JPS61100133U - - Google Patents
Info
- Publication number
- JPS61100133U JPS61100133U JP18549284U JP18549284U JPS61100133U JP S61100133 U JPS61100133 U JP S61100133U JP 18549284 U JP18549284 U JP 18549284U JP 18549284 U JP18549284 U JP 18549284U JP S61100133 U JPS61100133 U JP S61100133U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting plate
- gas flow
- utility
- stepped portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18549284U JPS61100133U (enExample) | 1984-12-06 | 1984-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18549284U JPS61100133U (enExample) | 1984-12-06 | 1984-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61100133U true JPS61100133U (enExample) | 1986-06-26 |
Family
ID=30742961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18549284U Pending JPS61100133U (enExample) | 1984-12-06 | 1984-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61100133U (enExample) |
-
1984
- 1984-12-06 JP JP18549284U patent/JPS61100133U/ja active Pending