JPS61103532A - 真空チエンバ− - Google Patents
真空チエンバ−Info
- Publication number
- JPS61103532A JPS61103532A JP22624884A JP22624884A JPS61103532A JP S61103532 A JPS61103532 A JP S61103532A JP 22624884 A JP22624884 A JP 22624884A JP 22624884 A JP22624884 A JP 22624884A JP S61103532 A JPS61103532 A JP S61103532A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- cooling
- shroud
- cooling plate
- cooling medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 23
- 239000002826 coolant Substances 0.000 claims abstract description 16
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 15
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- 239000010936 titanium Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 16
- 239000007788 liquid Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 8
- 239000007789 gas Substances 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 241000167880 Hirundinidae Species 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009469 supplementation Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22624884A JPS61103532A (ja) | 1984-10-26 | 1984-10-26 | 真空チエンバ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22624884A JPS61103532A (ja) | 1984-10-26 | 1984-10-26 | 真空チエンバ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61103532A true JPS61103532A (ja) | 1986-05-22 |
| JPS6324737B2 JPS6324737B2 (enrdf_load_stackoverflow) | 1988-05-23 |
Family
ID=16842212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22624884A Granted JPS61103532A (ja) | 1984-10-26 | 1984-10-26 | 真空チエンバ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61103532A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61120629A (ja) * | 1984-11-19 | 1986-06-07 | Seiko Instr & Electronics Ltd | 脱着可能な真空用冷却トラツプ |
| JPS63264131A (ja) * | 1987-04-21 | 1988-11-01 | Showa Alum Corp | 真空チヤンバ |
| JPS63270536A (ja) * | 1987-04-30 | 1988-11-08 | Showa Alum Corp | 真空チヤンバの製造方法 |
-
1984
- 1984-10-26 JP JP22624884A patent/JPS61103532A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61120629A (ja) * | 1984-11-19 | 1986-06-07 | Seiko Instr & Electronics Ltd | 脱着可能な真空用冷却トラツプ |
| JPS63264131A (ja) * | 1987-04-21 | 1988-11-01 | Showa Alum Corp | 真空チヤンバ |
| JPS63270536A (ja) * | 1987-04-30 | 1988-11-08 | Showa Alum Corp | 真空チヤンバの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324737B2 (enrdf_load_stackoverflow) | 1988-05-23 |
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