JPS61103604U - - Google Patents
Info
- Publication number
- JPS61103604U JPS61103604U JP18877284U JP18877284U JPS61103604U JP S61103604 U JPS61103604 U JP S61103604U JP 18877284 U JP18877284 U JP 18877284U JP 18877284 U JP18877284 U JP 18877284U JP S61103604 U JPS61103604 U JP S61103604U
- Authority
- JP
- Japan
- Prior art keywords
- servo
- diaphragm
- main
- outlet side
- fluid pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Servomotors (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Control Of Fluid Pressure (AREA)
Description
第１図はこの考案の一実施例によるサーボ制御
弁を示す断面図、第２図は積層型圧電アクチユエ
ータの説明図、第３図はシリースタイプのバイモ
ルフ型圧電アクチユエータの説明図、第４図はパ
ラレルタイプのバイモルフ型圧電アクチユエータ
の説明図、第５図はバイモルフ型圧電アクチユエ
ータの変位状況を示す説明図、第６図はサーボ制
御弁の他の実施例を示す断面図、第７図は複合ガ
ス弁への応用例を示す断面図、第８図は同じく他
の応用例を示す断面図、第９図は第８図に示す複
合ガス弁の一部破断正面図、第１０図は同じく一
部破断側面図である。
１はバルブ本体、２，２Ａは主ポート、３は入
口、４は出口、５，５Ａは主弁、７はばね、８，
８Ａはメインダイアフラム、９はワーキング圧力
室、１０はサーボレギユレータ、１２はサーボダ
イアフラム、１３はサーボ弁部材、２３は圧電ア
クチユエータ。
Fig. 1 is a sectional view showing a servo control valve according to an embodiment of the invention, Fig. 2 is an explanatory view of a laminated piezoelectric actuator, Fig. 3 is an explanatory view of a series type bimorph type piezoelectric actuator, and Fig. 4 is an explanatory view of a series type bimorph piezoelectric actuator. An explanatory diagram of a parallel type bimorph piezoelectric actuator, Fig. 5 is an explanatory diagram showing the displacement situation of the bimorph piezoelectric actuator, Fig. 6 is a sectional view showing another embodiment of the servo control valve, and Fig. 7 is a composite gas 8 is a sectional view showing another application example, FIG. 9 is a partially cutaway front view of the composite gas valve shown in FIG. 8, and FIG. 10 is a partially cutaway view of the composite gas valve shown in FIG. FIG. 1 is the valve body, 2, 2A is the main port, 3 is the inlet, 4 is the outlet, 5, 5A is the main valve, 7 is the spring, 8,
8A is a main diaphragm, 9 is a working pressure chamber, 10 is a servo regulator, 12 is a servo diaphragm, 13 is a servo valve member, and 23 is a piezoelectric actuator.
Claims (1)
備したパイプ本体と、ばねによつて閉止方向に付
勢されかつ上記主ポートの開度を変化させて出口
側流体圧力を制御する主弁と、この主弁の出口側
流体圧力に応動するサーボダイアフラムと、この
サーボダイアフラムの作動によつて、上記主弁を
支持するメインダイヤフラムに対する、上記出口
側流体圧力に応じたワーキング圧力を調節するサ
ーボ弁部材と、上記サーボダイヤフラムを制御信
号入力に応じて電歪変位せしめる圧電アクチユエ
ータとを備えたことを特徴とする電歪比例動作形
サーボ制御弁。 a main valve that is biased in the closing direction by a spring and that controls fluid pressure on the outlet side by changing the degree of opening of the main port; a servo diaphragm that responds to fluid pressure on the outlet side of the main valve; and a servo valve member that adjusts a working pressure in accordance with the fluid pressure on the outlet side with respect to the main diaphragm that supports the main valve by the operation of the servo diaphragm. and a piezoelectric actuator that electrostrictively displaces the servo diaphragm in response to a control signal input.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18877284U JPH0353294Y2 (en) | 1984-12-14 | 1984-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18877284U JPH0353294Y2 (en) | 1984-12-14 | 1984-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61103604U true JPS61103604U (en) | 1986-07-01 |
| JPH0353294Y2 JPH0353294Y2 (en) | 1991-11-21 |
Family
ID=30746235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18877284U Expired JPH0353294Y2 (en) | 1984-12-14 | 1984-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353294Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472214A (en) * | 1987-09-12 | 1989-03-17 | Smc Corp | Vacuum pressure regulator |
| JP2005317515A (en) * | 2004-03-31 | 2005-11-10 | Canon Inc | Valve and fuel cell using it |
-
1984
- 1984-12-14 JP JP18877284U patent/JPH0353294Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472214A (en) * | 1987-09-12 | 1989-03-17 | Smc Corp | Vacuum pressure regulator |
| JP2005317515A (en) * | 2004-03-31 | 2005-11-10 | Canon Inc | Valve and fuel cell using it |
| JP4544525B2 (en) * | 2004-03-31 | 2010-09-15 | キヤノン株式会社 | Valve and fuel cell using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353294Y2 (en) | 1991-11-21 |