JPS61103604U - - Google Patents
Info
- Publication number
- JPS61103604U JPS61103604U JP18877284U JP18877284U JPS61103604U JP S61103604 U JPS61103604 U JP S61103604U JP 18877284 U JP18877284 U JP 18877284U JP 18877284 U JP18877284 U JP 18877284U JP S61103604 U JPS61103604 U JP S61103604U
- Authority
- JP
- Japan
- Prior art keywords
- servo
- diaphragm
- main
- outlet side
- fluid pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Servomotors (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18877284U JPH0353294Y2 (nl) | 1984-12-14 | 1984-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18877284U JPH0353294Y2 (nl) | 1984-12-14 | 1984-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61103604U true JPS61103604U (nl) | 1986-07-01 |
| JPH0353294Y2 JPH0353294Y2 (nl) | 1991-11-21 |
Family
ID=30746235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18877284U Expired JPH0353294Y2 (nl) | 1984-12-14 | 1984-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353294Y2 (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472214A (en) * | 1987-09-12 | 1989-03-17 | Smc Corp | Vacuum pressure regulator |
| JP2005317515A (ja) * | 2004-03-31 | 2005-11-10 | Canon Inc | バルブおよびそれを用いた燃料電池 |
-
1984
- 1984-12-14 JP JP18877284U patent/JPH0353294Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472214A (en) * | 1987-09-12 | 1989-03-17 | Smc Corp | Vacuum pressure regulator |
| JP2005317515A (ja) * | 2004-03-31 | 2005-11-10 | Canon Inc | バルブおよびそれを用いた燃料電池 |
| JP4544525B2 (ja) * | 2004-03-31 | 2010-09-15 | キヤノン株式会社 | バルブおよびそれを用いた燃料電池 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353294Y2 (nl) | 1991-11-21 |