JPS61104683A - ガスレ−ザ発振装置 - Google Patents

ガスレ−ザ発振装置

Info

Publication number
JPS61104683A
JPS61104683A JP22580784A JP22580784A JPS61104683A JP S61104683 A JPS61104683 A JP S61104683A JP 22580784 A JP22580784 A JP 22580784A JP 22580784 A JP22580784 A JP 22580784A JP S61104683 A JPS61104683 A JP S61104683A
Authority
JP
Japan
Prior art keywords
discharge
gas
discharge electrodes
laser oscillation
preliminary discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22580784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329316B2 (enrdf_load_html_response
Inventor
Saburo Sato
三郎 佐藤
Shuichi Ishida
修一 石田
Yasukazu Matsuoka
松岡　靖和
Tatsumi Goto
後藤　達美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22580784A priority Critical patent/JPS61104683A/ja
Publication of JPS61104683A publication Critical patent/JPS61104683A/ja
Publication of JPH0329316B2 publication Critical patent/JPH0329316B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP22580784A 1984-10-29 1984-10-29 ガスレ−ザ発振装置 Granted JPS61104683A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22580784A JPS61104683A (ja) 1984-10-29 1984-10-29 ガスレ−ザ発振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22580784A JPS61104683A (ja) 1984-10-29 1984-10-29 ガスレ−ザ発振装置

Publications (2)

Publication Number Publication Date
JPS61104683A true JPS61104683A (ja) 1986-05-22
JPH0329316B2 JPH0329316B2 (enrdf_load_html_response) 1991-04-23

Family

ID=16835097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22580784A Granted JPS61104683A (ja) 1984-10-29 1984-10-29 ガスレ−ザ発振装置

Country Status (1)

Country Link
JP (1) JPS61104683A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102761047A (zh) * 2012-07-30 2012-10-31 中国科学院光电研究院 一种气体激光器放电腔的电极机构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100355938B1 (ko) 1993-05-26 2002-12-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치제작방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848485A (ja) * 1981-09-16 1983-03-22 Mitsubishi Electric Corp パルスレ−ザ発振器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848485A (ja) * 1981-09-16 1983-03-22 Mitsubishi Electric Corp パルスレ−ザ発振器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102761047A (zh) * 2012-07-30 2012-10-31 中国科学院光电研究院 一种气体激光器放电腔的电极机构

Also Published As

Publication number Publication date
JPH0329316B2 (enrdf_load_html_response) 1991-04-23

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