JPS61103679U

JPS61103679U -

Info

Publication number: JPS61103679U
Application number: JP18877384U
Authority: JP
Priority date: 1984-12-14
Filing date: 1984-12-14
Publication date: 1986-07-01

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示す断面図、第２
図は第１図の主要部を拡大して示す断面図である
。１……バルブボデイ、５……ダイアフラム、６
……主弁、９……通孔、１０……パイロツト弁、
１１……ロツド、１３……圧電アクチユエータ、
１４……第１のレバー、１５……第２のレバー。 Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is an enlarged cross-sectional view of the main part of FIG. 1. 1...Valve body, 5...Diaphragm, 6
...Main valve, 9...Through hole, 10...Pilot valve,
11...rod, 13...piezoelectric actuator,
14...first lever, 15...second lever.

Claims

[Claims for Utility Model Registration] (1) A valve body having a fluid inlet and a fluid outlet, a diaphragm made of an elastic member disposed above a valve seat surface formed on the valve body, and a pressure receiving plate and an orifice formed on the diaphragm. A main valve that is inserted in a sandwich-like manner with a metal fitting having a port and fixed together by caulking and can be freely moved up and down, a through hole provided around the diaphragm, and a through hole from the primary pressure side of the fluid inlet. a pilot passage passing through the orifice port via the orifice port, a pilot valve made of an elastic member disposed above the orifice port, and a rod that operates integrally with the pilot valve and penetrates to the atmosphere side via a sealing member. and,
A pilot diaphragm type valve comprising a piezoelectric actuator that drives the tip of the rod to open and close a pilot port. (2) The driving force from the piezoelectric actuator is transmitted to the tip of the rod by a first lever that engages with the piezoelectric actuator and a second lever that engages with the first lever. Scope of utility model registration claim No. 1 (1)
Pilot diaphragm valve described in ).