JPS62249834A - Vacuum supporting device - Google Patents

Abstract

PURPOSE:To restrict deformation of a deformable article to be supported such as a thin plate so as to support it through vacuum by defining a vacuum adsorption face by a clearance between a supporting member and a pat and an adsorption surface. CONSTITUTION:An article to be supported X is positioned on an adsorption surface 12 of a support member 6 and an edge portion 22 of a pat 16, which has an open side sealed by contact between the article to be supported X and the edge portion of the pat 16. Then, air is sucked out through a vacuum connecting port 11 and an air port 10 to make an air passage and a clearance space 20 vacuum and thereby to define a vacuum adsorption face by the adsorp tion surface 12 and the open side of the pat 16 for supporting the article to be supported X through vacuum adsorption. If the edge portion of the pat 16 has sufficient elasticity, the edge portion can be bent to define the adsorption face flush with the adsorption surface 12, so that the article to be supported X is sufficiently kept in tight contact with the adsorption surface 12 to be positively supported through adsorption.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a novel vacuum support device that can suction support even easily deformable objects such as thin plates without deforming them.

(Prior Art) As conventional vacuum suction means, there are known ones that use a suction cup as the suction means and ones that use suction holes in a rigid body such as an iron plate to suction and support an object. Suction means using suction cups have good support and suction power, but when suctioning and supporting a thin plate that is easily deformed, the thin plate deforms. Although there is an advantage that there is no need to worry about deformation when suctioning and supporting a thin plate or the like that is easy to bend, the suction force itself is weak and there is a problem in the suction and supporting force.

Furthermore, in conventional thin plate polishing equipment, the thin plate to be polished is supported and fixed by gripping one end with a clamp means, but since the gripped part cannot be polished, the front and back are replaced and the unpolished part is polished. This had the inconvenience of having to be polished. If the thin plate is supported from below using a vacuum suction means, it has the advantage that the entire upper surface of the thin plate can be polished at once. There was a problem with adhesion, and the problem was that the suction flow rate had to be increased.

(Problems to be Solved by the Invention) The present invention was invented in order to solve the above-mentioned conventional problems. A puff with an air hole provided inside the body, the air hole opened in the support part, and the edge part made flexible)
is provided on the back surface of the support part through a gap space, and is attached to the shaft part while maintaining airtightness, and the edge of the pad is formed slightly higher than the surface of the suction surface to form an air flow path. A hole is formed in the suction surface of the support part to communicate the air hole with the gap space, and when a supported object is positioned on the suction surface and the edge of the pad, air is drawn from the air hole. By suctioning, a vacuum suction surface is formed in the gap between the support part and the pad and the suction surface, and the supported object is vacuum-supported, thereby suppressing deformation of easily deformed supported objects such as thin plates. It is an object of the present invention to provide a vacuum support device that can be supported in a vacuum, can be used as a support means for a thin plate polishing device, and can be supported so that the entire surface can be polished at one time.

(Means for Solving the Problem) The gist of the present invention is to provide a support body having a shaft portion, a support portion provided at the tip of the shaft portion and having an upper surface as a suction surface, and the support body for sucking air. An air hole is provided inside the body and opens to the support part, and an air hole is provided on the back surface of the support part through a gap space, and is attached to the shaft part while maintaining airtightness, and the edge part is connected to the suction surface. A pad that is slightly higher than the surface and has a flexible edge portion, and an air flow path that is formed by drilling the suction surface of the support and that communicates with the air hole and the gap space. A vacuum suction surface is formed in the gap between the support part and the pad and on the suction surface by positioning a supported object on the edge of the suction surface and the pad and sucking air from the air hole. The present invention relates to a vacuum support device characterized in that the object to be supported is vacuum supported.

If the pad is made movable along the shaft, and when the suction surface of the interlocking and holding part is in a vacuum suction state, the pad is pressed and moved in the direction of the proximal end of the shaft. When suctioning the object to be supported, the pad is pressed in the direction of the proximal end of the shaft portion, so that the object to be supported can be brought into closer contact with the suction surface of the support portion, resulting in an extremely good suction state. In addition, if the pad is sunk below the suction surface to prevent the object from colliding with the pad when the object is placed on the vacuum support device or moved, the pad can be easily maintained. never gets in the way.

(Example) An example of the present invention will be described below based on the accompanying drawings.

In the figure, reference numeral 2 denotes a vacuum support device according to the present invention, and a support body 8 includes a shaft portion 4 and a support portion 6 with a large diameter at the tip of the shaft portion 4.
have. 10 is an air hole provided inside the support body 8. The base end of the air hole 10 becomes a vacuum connection hole 11 connected to an air suction device (not shown), and the tip end of the air hole 10 opens into the suction surface 12 of the support part 6 and becomes an air suction hole. It is 14.

Reference numeral 16 denotes a substantially dish-shaped pad having at least an edge portion 18 that is flexible, and is provided on the back surface of the support portion 6 with a gap 20 in between, and is slidable on the shaft portion 4 while maintaining airtightness. installed. The edge portion 22 of the pad 16 is formed to be slightly higher than the suction surface 12 of the support portion 6. The material of the pad 16 is a flexible material, for example, synthetic rubber such as silicone rubber, synthetic resin, etc., and a metal base (not shown) is housed in the ζ base end portion 17 to form a hard base. It is slidably attached to the shaft portion 4 by. If the pad 16 is made of silicone rubber, there is an advantage that the heat-generating object can be attracted and supported because silicone rubber is heat resistant.

Reference numeral 24 denotes an air flow path bored in the suction surface 12 of the support portion 4, which communicates the air hole 10 with the gap space 20.

Reference numeral 26 denotes a bunt holder which is connected and fixed to the base end portion 17 of the pad 16 and is slidably attached to the shaft 4. A piston 28 is fixed to the base end portion of the bunt holder 26 and is slidably housed within the cylinder 30. By feeding pressurized air into the cylinder 30, the piston 28 is forced to move in the direction of arrow A in FIG. With this configuration, when the height of the edge of the cough pad 16 is too high than the suction surface of the support section 6 and the supported object X is not in sufficient contact with the suction surface 12, etc., by moving the piston 28 in the direction of arrow A, the pad 16 also moves in the direction of arrow A, that is, the supported object It will be done. In this case, it goes without saying that unless the suction force of the suction surface 12 and pad 16 is greater than the force of movement by the piston 28, the suction state will be released. Note that S is a spring that constantly biases the piston 28 in the opposite direction of the arrow A, and
When the pressure air in the piston 28 is exhausted, the piston 28 is moved in the direction of the arrow and returned to its original position.

Furthermore, if the pad 16 is made movable, as shown in FIG. 4, when the supported object 12 or less, the supported object
There is an advantage that the ball does not collide with the putt 16 and the putt 16 does not get in the way.

31 is a bracket fixed to the center portion of the pad holder 26. A support surface extension plate 34 is attached to the tip of the bracket 31 via a spacer 32. The spacer 32 is hollow, and the support surface extension plate 34 is attached by passing a bolt through the hollow part.

These brackets 31, spacers 32, and support surface extension plates 34 are used when the supported object X is small and the support portion 6 and pad 16 are
Although it is not necessary to use it when the supported object X is properly supported and adsorbed by
When used in cases where sufficient support and suction cannot be achieved with the support alone, the receiver allows appropriate support and suction to be achieved by expanding the surface.

(Function) The suction surface 12 of the support portion 6 and the edge portion 2 of the pad 16
2, the open side of the pad 16 is sealed by contact between the supported object By suctioning air, the air flow path 24 and the gap space 20 are brought into a vacuum state, and the suction surface 12 and the pad 1 are
A vacuum suction surface is formed on the open surface side of 6, and the object to be supported X can be supported by vacuum suction.

When the edge portion of the pad 16 has sufficient flexibility, the edge portion is bent to form a suction surface flush with the suction surface 12, so that the supported object
It is in close contact with the surface and is reliably supported and adsorbed. but,
When only the tip of the edge portion of the pad 16 is flexible, there is a possibility that the edge portion and the suction surface 12 are not flush with each other, and the supported object X does not adhere sufficiently to the suction surface 12. It will be done. In this case, as described above, by feeding pressurized air into the cylinder 30, the piston 28, the pad holder 26, and the pad 16 are drawn in, and the supported object X is pressed against the suction surface 12 and completely brought into close contact. It is possible to ensure suction support.

By providing a large number of air channels 24 formed on the suction surface 12 within a range that does not cause deformation of the supported object X, that is, the product, the suction area becomes large, and therefore the suction force becomes large. It is possible to provide an optimal air flow path corresponding to the product by taking into consideration the deformation of the product and the adsorption force.

It is preferable that the shape of the suction surface 12 of the support portion 6 and the top surface shape of the pad 16 are similar. For example, when the top surface shape of the support portion 6 is circular as in the above embodiment, the pad 16 The suction condition is good if the top surface shape is also circular.

In the above embodiment, an example was shown in which the air suction hole 14 was formed on the suction surface 12 of the support section 6.
2, as shown in FIG. 5, an opening may be provided on the back side of the support portion 6 to suck air from the gap space 20. That is, the air suction hole 14 may be opened on the top surface and/or the back surface of the support portion 6;
Further, a plurality of air suction holes 14 may be provided.

In addition, in the embodiment described above, the suction surface 12 of the support section 6
Although the shape of the suction surface is explained as being circular, the shape of the suction surface can be changed as appropriate depending on the object to be suctioned and supported, and as shown in Fig. 6, it can also be made into a rectangular support part. When supporting , as shown in Figure 7 and (
, it is also possible to install a large number of support parts 6. Furthermore, even in the case of a circular suction surface, various modifications are possible depending on the device to be attached. FIG. 8 schematically shows the case where it is attached to a lathe or the like. Note that the direction in which the suction surface 12 is slid (
If the suction holding force in the lateral direction is insufficient, the holding force can be improved by applying anti-slip treatment to the suction surface, such as rubber coating or rubber pasting.

In Fig. 1, B is the pad 16 and the pad holder 26.
This is a bolt that fixes the It is usually sufficient to use four bolts B, but the other three are omitted in the drawing.

(Effects of the Invention) As described above, the present invention provides an air hole inside a support body having a shaft portion and a support portion provided at the tip of the shaft portion,
The air hole is opened in the support part, a pad with a flexible edge part is provided on the back surface of the support part with a gap space, and the end of the pad is attached to the shaft part while maintaining airtightness. The edge portion is formed slightly higher than the surface of the suction surface, and an air flow path is formed by perforating the suction surface of the support part to communicate the air hole with the gap space. A supported object is placed on the surface and the edge of the pad, and air is sucked through the air holes to form a vacuum suction surface in the gap between the supporting portion and the pad and on the suction surface, and the supported object is Since it is configured for vacuum support, it is possible to vacuum support easily deformable objects such as thin plates while suppressing deformation, and has the great effect of being extremely useful as a support means for thin plate polishing equipment. play.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is an illustrated view of the suction surface of the support, and FIG. 3 is an illustrated sectional view of the support.
Fig. 4 is an explanatory cross-sectional view showing the vertical movement of the pad, Fig. 5 is an explanatory cross-sectional view showing another example of installing air suction holes, and Fig. 6 is an explanatory cross-sectional view showing the vertical movement of the pad.
FIG. 7 is an explanatory diagram showing another embodiment, FIG. 7 is an explanatory diagram showing still another embodiment, and FIG. 8 is an explanatory diagram showing another embodiment. 2-vacuum support device, 4...-shaft section, 6-support section, 8...-
・Support, lO・-air hole, 12-・-adsorption surface, 14
...-Air suction hole, 16--Put, 24--Air flow path, 28--Piston, 30--Cylinder, X
・−・Supported body.

Claims (2)

[Claims] (1) A support body having a shaft portion and a support portion provided at the tip of the shaft portion and having an upper surface as a suction surface, and an air provided within the support body and opened to the support portion for sucking air. a hole, and an edge portion that is provided on the back surface of the support portion through a gap space, is attached to the shaft portion while maintaining airtightness, and has an edge portion formed slightly higher than the surface of the suction surface. a pad made of flexible material, and an air flow path formed by drilling the suction surface of the support portion and communicating with the air hole and the gap space, the suction surface and the edge of the pad. By positioning the object to be supported and sucking air through the air hole, a vacuum suction surface is formed in the gap between the support portion and the pad and the suction surface, and the object to be supported is vacuum supported. Characteristic vacuum support device. (2) The vacuum support device according to claim 1, wherein the pad is movable along the shaft portion.