JPS6110468Y2 - - Google Patents

Info

Publication number
JPS6110468Y2
JPS6110468Y2 JP1979148051U JP14805179U JPS6110468Y2 JP S6110468 Y2 JPS6110468 Y2 JP S6110468Y2 JP 1979148051 U JP1979148051 U JP 1979148051U JP 14805179 U JP14805179 U JP 14805179U JP S6110468 Y2 JPS6110468 Y2 JP S6110468Y2
Authority
JP
Japan
Prior art keywords
pallet
station
linear
motor
linear motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979148051U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5664928U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979148051U priority Critical patent/JPS6110468Y2/ja
Publication of JPS5664928U publication Critical patent/JPS5664928U/ja
Application granted granted Critical
Publication of JPS6110468Y2 publication Critical patent/JPS6110468Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Control Of Conveyors (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Control Of Position Or Direction (AREA)
JP1979148051U 1979-10-24 1979-10-24 Expired JPS6110468Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (en, 2012) 1979-10-24 1979-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (en, 2012) 1979-10-24 1979-10-24

Publications (2)

Publication Number Publication Date
JPS5664928U JPS5664928U (en, 2012) 1981-05-30
JPS6110468Y2 true JPS6110468Y2 (en, 2012) 1986-04-03

Family

ID=29379196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979148051U Expired JPS6110468Y2 (en, 2012) 1979-10-24 1979-10-24

Country Status (1)

Country Link
JP (1) JPS6110468Y2 (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946907U (ja) * 1982-09-21 1984-03-28 神鋼電機株式会社 搬送装置
JPH088723B2 (ja) * 1985-11-02 1996-01-29 日立機電工業株式会社 リニアモ−タを用いた搬送装置
JP2645002B2 (ja) * 1987-02-12 1997-08-25 株式会社東芝 浮上式搬送車の制御装置
JP2005351359A (ja) * 2004-06-10 2005-12-22 Ulvac Japan Ltd 真空処理装置の真空処理室におけるキャリアの位置決め装置

Also Published As

Publication number Publication date
JPS5664928U (en, 2012) 1981-05-30

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