JPS61103774A - Lapping device - Google Patents

Lapping device

Info

Publication number
JPS61103774A
JPS61103774A JP59227078A JP22707884A JPS61103774A JP S61103774 A JPS61103774 A JP S61103774A JP 59227078 A JP59227078 A JP 59227078A JP 22707884 A JP22707884 A JP 22707884A JP S61103774 A JPS61103774 A JP S61103774A
Authority
JP
Japan
Prior art keywords
pressure
air cylinder
air
lap plate
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59227078A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Sakai
Michiharu Shibuya
Shinji Sawa
Taizo Shimomura
Original Assignee
Kokoro:Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokoro:Kk filed Critical Kokoro:Kk
Priority to JP59227078A priority Critical patent/JPS61103774A/en
Publication of JPS61103774A publication Critical patent/JPS61103774A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to accurately control the position of an upper lap plate by providing a programmable controller for controlling the operation of an air cylinder to pressure the upper lap plate according to the operation amount and pressure data of the air cylinder. CONSTITUTION:An air cylinder 6 with solenoid valves 9A and 9B for giving thrust to pressure an upper lap plate 1 to a lower plate 2 and capable of stopping in the middle of stroke is provided. The air pressure of the air chambers 6A and 6B of the air cylinder 6 are detected by pressure sensors 14A and 14B, and in addition, the operation amount of the air cylinder 6 is detected by an operation amount sensor (counter section) 21. In the next step, a programmable controller 23 controls the ratio of the air pressure impressed to the air chambers 6A and 6B of the air cylinder 6 accordingly to the pressure and operation amount data detected by respective sensors (14A and 14B) and 21 based on the objective data previously given for thrust control and controls the thrust of the upper lap plate 1 to the lower lap plate 2.
JP59227078A 1984-10-29 1984-10-29 Lapping device Pending JPS61103774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59227078A JPS61103774A (en) 1984-10-29 1984-10-29 Lapping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59227078A JPS61103774A (en) 1984-10-29 1984-10-29 Lapping device

Publications (1)

Publication Number Publication Date
JPS61103774A true JPS61103774A (en) 1986-05-22

Family

ID=16855166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59227078A Pending JPS61103774A (en) 1984-10-29 1984-10-29 Lapping device

Country Status (1)

Country Link
JP (1) JPS61103774A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6322266A (en) * 1986-07-11 1988-01-29 Speedfam Co Ltd Surface grinding attachment with working pressure compensator
DE3925274A1 (en) * 1989-07-31 1991-02-07 Diskus Werke Frankfurt Main Ag Supply and dispensing mechanism for lapping mixt.
JP2002154049A (en) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp Polishing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
JPS58137554A (en) * 1982-02-12 1983-08-16 Hitachi Ltd Light pressure mechanism and polishing method for both-side simultaneous polisher

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
JPS58137554A (en) * 1982-02-12 1983-08-16 Hitachi Ltd Light pressure mechanism and polishing method for both-side simultaneous polisher

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6322266A (en) * 1986-07-11 1988-01-29 Speedfam Co Ltd Surface grinding attachment with working pressure compensator
DE3925274A1 (en) * 1989-07-31 1991-02-07 Diskus Werke Frankfurt Main Ag Supply and dispensing mechanism for lapping mixt.
JP2002154049A (en) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp Polishing method

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