JPS6098648A - Chip carrier for flip chip - Google Patents
Chip carrier for flip chipInfo
- Publication number
- JPS6098648A JPS6098648A JP20696083A JP20696083A JPS6098648A JP S6098648 A JPS6098648 A JP S6098648A JP 20696083 A JP20696083 A JP 20696083A JP 20696083 A JP20696083 A JP 20696083A JP S6098648 A JPS6098648 A JP S6098648A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- chip
- chip carrier
- carrier
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は、チップキャリア、特に7リツブチツプ用の
チップキャリアに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a chip carrier, particularly a chip carrier for a 7-rib chip.
チップキャリアは、一般には半導体素子ケダイボンド、
ワイヤボンドでキャリア1C組立てられているが、その
組立性、および接続点の多数化に伴ないフリップチップ
用も検討されてきて(・る。Chip carriers are generally semiconductor device Kedaibond,
The carrier 1C is assembled by wire bonding, but due to its ease of assembly and the increasing number of connection points, flip-chip applications are also being considered.
フリップチップはバンプという半田電極を有しているた
め、混成回路基板上に他の能動部品、受動部品とともに
一度に半田リフローして組立てか′51能なため多用さ
れている。しかし、半導体素子が複雛化、高密度化して
(るとバンプとバンプの間隔が狭(なっていき、加えて
半導体素子の電気的、物理的特性ケ完全圧チェックアウ
トしようとすると混成回路基板に他の部品を組立てた後
では逆に不都合な場合が生じてくる。そのため、チンプ
キャリ7方式などのようにサブ組立てしたのら、良品の
みt混成回路基板に組込む方法も採られる。Since flip chips have solder electrodes called bumps, they are widely used because they can be assembled together with other active and passive components on a hybrid circuit board through solder reflow. However, as semiconductor devices become more complex and denser (and the spacing between bumps becomes narrower), in addition, when trying to check out the full pressure of the electrical and physical characteristics of semiconductor devices, hybrid circuit boards On the contrary, inconvenient situations may occur if other parts are assembled separately.For this reason, a method is adopted in which only non-defective products are assembled into a t-hybrid circuit board after sub-assembly as in the Chimp Carry 7 method.
チップキャリアへの組立てもバンプ数が多く、かつ、バ
ンプとバンプの間隔が狭くなると組立て歩留りが低下す
るのと併せて、バンブ電極からチップキャリアの外部端
子電極までの導体配線同士の間隔も狭く、ブリッジや金
属マイグレーションなど生じやす〜・。When assembling into a chip carrier, the assembly yield decreases when the number of bumps is large and the spacing between bumps becomes narrow.In addition, the spacing between the conductor wiring from the bump electrode to the external terminal electrode of the chip carrier is also narrow. Bridges and metal migration are likely to occur.
すなわち、第1図は従来の7リツフチツプ用チンブキヤ
リアの斜視図である。チップキャリア1上に7リツプチ
ツプのバンブに対応してバンプ電極2.外部端子電極3
.これらバンブ電極2および外部端子電極3を接続する
配線導体4が形成されている。低コストでこのテンプキ
ャリア1′11f作るためには、厚膜基板と同様の電極
金属を印刷、焼成する方法が用いられる。しかし、バン
ブ電極2が数多くなり、かつ、バンブとバンブの間隔が
狭くなると、それにつわて配線導体4同士の間隔もかな
り隣接し、導体間のブリッジや配線金属間のマイグレー
ションなどが生じやす(、信頼性が低下する。この対策
として多層セラミックチップキャリア方式があるが、コ
ストが高く、実用化には問題がある。That is, FIG. 1 is a perspective view of a conventional chimbu carrier for 7 lift chips. On the chip carrier 1, there are bump electrodes 2 corresponding to the bumps of the 7 lip chips. External terminal electrode 3
.. A wiring conductor 4 connecting these bump electrodes 2 and external terminal electrodes 3 is formed. In order to manufacture this balance carrier 1'11f at low cost, a method of printing and firing electrode metal similar to that of the thick film substrate is used. However, as the number of bump electrodes 2 increases and the spacing between the bumps narrows, the spacing between the wiring conductors 4 also becomes quite close, which tends to cause bridging between conductors and migration between wiring metals. As a countermeasure to this problem, there is a multilayer ceramic chip carrier system, but it is expensive and has problems in practical use.
この発明は、上記の点にかんがみなさ幻たもので、バン
ブ電極と外部端子電極との導体配線ケチツブキャリアの
表面と裏面とで交互に行うことにより、導体配線の隣接
度を改善したフリップチップ用チップキャリアを提供す
るものである。This invention was invented in view of the above points, and is a flip chip in which the degree of adjacency of conductor wiring is improved by alternately performing conductor wiring between bump electrodes and external terminal electrodes on the front and back sides of the butt carrier. The present invention provides chip carriers for
第2図はこの発明の一実施例を示す斜視図である。11
はチップキャリアで、このチップキャリア11にはバン
ブ電、極12および外部端子1!極13が形成されてい
る。14は配線導体で、この発明ではこの配線導体14
が常に隣接することなく配設されている。すなわち、フ
リンブチップに対応してあらかじめ、チップキャリア1
1上に開口部15を形成しておき、バンブ電極12から
その開口部15′ft介してチップキャリア11の裏面
へ導体を引き込むような導体配線16のパターンケ形成
することに工り、バンブ電極12と外部端子電極13へ
の接続7行えるようにしたものである。FIG. 2 is a perspective view showing an embodiment of the present invention. 11
is a chip carrier, and this chip carrier 11 has a bump electrode, a pole 12 and an external terminal 1! A pole 13 is formed. 14 is a wiring conductor, and in this invention, this wiring conductor 14
are always placed without adjacency. In other words, the chip carrier 1 is prepared in advance in correspondence with the frimb chip.
An opening 15 is formed on the bump electrode 12, and a pattern of conductive wiring 16 is formed so as to draw a conductor from the bump electrode 12 to the back surface of the chip carrier 11 through the opening 15'. and connection 7 to external terminal electrodes 13.
こりよ51Cすると、/・ンブ数が多く、バンブ間隔が
狭いため、配線導体14が極端に隣接する場合、バンブ
電極12と外部端子電極13への接続を通常通り表面に
て配線するものと、バンブを極12から裏面への配線導
体16、開口部15%’介して配線するものと交互に行
えば、配線導体14の隣接度は大きく改善さ引、信頼性
が一段と高(なる。51C, since the number of bumps is large and the spacing between the bumps is narrow, if the wiring conductors 14 are extremely adjacent to each other, the connection to the bump electrode 12 and external terminal electrode 13 should be wired on the surface as usual; If the bumps are alternately formed with the wiring conductors 16 from the poles 12 to the back surface and the wiring through the 15% opening, the degree of adjacency of the wiring conductors 14 is greatly improved and the reliability is further improved.
加えて多層セラミック方式などのようにコストが従来に
比べはるかに上がることはなく、安価で従来の単相チッ
プキャリアの製造ゾルセスで作ることが可能となる。In addition, unlike multilayer ceramic systems, the cost does not increase much compared to conventional methods, and it can be manufactured at low cost using the conventional Solses manufacturing method for single-phase chip carriers.
以上説明したように、この発明は、チップキャリアの中
央に開口部Y形成し、この開口部の周囲に設けられた複
数のバンブ電極とチップキャリアの外周部に設けら幻た
前記バンブ電極に対応した外部端子電極とt導体配線で
接続する際、チップキャリアの表面と裏面とに交互に配
線するようにしたので、導体配線の隣接度は太き(改善
さね、信頼性の高いフリップチップ用チップキャリアが
得られる利点がある。As explained above, this invention forms an opening Y in the center of a chip carrier, and supports a plurality of bump electrodes provided around this opening and the bump electrodes provided on the outer periphery of the chip carrier. When connecting external terminal electrodes and T-conductor wiring, the wiring is arranged alternately on the front and back sides of the chip carrier, so the degree of adjacency between the conductor wiring is thick (although it will be improved, it is a highly reliable flip-chip device. There is an advantage that a chip carrier can be obtained.
第1図は従来のチップキャリアを示す斜視図、第2図は
この発明の一実施例を示すチップキャリアの斜視図であ
る。
図中、11はチップキャリア、12i1バンブ電極、1
3は外部端子電極、14は配線導体、15は開口部、1
6は導体配線である。
持371庁長官殿
1.事件の表示 特願昭5e−2oeaeo号2、発明
の名称 フリップチップ用チップキャリア;3.補正を
する者
事件との関係 特許出願人
住 所 東京都千代[11区九0内二I’ I I 2
a :3 Y;・名 称 (601) E、菱電機株
式会社代表者片111仁八部
4、代 理 人
住 所 東京都T・代III区丸の内−X°汀112市
;3号5、補正の対象
明細書の特許請求の範囲の欄1発明の詳細な説明の欄、
および図面の簡単な説明の棚
6、補正の内容
(1)明細書の4□1r詐請求の範囲を別紙、のように
補正する。
(2)明細書第2頁16行、第3頁16行、18行、t
54頁10 q−1,第5頁9行、11行のr >14
.導配線Jを、いずれも「導体配線」と補IFする。
(3)同じくp55頁20行の「16は導体配線」を、
「16は配線導体」と補1する。
以に
2、特許請求の範囲
チップキャリアの中央にフリップチップに対15した開
1−1部を形成し、前記開口部の周囲に形成された複数
のバンプ電極と前記チップキャリアの外周i’iliに
形成された前記バンプ電極に対応して設けられた外部端
子電極とを前記チップキャリアの表面と前記開口部を介
して前記チップキャリアの裏面とに交伍に配線導体によ
り接続したことを特徴とするフリップチップ川チップキ
ャリア。FIG. 1 is a perspective view showing a conventional chip carrier, and FIG. 2 is a perspective view of a chip carrier showing an embodiment of the present invention. In the figure, 11 is a chip carrier, 12i1 bump electrode, 1
3 is an external terminal electrode, 14 is a wiring conductor, 15 is an opening, 1
6 is a conductor wiring. 371 Director General 1. Indication of the case: Japanese Patent Application No. 5E-2OEAEO No. 2, title of invention: Chip carrier for flip chip; 3. Relationship with the case of the person making the amendment Patent applicant address Chiyo, Tokyo [11-ku 90-2 I' I I 2
a: 3 Y;・Name (601) E, Ryodenki Co., Ltd. Representative Kata 111 Jin Hachibe 4, Agent Address Marunouchi-X°Tai 112 City, T. Dai III Ward, Tokyo; 3 No. 5; Claims column 1 of the specification to be amended; Detailed explanation of the invention;
and a brief explanation of the drawings 6, Contents of amendment (1) The scope of false claims in 4□1r of the specification is amended as shown in the attached sheet. (2) Specification page 2, line 16, page 3, lines 16 and 18, t
54 pages 10 q-1, page 5 lines 9 and 11 r > 14
.. All of the conductive lines J are referred to as "conductor lines". (3) Similarly, “16 is conductor wiring” on page 55, line 20,
Complement 1 with "16 is a wiring conductor." 2. An opening 1-1 is formed in the center of the chip carrier, and a plurality of bump electrodes formed around the opening and an outer periphery of the chip carrier are formed in the center of the chip carrier. An external terminal electrode provided corresponding to the bump electrode formed on the chip carrier is connected to the front surface of the chip carrier and the back surface of the chip carrier through the opening by wiring conductors. Flip chip river chip carrier.
Claims (1)
部を形成し、前記開口部の周囲に形成された複数のバン
プ’it 罹と前記チップキャリアの外周部に形成さ第
1た前記バンブ電極に対応して設けられた外部端子電極
とを前記チップキャリアの表面と前記開口部を介して前
記チップキャリアの鼻面とに交互に導体配線により接続
したことを特徴とするフリンプチンプ用チンプキャリア
。An opening corresponding to a seven-layer chip is formed in the center of the chip carrier, and a plurality of bumps formed around the opening correspond to the first bump electrode formed on the outer periphery of the chip carrier. 1. A chimp carrier for flimp chimps, characterized in that external terminal electrodes provided on the chip carrier are alternately connected to the surface of the chip carrier and the nose surface of the chip carrier through the opening by conductive wiring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20696083A JPS6098648A (en) | 1983-11-02 | 1983-11-02 | Chip carrier for flip chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20696083A JPS6098648A (en) | 1983-11-02 | 1983-11-02 | Chip carrier for flip chip |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6098648A true JPS6098648A (en) | 1985-06-01 |
Family
ID=16531855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20696083A Pending JPS6098648A (en) | 1983-11-02 | 1983-11-02 | Chip carrier for flip chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6098648A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8446002B2 (en) | 2009-03-30 | 2013-05-21 | Sony Corporation | Multilayer wiring substrate having a castellation structure |
-
1983
- 1983-11-02 JP JP20696083A patent/JPS6098648A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8446002B2 (en) | 2009-03-30 | 2013-05-21 | Sony Corporation | Multilayer wiring substrate having a castellation structure |
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