JPS6110037B2 - - Google Patents
Info
- Publication number
- JPS6110037B2 JPS6110037B2 JP1480681A JP1480681A JPS6110037B2 JP S6110037 B2 JPS6110037 B2 JP S6110037B2 JP 1480681 A JP1480681 A JP 1480681A JP 1480681 A JP1480681 A JP 1480681A JP S6110037 B2 JPS6110037 B2 JP S6110037B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56014806A JPS57131371A (en) | 1981-02-02 | 1981-02-02 | Dry etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56014806A JPS57131371A (en) | 1981-02-02 | 1981-02-02 | Dry etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57131371A JPS57131371A (en) | 1982-08-14 |
| JPS6110037B2 true JPS6110037B2 (enExample) | 1986-03-27 |
Family
ID=11871279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56014806A Granted JPS57131371A (en) | 1981-02-02 | 1981-02-02 | Dry etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57131371A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612765B2 (ja) * | 1983-06-01 | 1994-02-16 | 株式会社日立製作所 | エ ッ チ ン グ 方 法 |
-
1981
- 1981-02-02 JP JP56014806A patent/JPS57131371A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57131371A (en) | 1982-08-14 |