JPS6095705A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To improve the yield by coating a magnetic material thin film having a saturated magnetic flux density different from that of a magnetic base onto the magnetic base after a slot for setting track width is formed and processed on the magnetic base being a base material of a core element chip. CONSTITUTION:A slot 31 is processed to the magnetic base 22 made of a ferrite and a magnetic material thin film 24 made of ''Sendust'' having a saturation magnetic flux higher than that of the base 22 is formed by coating it on the surface of the slot 31 by the sputtering or the like. Then a slot 32 being a winding hole and a slot 33 being an alignment reference face are formed on the 2nd magnetic base 23 made of ferrite. The magnetic bases 22, 23 are bonded by using glass via a gap spacer so that a required gap is formed, then the bonded bases 22, 23 are cut off at alternate long and two short dashes lines (q), (r) passing through the center of the bottom of the slot 31 so as to obtain a divided head chip 34 as the magnetic head.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for disposing a magnetic material thin film having a saturation magnetic flux density higher than that of the core piece on the magnetic gigang forming surface side of the core piece. The present invention relates to a method of manufacturing a magnetic head.

[Background technology and its problems]

For example, as signals magnetically recorded on magnetic tape, which is a magnetic recording medium of VTR (Video Cheap Recorder), become more dense, magnetic tapes such as Nocle tape, which has a high residual magnetic flux density Br, are introduced. It's been used a lot. The magnetic head used for the magnetic tape with a high coercive force of 1-fc (r) of this metal tape hemorrhoid needs to increase the magnetic field strength near the magnetic gap.・A pair of magnetic core pieces with a saturation magnetic flux density higher than the saturation magnetic flux density of the magnetic monthly core piece (A-specific 'fi' J I model) are placed on the magnetic canog formation side of the core piece. It is arranged on one or both of the core pieces.

Next, a conventionally known manufacturing method for such a magnetic head will be explained.

As shown in Figure 1A, for example, manganese zinc ferrite (Mn-Z
After grinding the surface of the substrate 1, the surface of the substrate 1 is mirror-polished.As shown in FIG.
A magnetic material thin film 2 made of, for example, Sendust, has a high saturation magnetic flux density on the surface of Mn-Zn ferrite.
is deposited using sputtering or the like. At the same time, a predetermined trunk width Tw is obtained as shown in FIG. 1C. Finally, a groove 3 for setting the trunk width is formed on the substrate 1 by so-called lapping with a grindstone or by enochinder. Next, as shown in the first diagram, the Mll-Zn ferrite block 4, which will become the core piece on the winding side, and the Glock 5 in which the groove 3 is formed are fused together using a glass plate via a gearing spacer. Join. Thereafter, it is cut and divided into pieces corresponding to 7271 magnetic heads that have been bonded together, and 111-sided polishing and cylindrical polishing of the magnetic tape abutting surface are performed to obtain the magnetic head shown in FIG. This second
In the figure, a core piece 7 is formed using a ferrite block 5 as a raw material, and a core piece 8 is formed using a ferrite block 4 as a base material.

As explained above, in the conventional manufacturing method, Mn-Zn
After a magnetic material thin film 2 is deposited on a ferrite substrate 1, the groove 3 for setting the trunk width is formed. For this reason, for example, during machining to form the groove 3 for setting the trunk width, stress is applied to the thin film 2, which may cause the thin film 2 to peel off, or the force of the thin film 2 (the edges may change in quality. There was also the occurrence of paris at the edges, which required a separate process to remove the burrs.0 Furthermore, the stress on the interface between the thin film 2 and the ferrite substrate is
Even if it does not peel off, when fusion bonding with glass 6,
There is a possibility that a pseudo gigang may be formed due to this seepage of the glass 6. As described above, the conventional method of manufacturing a magnetic head has the problem that stable manufacturing cannot be performed. Purpose of the Invention] Therefore, the present invention has been proposed in view of the above circumstances.
A method for manufacturing a magnetic head in which a magnetic material used for the core piece is coated with a magnetic thin film having a high saturation magnetic flux density on the magnetic gear forming surface side of the core piece. Provided is a method for manufacturing a stable magnetic head in which stress is not applied to the thin film and peeling of the thin film does not occur when forming a groove for setting the trunk width. The purpose is to

[Summary of the invention]

In order to achieve this object, the method for manufacturing a magnetic head of the present invention includes the steps of forming a plurality of sound deadening layers on a first magnetic substrate while leaving a trunk width, and a magnetic head material having a higher saturation magnetic flux density than the above-mentioned substrate a. a step of forming a thin film on the grooved surface side of the first magnetic substrate; a step of forming a groove to become a winding hole in the second magnetic substrate; and a step of forming a thin film on the grooved surface side of the first magnetic substrate; A process of joining the first and second magnetic substrates through the entire gap spacer that provides the required gear knob spacing, and a process of cutting the combined first and second magnetic substrates into the groove part formed on the first L0D magnetic substrate to obtain a hentochinob. Features.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 3 shows a process diagram of a method for manufacturing a magnetic head according to the present invention, and FIG. 4 is an external perspective view of a magnetic head manufactured by this method.

By the way, this magnetic node is connected to the core piece 13 in which the winding hole 11 is formed via a gap spacer 15 to the glass 16.
A thin film of magnetic material 14 is formed only on the magnetic gear forming surface side of the core piece 12 which is spaced and joined using the above-mentioned method. This magnetic material thin film 14 is made of, for example, manganese zinc twerite (Mn-Zn
Ferrite] also has a high saturation magnetic flux density2. Such a magnetic head has a high magnetic field intensity generated from the magnetic gap, and is not suitable for use with magnetic tapes such as +1/tape, which have a high coercive force Hc'. Further, the above manufacturing method is effective as a method for manufacturing a magnetic head having a narrow track width Tw of, for example, 20 μtn. It can be used as a fixed head or as a PCM head.

At this point, the steps of the above manufacturing method will be explained step by step with reference to FIG.

First, as shown in FIG. 3A, the surface of the first m-type substrate 22 made of, for example, Mn--Zn noelite is ground.

This magnetic substrate 22 is the base material of the core piece 12.

In the step of attaching, as shown in FIG. 3B, the substrate 22
, leaving the trunk width Twi and groove 3 for trunk width setting.
1 is formed by machining using a grindstone, etc., and then the processed surface side is mirror-polished.

In the next step, as shown in FIG. 3C, a thin film 24 of a magnetic material such as so-called sendust having a higher saturation magnetic flux density than that of the substrate 22 is applied to the entire surface of the processed surface of the groove 31 of the substrate 22. 9. Deposit by sputtering or the like.

In the next step, as shown in the third diagram, for example, M n
-Z In the second magnetic substrate 23 made of IN ferrite, grooves 3 that will become the winding holes 11 and grooves 33 that will become the alignment reference plane are formed.

In the next step, as shown in FIG. 3E, the first magnet 1
The magnetic substrate 22 and the second magnetic substrate 23 are fused and bonded using glass via a Gyanoptic spacer so that a required gap interval t is formed.

By the way, this gap spacer is deposited using sputtering or the like.

7. Then, in the next step, the entire substrate 22, 23 is cut into grooves 3 formed in the first substrate 22, as shown in FIG. 3F.
Cut along the two-dot chain line q passing through the center of each part of 1, and also cut along the two-dot chain line r to divide fLfc hentochinobu 3
Get 4. This hendoching 34 corresponds to one magnetic nod.

Thereafter, the side surface of the hend chimp 34 and the cylindrical polishing of the magnetic tape abutting surface are performed to obtain the magnetic helix shown in FIG.

In this way, according to the present invention, the trunk width setting groove 31
After forming and processing, a magnetic phase AC1 thin film 24 made of Sendust, for example, is deposited.

Therefore, stress is not applied to the thin film 24 when forming the groove 31, and this stress prevents peeling of the thin film 24 and deterioration of the processed edge, which conventionally occur. It never seems to occur.

Further, there is no possibility that a pseudo-gearnon is formed.

This non-explosion of ]:9 makes it possible to manufacture a very stable magnetic head. 1. By the way, FIG. 5 shows a magnetic head formed according to another embodiment of the present invention. According to this embodiment, after forming the groove 31 and depositing the thin film 24 on the entire surface,
The thin film 24 deposited near each portion of the groove 31 is removed by machining. Therefore, the thin film 17 remains in the magnetic head only in the vicinity of the magnetic layer, and the core piece 12 and the glass 16 for fusion bonding are directly bonded.
A constant chip strength can be obtained regardless of the adhesion strength.

In the two embodiments described above, the magnetic material thin film is disposed only on one side of the gap spacer 15, but the present invention can also be applied to a magnetic head disposed on both sides.

By the way, No. 1. In addition to Mn-Zn ferrite, nickel zinc twerite (Ni-Zn noelite) or the like may be used as the magnetic material of the second magnetic substrates 22 and 23.

In addition, as a high saturation magnetic flux density old system of magnetic material thin film, iron-aluminum-silicon system (Fe-AJ, -8i system)
In addition to the above-mentioned so-called sendust, an amorphous material represented by M-X may also be used. Here, MldFe,
Co (cobalt/l/t), Ni, X, sl, B (boron), P (phosphorus), C (carbon), etc. As a crystalline phase, F”e−
[Effects of the Invention] As is clear from the above description, the present invention has the advantage that the magnetic substrate that is the base material of the core piece can be used for setting the trunk width. After forming and processing the grooves, a thin film of magnetic material having a saturation magnetic flux density different from that of the magnetically annotated substrate is deposited on the above-mentioned magnetic substrate on the grooved surface side. Therefore, no stress is applied to the thin film due to mechanical machining during groove formation, and peeling of the thin film and deterioration of the processed edges are prevented. Furthermore, there is no possibility of occurrence of cracks at the processed edges. Furthermore, the formation of pseudo gigangs is also prevented.

Therefore, according to the present invention, it is possible to improve the yield rate in manufacturing the magnetic helix, and it is also possible to improve the quality of the magnetic helix.

[Brief explanation of the drawing]

Fig. 1 is a process diagram showing the conventional manufacturing method of a magnetic head; FIG. 4 is a perspective view of the external appearance of a magnetic head manufactured by the manufacturing method of the present invention, and FIG. External appearance of the magnetic head (main figure) 11...Winding hole 14.17...Magnetic material thin film 15...Gap spacer 16...Glass 22.23...Magnetic substrate 24...・Magnetic material thin film 31... Groove 32 for trunk width setting... Groove 34 for winding and wire type... Hentochinobu patent applicant Sony Corporation representative Patent attorney Kodo Koike 1) Toshiei - No. 1I people

Claims (1)

[Claims] A step of forming a plurality of sound deadening layers on the first magnetic substrate while leaving a trunk width, and a step of forming a magnetic feed thin film having a saturation magnetic flux density of (%) on the grooved surface side of the first magnetic substrate. , a step of forming a groove to serve as a winding hole in a second magnetic substrate, and a step of joining the first magnetic substrate and the second magnetic raw substrate via a gap spacer having a required gap spacing. A method for manufacturing a magnetic head, comprising the steps of: (1) cutting the grooves formed in the magnetic substrates of the combined first and second magnetic substrates (1) to obtain a henodonchimp.