure is generally large, and in the former case, the coil for extracting electrical signals, a relatively large counter electrode, and the optical structure for extracting optical signals are relatively large, and the space is narrow. There was a problem in that the structure could not be made compact in order to measure pressure using it.
発明の目的
本発明は、従来の問題点を解消するもので、小型計器内
に１圧力計を内蔵する場合において、ダイヤフラムに固
定された電極と、圧力検出回路を構成するプリント基板
を対抗電極に用いることによ−１て、小型で安価な圧力
計を提供するものである。OBJECT OF THE INVENTION The present invention solves the problems of the prior art, and when one pressure gauge is built into a small instrument, an electrode fixed to a diaphragm and a printed circuit board constituting a pressure detection circuit are used as counter electrodes. By using this, a small and inexpensive pressure gauge can be provided.
発明の構成
第１図は小型計器内に圧力検出機構および圧力検出回路
を内蔵したものを示す一例である。１は小型計器、２は
ガス雰囲気で圧力の測定対象ガス体、３は大気、４はダ
イヤフラムで、５はパツキン、６はダイヤフラムに固定
された圧力検出電極、７は圧力検出回路９を組込んだプ
リント基板であると同時に、プリント基板７の金属箔パ
ターンの一部が、ダイヤフラム４に固定した圧力検出電
極６の対向電極８として構成されている。圧力が一定限
界値を越えた場合にガス流を遮断するガス遮断弁１７も
ある。システムの構成は第２図にその一例を示す。圧力
検出電極６と、対向室Ｗｉ８とで形成される静電容量で
発振する発振回路１０と、周波数弁別器１１と、増幅器
１２と、表示器１ａと、限界判定の比較器１４と、限界
値逸脱を警報する警報器１５と、ガス遮断回路１６およ
び電源１８から構成される。Structure of the Invention FIG. 1 shows an example of a small instrument in which a pressure detection mechanism and a pressure detection circuit are built-in. 1 is a small instrument, 2 is a gas body whose pressure is to be measured in a gas atmosphere, 3 is the atmosphere, 4 is a diaphragm, 5 is a gasket, 6 is a pressure detection electrode fixed to the diaphragm, and 7 is a pressure detection circuit 9 built in. In addition to being a printed circuit board, a part of the metal foil pattern of the printed circuit board 7 is configured as a counter electrode 8 of the pressure detection electrode 6 fixed to the diaphragm 4. There is also a gas shut-off valve 17 that shuts off the gas flow if the pressure exceeds a certain limit. An example of the system configuration is shown in Figure 2. An oscillation circuit 10 that oscillates with a capacitance formed by the pressure detection electrode 6 and the opposing chamber Wi8, a frequency discriminator 11, an amplifier 12, an indicator 1a, a limit judgment comparator 14, and a limit value. It is composed of an alarm 15 that warns of deviation, a gas cutoff circuit 16, and a power supply 18.
実施例の説明
前記発明の構成において、ガス雰囲気２のガス圧の変動
に伴い、ダイヤフラム４が変移すると、前記ダイヤフラ
ム４に固定している圧力検出電極６が変移する。一方、
プリント基板７に形成すれて、Ｊ、Ｌつ、固定されてい
る対向′ＣＥ極８との相対位置の変化が生じて、両者６
と８で形成される静電容量値に変化を来たし、発振器１
０の発振周波数が変化する。周波数の変化値を周波数弁
別器１１で検出し増幅器１２を通して表示器１３で表示
するシステムである。表示器１３の指示値を読み易く、
リニヤにするためには圧力の変化量と周波数弁別器１１
の出力との相関が必ずしもリニヤではないので増幅器１
２の特性を適当に選定して補正してやる必要がある。ま
た圧力変動の上限または下限に限界値を設けて、前記限
界値を逸脱した場。DESCRIPTION OF THE EMBODIMENTS In the configuration of the invention, when the diaphragm 4 shifts due to fluctuations in the gas pressure of the gas atmosphere 2, the pressure detection electrode 6 fixed to the diaphragm 4 shifts. on the other hand,
There is a change in the relative position of the opposing 'CE' poles 8, which are formed on the printed circuit board 7 and are fixed, so that both of them 6
This causes a change in the capacitance value formed by oscillator 1 and 8.
The oscillation frequency of 0 changes. In this system, a frequency change value is detected by a frequency discriminator 11, passed through an amplifier 12, and displayed on a display 13. The indicated value on the display 13 is easy to read,
To make it linear, change amount of pressure and frequency discriminator 11
Since the correlation with the output of amplifier 1 is not necessarily linear,
It is necessary to appropriately select and correct the characteristics of 2. Also, a limit value is set for the upper or lower limit of pressure fluctuation, and if the limit value is exceeded.
合は、周波数弁別器１１の出力を比較器１４によって限
界判定を行ない警報器１５を作動させて警報するか、ガ
ス遮断回路１６を起動し遮断弁１７を作動してガス流を
遮断することができる。If so, the output of the frequency discriminator 11 is subjected to a limit judgment by the comparator 14 and the alarm 15 is activated to issue an alarm, or the gas shutoff circuit 16 is activated and the shutoff valve 17 is activated to shut off the gas flow. can.
発明の効果
（１）小型コンパクトで安価な圧力検出装置が実現でき
る。Effects of the invention (1) A small, compact, and inexpensive pressure detection device can be realized.
（２）圧力検出回路と同一プリント基板に対向電極が形
成できるので、省配線である。(2) Since the counter electrode can be formed on the same printed circuit board as the pressure detection circuit, wiring can be saved.
第１図は本発明の一実施例の圧力検出装置の小１・・・
・・・小型計器、２・・・・・・ガス雰囲気、３・・・
・・・大気、４・・・・・・ダイヤフラム、５・・・・
・・パツキン、６・・・・・・圧力検出電極、８・・・
・・・対向電極、９・・・・・・圧力検出回路。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
！・・・ ノド’！！”０１−、Ｗ
？・・・ガス１１迅欠
３・−・大気
４・・・夕°イイフンム
５・・・バー／キン
６・・・ｒ４壱１とｔＪ享に
θ・・・対向鷹本トFig. 1 shows a small 1... of a pressure detection device according to an embodiment of the present invention.
...Small instrument, 2...Gas atmosphere, 3...
...Atmosphere, 4...Diaphragm, 5...
...Packskin, 6...Pressure detection electrode, 8...
. . . Counter electrode, 9 . . . Pressure detection circuit. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
figure! ... Nodo'! ! ”01-, W ?...Gas 11 quickness 3--Atmosphere 4...Evening angle 5...Bar/Kin 6...r4 Ichi 1 and tJ Kyōni θ...Opposing Takamoto to
Claims (1)
イヤフラムに固定された圧力検出電極と、前記圧力検出
電極と対向してプリント基板の金属箔による対向電極と
、前記プリント基板と同一基板上に前記圧力検出電極と
対向電極との変移によって生ずる圧力信号を検出する圧
力検出回路を備えた圧力検出装置。a diaphragm that generates a change in response to pressure changes; a pressure detection electrode fixed to the diaphragm; a counter electrode made of metal foil on a printed circuit board facing the pressure detection electrode; A pressure detection device equipped with a pressure detection circuit that detects a pressure signal generated by a transition between a detection electrode and a counter electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22811184A JPS61105436A (en) | 1984-10-30 | 1984-10-30 | Pressure detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22811184A JPS61105436A (en) | 1984-10-30 | 1984-10-30 | Pressure detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61105436A true JPS61105436A (en) | 1986-05-23 |
Family
ID=16871376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22811184A Pending JPS61105436A (en) | 1984-10-30 | 1984-10-30 | Pressure detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105436A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262537A (en) * | 1987-04-20 | 1988-10-28 | Saginomiya Seisakusho Inc | Pressure measuring apparatus |
| JP2008039626A (en) * | 2006-08-08 | 2008-02-21 | Epson Toyocom Corp | Pressure detection device |
-
1984
- 1984-10-30 JP JP22811184A patent/JPS61105436A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262537A (en) * | 1987-04-20 | 1988-10-28 | Saginomiya Seisakusho Inc | Pressure measuring apparatus |
| JP2008039626A (en) * | 2006-08-08 | 2008-02-21 | Epson Toyocom Corp | Pressure detection device |
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