JPS609621A - Air slide and supporter for rest - Google Patents

Air slide and supporter for rest

Info

Publication number
JPS609621A
JPS609621A JP11661983A JP11661983A JPS609621A JP S609621 A JPS609621 A JP S609621A JP 11661983 A JP11661983 A JP 11661983A JP 11661983 A JP11661983 A JP 11661983A JP S609621 A JPS609621 A JP S609621A
Authority
JP
Japan
Prior art keywords
supporter
air
compressed air
support base
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11661983A
Other languages
Japanese (ja)
Other versions
JPS6224222B2 (en
Inventor
Minoru Kato
実 加藤
Keiichi Tachikawa
恵一 立川
Yoji Ise
養治 伊勢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIYOUTOKU KK
Original Assignee
MIYOUTOKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIYOUTOKU KK filed Critical MIYOUTOKU KK
Priority to JP11661983A priority Critical patent/JPS609621A/en
Priority to US06/622,730 priority patent/US4627362A/en
Priority to DE8484401355T priority patent/DE3465063D1/en
Priority to EP84401355A priority patent/EP0130905B1/en
Publication of JPS609621A publication Critical patent/JPS609621A/en
Publication of JPS6224222B2 publication Critical patent/JPS6224222B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28Means for securing sliding members in any desired position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To hold a supporter free of contact for free sliding and make the equipment smaller, while dispensing with lubricant, by forming air cushion jetted from underneath the supporter into the space between the supporter and the base for the supporter. CONSTITUTION:A supporter 1 is equipped with a step section 2 which has a closed end comprising a hollow and pliable seal member 3 that ordinarily remains flat in shrinkage. Ventilation is maintained through the air hole 4 which joins an upper hole of the member 3. The bottom of the supporter 1 has a groove 5 to which a joint air hole 6 is connected. Jetting compressed air through a supply nozzle 7a of an ejector pump 7 causes negative pressure in an internal compartment 7b. Compressed air is distributed through a compressed air supply source 8, piping 10, switching valve 9, piping 10 and the air hole 6 to the groove 5 to life the supporter 1 and no air is supplied to the seal member 3 without hampering the supporter 1 from sliding.

Description

【発明の詳細な説明】 台のエアースライド及び静止用支持台に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION This invention relates to an air slide and a stationary support base.

各種自動機械にあってはワークあるいは治具、工具類を
スライド(移動)させ、さらに所定位置に静止させる必
要が生ずる。
In various automatic machines, it is necessary to slide (move) workpieces, jigs, and tools, and to keep them stationary at predetermined positions.

上記スライドにはモーターあるいはシリンター等が使用
されるが、所定位置に完全に静止させることが困難であ
った。
A motor or cylinder is used for the slide, but it is difficult to keep it completely stationary in a predetermined position.

本発明は上記のごとき欠点な除去してなるもので、無接
触状態でワークあるいは治具、工具類を載置した支持台
をスライドさせ、所定位置に完全に静止させるよう構成
したものである。
The present invention eliminates the above-mentioned drawbacks, and is constructed so that a support base on which a workpiece, jig, or tools are placed can be slid without contact and completely stopped at a predetermined position.

本発明では支持台のスライド時には支持台の下面からエ
アーが噴射さh. 、支持台を支持しているベースとの
間に空気膜を構成して支持台を無接触状態としてスライ
ドさせることができる。
In the present invention, air is injected from the bottom surface of the support when the support is slid.h. By forming an air film between the support base and the base supporting the support base, the support base can be slid in a non-contact state.

したがって、摺動面の摩耗を全く除去できるとともに慴
動面への潤滑、給油が全く不要となるものであり、さら
に支持台のスライドに要する力も調・さくですみ、例え
ば小形、高精度のパルスモータ−等を使用でき、装置の
小形化及び装置のコストダウンを図ることができる。さ
らに支持台を所定位置にスライドさせてクランプ装置を
働かせ、支持台を完全に静止させることができる。
Therefore, wear on the sliding surfaces can be completely eliminated, and there is no need to lubricate or oil the sliding surfaces.Furthermore, the force required to slide the support base can be adjusted and reduced, for example, in the case of small, high-precision pulse A motor or the like can be used, and the device can be made smaller and the cost of the device can be reduced. Furthermore, the support base can be slid into a predetermined position and the clamping device can be activated to keep the support base completely still.

本発明では上記クランプ装置として吸着機構が採用され
る。
In the present invention, a suction mechanism is employed as the clamp device.

さらに、該吸着機構は従来の可撓性部材からなる吸盤と
異り、吸着面端を太きくし、さら((金属面同志の吸着
状態とし2、位置ずれ等が全く生[〕ないよう構成され
、外力が加わっても容易に移動させらハることがないも
のである。
Furthermore, unlike conventional suction cups made of flexible members, this suction mechanism has a thicker suction surface end, and is configured so that two metal surfaces are attracted to each other, so that no positional deviation occurs. , so that it cannot be easily moved or damaged even if an external force is applied.

すなわち、上記従来の単なる吸盤を使用した吸着機構1
であっては吸盤の進出及び復帰機構を必要とするととも
に吸盤が可撓性を有するため完全な静止状態の維持が困
難である欠点があったものである。
That is, the above-mentioned conventional suction mechanism 1 using a simple suction cup
This method requires a mechanism for advancing and returning the suction cup, and has the disadvantage that it is difficult to maintain a completely stationary state because the suction cup is flexible.

以下に本発明の一実施例を図面シてついて詳細に説明す
る。
An embodiment of the present invention will be described in detail below with reference to the drawings.

図中(1)は支持台であり、後に述べるが各種用途に合
わせて変形さλする。
In the figure, (1) is a support stand, which, as will be described later, can be deformed to suit various uses.

まず、牙1図乃至牙3図について述べると、支持台(1
)の底面周囲には一段上方に位置する段部(2)が設け
られる。
First of all, when talking about figures 1 to 3, the support stand (1
) is provided with a step (2) located one step above.

つぎに、該段部(2)には下端が閉塞され、常時扁イ状
に収縮−する癖を有1−る中空状の可撓性シール部材(
3)が設けられる(牙」図参照)。
Next, the stepped portion (2) has a hollow flexible sealing member (1) whose lower end is closed and has a habit of constantly contracting into a flat shape.
3) is provided (see figure “Fang”).

該可撓性シール部材(3)はコム、プラスチック等で構
成され、士方を開口して上記段部(2)ニ取り付けられ
、その開口部に支持台(1)から設けた通気孔(4)が
連通され、内部に通気孔(4)を介して1袷気な行うと
とかできるよう構成される。
The flexible sealing member (3) is made of com, plastic, etc., and is attached to the step (2) with an opening on both sides, and a ventilation hole (4) provided from the support base (1) in the opening. ) are in communication with each other, and are constructed so that air can be carried out through ventilation holes (4) inside.

つぎに、上記段部(2)な除く支持台(1)の下面には
十3図示のごとく、平均的に溝(5)が構成され、該溝
(5)には支持台(1)に上記通気孔(4)と別に設け
た通気孔(6)が連通さAする。なお、図中(6a)は
給気量を調整するオリフィスである。
Next, as shown in Figure 13, grooves (5) are formed on the lower surface of the support base (1) excluding the step part (2), and the grooves (5) are provided with grooves (5) on the lower surface of the support base (1), excluding the step part (2). The ventilation hole (4) and a separately provided ventilation hole (6) communicate with each other. Note that (6a) in the figure is an orifice that adjusts the amount of air supply.

上記構成の支持台(1)は牙1図。牙2図示のごとくし
て使用される。同図において[F])はベースである。
The support stand (1) with the above configuration is shown in Fig. 1. Fang 2 is used as shown in the diagram. In the figure, [F]) is the base.

また(7)はエジェクターポンプであり、圧縮空気の供
給ノズル(7σ)から圧縮空気を噴射することにより、
内部隔室(7h)が負圧となるものである。
Also, (7) is an ejector pump, which injects compressed air from a compressed air supply nozzle (7σ).
The internal compartment (7h) has negative pressure.

また(8)は圧縮空気供給源であり、具体的にはコンプ
レッサーである。
Further, (8) is a compressed air supply source, specifically a compressor.

また、(9)は切換バルブであり、圧縮空気供給源(8
)、エジェクターポンプ(7)及び支持台(1)間の切
り換えを行うものであり、任意に変更が可能である。
In addition, (9) is a switching valve, and the compressed air supply source (8
), ejector pump (7), and support stand (1), and can be changed as desired.

また、00)は圧縮空気供給源(8)から切換バルブ(
9)への配管、01)は切換バルブ(9)からエジェク
ターポンプ(7)への配管、(12)は切換バルブ(9
)から支持台(1)の通気孔(4)への配管、(13)
は切換バルブ(9)から支持台(1)の通気孔(6)へ
0配管、(14)は支持台(1)の通気孔(6)から切
換バルブ(9)への配管、(15)は切換バルブ(9)
とエジェクターポンプ(7)の隔室(7h)を連通ずる
配管である。
00) is the compressed air supply source (8) to the switching valve (
9), 01) is the pipe from the switching valve (9) to the ejector pump (7), (12) is the switching valve (9)
) to the ventilation hole (4) of the support base (1), (13)
(14) is piping from the switching valve (9) to the ventilation hole (6) of the support base (1), (14) is the piping from the ventilation hole (6) of the support base (1) to the switching valve (9), (15) is the switching valve (9)
This is piping that communicates the compartment (7h) of the ejector pump (7) with the compartment (7h) of the ejector pump (7).

上記構成にあって、支持台(1)をスライドさせる場合
について述べれば、切換バルブ(9)が矛1図示の状態
、すなわち、支持台(1)の通気孔(6)へ圧縮空気を
供給するようjで切換えられる。
In the case where the support base (1) is slid in the above configuration, the switching valve (9) is in the state shown in Figure 1, that is, compressed air is supplied to the ventilation hole (6) of the support base (1). You can switch by pressing yoj.

そ〔))結果、圧縮空気が圧縮空気供給源(8)、配管
(圃、切換バルブ(9)、配管(13)、通気孔(6)
を介しで1立面の溝(5)部に供給され、支持台(1)
が3〜5ミクロン程度浮上させられる。
As a result, compressed air is supplied to the compressed air supply source (8), piping (field, switching valve (9), piping (13), ventilation hole (6)
is supplied to the groove (5) of one vertical plane through the support base (1).
is floated by about 3 to 5 microns.

その際にはエジェクターポンプ(7)はイ\とより、可
撓性シール部材(3)には給気が行ゎJlない。
At that time, the ejector pump (7) is turned off, and air is not supplied to the flexible seal member (3).

したがって可撓性シール部材(3)は扁平状に収縮して
おり、支持台(1)のスライドを邪魔することはない。
Therefore, the flexible seal member (3) is contracted into a flat shape and does not interfere with the sliding of the support base (1).

支持台(1)のスライドは矛5図示のごとく、タイミン
クベルト(1G)を使用してもよ< 、 、4−7図示
のごとく手動でもよく、さt二)′に矛6図示のごとく
、テーブル(17)の中心に設けた回転駆即j側1(1
13+と支持台(1)部をアームQ9)で連結して行っ
てもよい。
The slide of the support base (1) can be done by using a timing belt (1G) as shown in Figure 5, or manually as shown in Figure 4-7, or by hand as shown in Figure 6 in Figure 2)'. The rotary drive provided at the center of the table (17) is located on the j side 1 (1
13+ and the support base (1) may be connected by an arm Q9).

その他、ホールネジをスクリュー、ラックとピニオン、
リニアモーターの利用管ニより行うことができる。
Others include hole screws, racks and pinions,
This can be done by using a linear motor.

つぎに、支持台(1)の静止について述べねば、上記ス
ライドを中止して切換バルブ(9)が矛2図示のごとく
切換えられる。
Next, we will discuss how the support base (1) comes to rest.The above-mentioned sliding is stopped and the switching valve (9) is switched as shown in the figure.

その結果、圧縮空気の溝(5)部へσ)供給が停止さ旧
、支持台(1)がベース(BlfK載置すて)とともに
圧縮空気が圧縮空気供給源(8)、配管(l f1’、
、+IJ換バルブ(9)、配管口)を介してエジエクタ
ーポンプ(7)σ)供給ノズル(7a)l・こ供−陰さ
+1、さら(で配管(12)、;dj+ ’、気気孔4
)を介してrl’、Q−院1匪シール部利(3)の内部
に供給さハ、該可撓性シール部;を寸(3)を膨張させ
、ヘース(0νζ圧魚する。
As a result, the supply of compressed air to the groove (5) (σ) is stopped, and the compressed air is transferred to the compressed air supply source (8) and the pipe (l f1) together with the support stand (1) and the base (BlfK placed). ',
, + IJ exchange valve (9), piping port) via the ejector pump (7) 4
) is supplied to the interior of the Q-in 1 seal part (3), which inflates the flexible seal part (3) to a pressure of 0νζ.

ぞ1−て、その後の圧縮空気は全てエジェクターポンプ
(力の供給ノズル(7a)υて供給され、その内部の隔
宰(7h)が負圧となる。
All the compressed air thereafter is supplied through the ejector pump (force supply nozzle (7a)), and the internal partition (7h) becomes negative pressure.

台の結果、管路04)、通気孔(6)を介して溝(5)
部・1)空気が吸気さハ、支持台(11の底面がへ〜ス
(B)ν5吸着し完全静止さす「)」するものである。
As a result of the pedestal, the conduit 04), the groove (5) through the vent hole (6)
Part 1) When air is taken in, the bottom surface of the support stand (11) attracts the base (B) ν5 and stands completely still.

上記吸着は従来の町涜件部材かrつなる吸盤と異り、吸
着面積を大きくし、さ1)に金属面同志の吸矯状態とな
るため、位置ずJ′Lが全く生じないものであり外力に
よって移動させられることもないものである。
The above suction differs from the conventional suction cup that is connected to the town building material by increasing the suction area and creating a suction state between the metal surfaces in 1), so no positioning error J'L occurs at all. It cannot be moved by external forces.

召・4図には他の実施例が示されている。すなわち、溝
(5)部の吸気を迅速に行うため支持台(1)に通シ孔
(・1)及び(6)のほか別に吸気専用の通気孔(20
)を別に設けた本のであり、その作用効果は前記実施例
とほぼ同様である。
Another embodiment is shown in Figure 4. That is, in order to quickly take in air from the groove (5), in addition to the through holes (1) and (6), there are separate ventilation holes (20
) is a separate book, and its effects are almost the same as those of the previous embodiment.

上記のごとく、本発明の支持台しこよれば、スライド時
の摩擦抵抗を全くなくし、しかも潤滑油等を使用するこ
となく小形、高精度のパルスモータ−等により行うこと
ができるとともに、所定位置で完全強固に静止させるこ
とができるものである。
As described above, the support of the present invention completely eliminates frictional resistance during sliding, and can be carried out using a small, high-precision pulse motor, etc. without using lubricating oil. It can be held completely still.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の一実施例を示すもので、」・1図は浮上
スライド時を示す要部箱断面図、シ・2図は吸着静止時
を示す要部縦断面図、牙3図はl底面図、刈・4図は他
の実施例を示す浮上スライド時の小径断面図、2・5図
は実際の使用状態を示す胴視図、刈・6図は他の使用状
態を示す平面図、2・7図は他の使用状態を示す斜視図
である。 (1)・・・支持台、(2)・・・段部、(3)・・・
可撓性シール部材、(4,) (6)・・・通気孔、(
5)・・・溝。 特許出願人 株式会社 妙 徳 代理人弁理士 山 本 彰 司 オ)図 矛 2 図 オ 3 図 矛 4 図 第5 図 112 オ 6 図 手続補正書(自発) 昭和58年10月f日 1、事件の表示 昭和58年特許願−A−116619号2、発明の名称 エアースライド及び静止用支持台 3、補正をする者 事件との関係 特許出願人 名 称 4、代 理 人 住 所 東京都中央区八重洲二丁目10番8号明細書の
発明の詳細な説明の欄 6、補正の内容 スライドさせ、さらに天井部に吸着させて治具、工具類
の吊下げにも使用できろものである。」を加入する。 以上
The drawings show one embodiment of the present invention. Figure 1 is a box cross-sectional view of the main part showing when floating and sliding, Figure 2 is a longitudinal cross-sectional view of the main part showing when it is suctioned and stationary, and Figure 3 is L. Bottom view, Fig. 4 is a small diameter sectional view during floating slide showing another embodiment, Figs. 2 and 5 are torso views showing actual usage conditions, and Fig. 6 is a plan view showing other usage conditions. , 2 and 7 are perspective views showing other usage conditions. (1)...Support stand, (2)...Step part, (3)...
Flexible sealing member, (4,) (6)...Vent hole, (
5)...Groove. Patent Applicant Tae Toku Co., Ltd. Patent Attorney Akiyoshi Yamamoto) Zuho 2 Figure 3 Figure 112 Figure 5 Figure 112 Figure 6 Amendment to figure procedure (self-motivated) October f, 1988, Incident Indication of 1982 Patent Application-A-116619 No. 2, Name of the invention Air slide and stationary support 3, Relationship with the case of the person making the amendment Patent applicant name 4, Agent address Yaesu, Chuo-ku, Tokyo Column 6 of Detailed Description of the Invention in Specification No. 2-10-8, Contents of Correction It can be used to slide and also to hang jigs and tools by adhering to the ceiling. ” to join. that's all

Claims (1)

【特許請求の範囲】[Claims] 支持台の底面周囲には一段上方に位置する段部が設けら
れ、該段部には下端が閉塞され常時扁平状に収縮する癖
を有する中空状の可撓性シール部材が設けられ、支持台
から設けた通気孔が上記可撓性シール部材内部に連通さ
れ、上記段部な除く底面には平均的に溝が構成されて支
持台から別に設けた通気孔が連通されてなることを特徴
とするエアースライド及び静止用支持台。
A step part located one step above is provided around the bottom surface of the support stand, and a hollow flexible sealing member whose lower end is closed and has a habit of constantly contracting into a flat shape is provided in the step part. A ventilation hole provided from the supporting base communicates with the inside of the flexible sealing member, and grooves are formed on the bottom surface excluding the stepped portion, and a ventilation hole provided separately from the support base communicates with the inside of the flexible sealing member. Air slide and stationary support stand.
JP11661983A 1983-06-28 1983-06-28 Air slide and supporter for rest Granted JPS609621A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11661983A JPS609621A (en) 1983-06-28 1983-06-28 Air slide and supporter for rest
US06/622,730 US4627362A (en) 1983-06-28 1984-06-20 Air sliding device for work pallets or the like
DE8484401355T DE3465063D1 (en) 1983-06-28 1984-06-26 Air sliding device for work pallets or the like
EP84401355A EP0130905B1 (en) 1983-06-28 1984-06-26 Air sliding device for work pallets or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11661983A JPS609621A (en) 1983-06-28 1983-06-28 Air slide and supporter for rest

Publications (2)

Publication Number Publication Date
JPS609621A true JPS609621A (en) 1985-01-18
JPS6224222B2 JPS6224222B2 (en) 1987-05-27

Family

ID=14691664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11661983A Granted JPS609621A (en) 1983-06-28 1983-06-28 Air slide and supporter for rest

Country Status (1)

Country Link
JP (1) JPS609621A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009179423A (en) * 2008-01-30 2009-08-13 Kyocera Corp Floating structure, slide member, and stage device
JP5149627B2 (en) * 2005-12-15 2013-02-20 京セラ株式会社 Static pressure slider
JP2019019920A (en) * 2017-07-19 2019-02-07 株式会社Subaru Slide member and cam device including the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856741A (en) * 1981-09-27 1983-04-04 Nippon Telegr & Teleph Corp <Ntt> Device for feeding and locating stage

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856741A (en) * 1981-09-27 1983-04-04 Nippon Telegr & Teleph Corp <Ntt> Device for feeding and locating stage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5149627B2 (en) * 2005-12-15 2013-02-20 京セラ株式会社 Static pressure slider
JP2009179423A (en) * 2008-01-30 2009-08-13 Kyocera Corp Floating structure, slide member, and stage device
JP2019019920A (en) * 2017-07-19 2019-02-07 株式会社Subaru Slide member and cam device including the same

Also Published As

Publication number Publication date
JPS6224222B2 (en) 1987-05-27

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