JPS6110315Y2 - - Google Patents

Info

Publication number
JPS6110315Y2
JPS6110315Y2 JP18228278U JP18228278U JPS6110315Y2 JP S6110315 Y2 JPS6110315 Y2 JP S6110315Y2 JP 18228278 U JP18228278 U JP 18228278U JP 18228278 U JP18228278 U JP 18228278U JP S6110315 Y2 JPS6110315 Y2 JP S6110315Y2
Authority
JP
Japan
Prior art keywords
heater
heating furnace
timer
temperature
prevention device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18228278U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5599000U (US20100223739A1-20100909-C00025.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18228278U priority Critical patent/JPS6110315Y2/ja
Publication of JPS5599000U publication Critical patent/JPS5599000U/ja
Application granted granted Critical
Publication of JPS6110315Y2 publication Critical patent/JPS6110315Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Resistance Heating (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP18228278U 1978-12-28 1978-12-28 Expired JPS6110315Y2 (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18228278U JPS6110315Y2 (US20100223739A1-20100909-C00025.png) 1978-12-28 1978-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18228278U JPS6110315Y2 (US20100223739A1-20100909-C00025.png) 1978-12-28 1978-12-28

Publications (2)

Publication Number Publication Date
JPS5599000U JPS5599000U (US20100223739A1-20100909-C00025.png) 1980-07-09
JPS6110315Y2 true JPS6110315Y2 (US20100223739A1-20100909-C00025.png) 1986-04-02

Family

ID=29193962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18228278U Expired JPS6110315Y2 (US20100223739A1-20100909-C00025.png) 1978-12-28 1978-12-28

Country Status (1)

Country Link
JP (1) JPS6110315Y2 (US20100223739A1-20100909-C00025.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5184455B2 (ja) * 2009-07-10 2013-04-17 株式会社日立国際電気 半導体製造システム、半導体製造方法、温度制御方法及び半導体製造装置のコントローラ
JP2012231145A (ja) * 2012-05-22 2012-11-22 Hitachi Kokusai Electric Inc 半導体製造システム、半導体製造方法、温度制御方法、温度制御装置及び半導体製造装置のコントローラ

Also Published As

Publication number Publication date
JPS5599000U (US20100223739A1-20100909-C00025.png) 1980-07-09

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