JPS609536U - 原料ガス発生・供給装置 - Google Patents

原料ガス発生・供給装置

Info

Publication number
JPS609536U
JPS609536U JP9942683U JP9942683U JPS609536U JP S609536 U JPS609536 U JP S609536U JP 9942683 U JP9942683 U JP 9942683U JP 9942683 U JP9942683 U JP 9942683U JP S609536 U JPS609536 U JP S609536U
Authority
JP
Japan
Prior art keywords
raw material
container
pipe
gas
gas generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9942683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335376Y2 (enExample
Inventor
日野　功
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP9942683U priority Critical patent/JPS609536U/ja
Publication of JPS609536U publication Critical patent/JPS609536U/ja
Application granted granted Critical
Publication of JPH0335376Y2 publication Critical patent/JPH0335376Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP9942683U 1983-06-29 1983-06-29 原料ガス発生・供給装置 Granted JPS609536U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9942683U JPS609536U (ja) 1983-06-29 1983-06-29 原料ガス発生・供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9942683U JPS609536U (ja) 1983-06-29 1983-06-29 原料ガス発生・供給装置

Publications (2)

Publication Number Publication Date
JPS609536U true JPS609536U (ja) 1985-01-23
JPH0335376Y2 JPH0335376Y2 (enExample) 1991-07-26

Family

ID=30235627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9942683U Granted JPS609536U (ja) 1983-06-29 1983-06-29 原料ガス発生・供給装置

Country Status (1)

Country Link
JP (1) JPS609536U (enExample)

Also Published As

Publication number Publication date
JPH0335376Y2 (enExample) 1991-07-26

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