JPS61102538A - 固体により吸着または固体から脱着される気体の量を決定するための方法および装置 - Google Patents

固体により吸着または固体から脱着される気体の量を決定するための方法および装置

Info

Publication number
JPS61102538A
JPS61102538A JP22138984A JP22138984A JPS61102538A JP S61102538 A JPS61102538 A JP S61102538A JP 22138984 A JP22138984 A JP 22138984A JP 22138984 A JP22138984 A JP 22138984A JP S61102538 A JPS61102538 A JP S61102538A
Authority
JP
Japan
Prior art keywords
chamber
gas
flow rate
pressure
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22138984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045341B2 (enExample
Inventor
ウイム・ジエイ・エム・ピーターズ
ウイリアム・イー・ゲイツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omicron Technology Corp
Original Assignee
Omicron Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omicron Technology Corp filed Critical Omicron Technology Corp
Priority to JP22138984A priority Critical patent/JPS61102538A/ja
Publication of JPS61102538A publication Critical patent/JPS61102538A/ja
Publication of JPH045341B2 publication Critical patent/JPH045341B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP22138984A 1984-10-23 1984-10-23 固体により吸着または固体から脱着される気体の量を決定するための方法および装置 Granted JPS61102538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22138984A JPS61102538A (ja) 1984-10-23 1984-10-23 固体により吸着または固体から脱着される気体の量を決定するための方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22138984A JPS61102538A (ja) 1984-10-23 1984-10-23 固体により吸着または固体から脱着される気体の量を決定するための方法および装置

Publications (2)

Publication Number Publication Date
JPS61102538A true JPS61102538A (ja) 1986-05-21
JPH045341B2 JPH045341B2 (enExample) 1992-01-31

Family

ID=16766003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22138984A Granted JPS61102538A (ja) 1984-10-23 1984-10-23 固体により吸着または固体から脱着される気体の量を決定するための方法および装置

Country Status (1)

Country Link
JP (1) JPS61102538A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271439A (ja) * 1985-05-27 1986-12-01 Fuji Debuison Kagaku Kk 自動測定装置
JPS63295943A (ja) * 1987-05-28 1988-12-02 Nippon M K S Kk 全自動吸着装置を用いて行なう吸着方法
JPH0288963A (ja) * 1988-08-12 1990-03-29 Centre Natl Rech Scient <Cnrs> ガス流調整器を備える装置、このガス流調整器を製造する方法及び吸着又は脱着を測定する方法
WO1992021956A1 (fr) * 1991-05-30 1992-12-10 Tadahiro Ohmi Procede et dispositif d'evaluation de quantites d'impuretes adsorbees
JP2010048572A (ja) * 2008-08-19 2010-03-04 Tokuyama Corp ガス吸着材料に吸着されたガス吸着量の算出方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017195243A1 (ja) * 2016-05-09 2017-11-16 国立大学法人信州大学 気体吸着速度測定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53315A (en) * 1976-06-22 1978-01-05 Lucas Industries Ltd Air heating apparatus for compression ignition engine
JPS5824839A (ja) * 1981-07-09 1983-02-14 カルロ・エルバ・ストル−メンタヂオ−ネ・エセ・ピ・ア 多孔度分析方法と装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53315A (en) * 1976-06-22 1978-01-05 Lucas Industries Ltd Air heating apparatus for compression ignition engine
JPS5824839A (ja) * 1981-07-09 1983-02-14 カルロ・エルバ・ストル−メンタヂオ−ネ・エセ・ピ・ア 多孔度分析方法と装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271439A (ja) * 1985-05-27 1986-12-01 Fuji Debuison Kagaku Kk 自動測定装置
JPS63295943A (ja) * 1987-05-28 1988-12-02 Nippon M K S Kk 全自動吸着装置を用いて行なう吸着方法
JPH0288963A (ja) * 1988-08-12 1990-03-29 Centre Natl Rech Scient <Cnrs> ガス流調整器を備える装置、このガス流調整器を製造する方法及び吸着又は脱着を測定する方法
WO1992021956A1 (fr) * 1991-05-30 1992-12-10 Tadahiro Ohmi Procede et dispositif d'evaluation de quantites d'impuretes adsorbees
US5497652A (en) * 1991-05-30 1996-03-12 Ohmi; Tadahiro Method and apparatus for evaluating quantities of absorbed impurities
JP2010048572A (ja) * 2008-08-19 2010-03-04 Tokuyama Corp ガス吸着材料に吸着されたガス吸着量の算出方法

Also Published As

Publication number Publication date
JPH045341B2 (enExample) 1992-01-31

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Legal Events

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