JPS6093935A - Vacuum container - Google Patents

Vacuum container

Info

Publication number
JPS6093935A
JPS6093935A JP20092983A JP20092983A JPS6093935A JP S6093935 A JPS6093935 A JP S6093935A JP 20092983 A JP20092983 A JP 20092983A JP 20092983 A JP20092983 A JP 20092983A JP S6093935 A JPS6093935 A JP S6093935A
Authority
JP
Japan
Prior art keywords
vacuum
cylindrical tube
cylindrical pipe
cooling fin
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20092983A
Other languages
Japanese (ja)
Inventor
Nushito Takahashi
主人 高橋
Yuichi Ishikawa
雄一 石川
Kenji Otaka
憲二 尾高
Muneo Furuse
宗雄 古瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20092983A priority Critical patent/JPS6093935A/en
Publication of JPS6093935A publication Critical patent/JPS6093935A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To make it possible to measure a vacuum degree accurately by attaching a hot-cathode ionization vacuum gage to a standed cylindrical tube and preventing heat generation of the cylindrical pipe during the measurement of a vacuum degree. CONSTITUTION:To a cylindrical pipe 5, a cooling fin 7, which is constituted of an inner peripheral surface 7a closely adhered to the outer peripheral surface of the cylindrical tube 5, plate shaped fins 7b for enlarging a surface area and enhancing heat dissipating effect and an attaching plate 7c, is attached. This cooling fin 7 is formed into a half-split shape and constituted in sets of two and attached to the cylindrical pipe 5 through the utilization of the attaching plate 7c by a bolt 8. As a result, heat is dissipated by the cooling fin 7 even if the cylindrical pipe 5 is heated by the heater of a vacuum gage and, therefore, the rising in the temp. of the cylindrical pipe 5 can be prevented.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は真空容器に関し、特に発熱型の熱陰極電離真空
計を使用して真空度を測定する際に、真空計を取付けた
円筒管部の発熱を防止し、正確な真空度を測定するため
に好適な真空容器に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a vacuum vessel, and in particular, when measuring the degree of vacuum using a heat-generating hot cathode ionization vacuum gauge, it is possible to use The present invention relates to a vacuum container suitable for preventing heat generation and accurately measuring the degree of vacuum.

〔発明の背景〕[Background of the invention]

従来の熱陰極電離真空計の取付は、第１図に示すように
、真空容器から分岐したフランジ付円筒管の中に、然る
べきシール法で取付けるようになっていた。すなわち、
第１図は、真空容器で、真空計のフランジ１と円筒管５
のフランジ３に銅ガ（１） スケット６を介し、ボルト４で締付けて真空計を取付け
た例であるが、真空計のヒータ２により円筒管５が加熱
される。円筒管５の長さを短縮してヒータ２を真空容器
の中に完全に挿入できれば良いが、装置の都合上、第１
図の様に円筒管５の中にヒータ２が設置せざるを得ない
場合もある。この場合、円筒管５が加熱され、円筒管５
の表面からガスが放出される。ガスが放出されるため、
真空度は悪くなり、正確な測定ができないという欠点が
あった。また、これを避けるために、円筒管５の管径を
大きくするという方法が取られているが、コスト高にな
ることや真空容器の内表面面積が増加し、真空容器とし
て好ましくないという欠点があった。As shown in FIG. 1, a conventional hot cathode ionization vacuum gauge is installed in a flanged cylindrical tube branched from a vacuum vessel using an appropriate sealing method. That is,
Figure 1 shows a vacuum vessel with a vacuum gauge flange 1 and a cylindrical tube 5.
In this example, a vacuum gauge is attached to the flange 3 of the vacuum gauge through a copper gasket (1) and a socket 6, tightened with bolts 4, and the cylindrical tube 5 is heated by the heater 2 of the vacuum gauge. It would be fine if the length of the cylindrical tube 5 could be shortened so that the heater 2 could be completely inserted into the vacuum container, but due to equipment reasons, the first
In some cases, the heater 2 must be installed inside the cylindrical tube 5 as shown in the figure. In this case, the cylindrical tube 5 is heated and the cylindrical tube 5
Gas is released from the surface of the As gas is released,
This had the disadvantage that the degree of vacuum deteriorated and accurate measurements could not be made. In order to avoid this, a method of increasing the diameter of the cylindrical tube 5 has been taken, but this method has the drawbacks of increasing cost and increasing the inner surface area of the vacuum container, making it undesirable as a vacuum container. there were.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、標準の円筒管に熱陰極電離真空計を取
付けて、真空度測定中の円筒管の発熱を防ぐことにより
、正確な真空度測定が可能になる真空容器を提供するこ
とにある。An object of the present invention is to provide a vacuum container that enables accurate vacuum measurement by attaching a hot cathode ionization vacuum gauge to a standard cylindrical tube and preventing the cylindrical tube from generating heat during vacuum measurement. be.

〔発明の概要〕[Summary of the invention]

（２） 一般に真空容器の内表面からは、水や水素、−酸化炭素
などのガス分子が放出され、真空容器の到達真空度に影
響を及ぼしている。従って、真空度を向上させるには、
真空容器の内表面積を最少にするか、放出ガス量を少な
くしなければならない。また、放出ガス量は、材料の温
度が高い程多くなる。(2) Generally, gas molecules such as water, hydrogen, and carbon oxide are released from the inner surface of a vacuum container, which affects the ultimate vacuum degree of the vacuum container. Therefore, to improve the degree of vacuum,
The internal surface area of the vacuum container must be minimized or the amount of gas released must be reduced. Further, the amount of released gas increases as the temperature of the material increases.

以上のことを考慮すると、細い円筒管の中に取付けられ
た熱陰極電離真空計は、真空度の測定中に円筒管を加熱
するため、多量のガス放出を誘起し、正確な真空度が測
定できない。Considering the above, hot cathode ionization vacuum gauges installed in a thin cylindrical tube heat the cylindrical tube while measuring the degree of vacuum, which induces a large amount of gas to be released, making it possible to accurately measure the degree of vacuum. Can not.

ガス放出を少なくし、真空容器の内表面積を少なくする
ためには、熱陰極電離真空計のヒータによる円筒管の加
熱に際し、円筒管の温度上昇を防ぐ必要がある。In order to reduce gas release and reduce the inner surface area of the vacuum vessel, it is necessary to prevent the temperature of the cylindrical tube from rising when the cylindrical tube is heated by the heater of the hot cathode ionization vacuum gauge.

本発明の真空容器は、以上のことを、円筒管の冷却を行
なうことによって達成しようというもので、冷却を必要
とする円筒管付きの真空容器において、円筒管の外周面
に密着する内面と周囲に複数の板状あるいは線状突起を
有し、分割可能な冷（３） 却フィンを取付けたことを特徴とするものである。The vacuum container of the present invention aims to achieve the above by cooling the cylindrical tube.In a vacuum container with a cylindrical tube that requires cooling, the inner surface and the surrounding area that are in close contact with the outer peripheral surface of the cylindrical tube are It is characterized by having a plurality of plate-like or linear protrusions on the top and attaching divisible cooling fins.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第２図、第３図により説明す
る。図において９は真空容器で円筒管５が設けられてい
る。An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. In the figure, reference numeral 9 denotes a vacuum vessel in which a cylindrical tube 5 is provided.

円筒管５には、該円筒管５の外周面に密着する内周面７
ａと表面積を大きくし放熱効果を高めた板状のフィン７
ｂと取付は用板７Ｃから構成される冷却フィン７が取付
けられている。冷却フィン７は半割状になっており、２
個１組で構成され、取付は用板７Ｃを利用し、ボルト８
等で円筒管５に取付けられる。真空計のヒータ２で円筒
管５が加熱されても、冷却フィン７により放熱されるた
め、円筒管５の温度上昇を防ぐことができる。以上１本
実施例によれば、円筒管の温度上昇を防止でき、真空度
の正確な測定ができるという効果がある。The cylindrical tube 5 has an inner circumferential surface 7 that is in close contact with the outer circumferential surface of the cylindrical tube 5.
A plate-shaped fin 7 with a large surface area and enhanced heat dissipation effect
A cooling fin 7 made up of a mounting plate 7C is attached to the cooling fin 7b. The cooling fins 7 are divided into halves, and
Consists of one set of pieces, and is installed using plate 7C and bolts 8
etc., to be attached to the cylindrical tube 5. Even if the cylindrical tube 5 is heated by the heater 2 of the vacuum gauge, the heat is radiated by the cooling fins 7, so that the temperature of the cylindrical tube 5 can be prevented from rising. According to the first embodiment described above, the temperature rise in the cylindrical tube can be prevented and the degree of vacuum can be accurately measured.

なお、本実施例、板状フィン７ｂを示したが、板状に限
るものではなく、針状としても良い。In addition, although the plate-shaped fin 7b is shown in this embodiment, it is not limited to the plate shape, and may be needle-shaped.

〔発明の効果〕〔Effect of the invention〕

（４） 以上説明したように本発明によれば、真空容器に取付け
られた円筒管の温度上昇を防ぎ、正確な真空度の測定が
できるので、従来のように、円筒管を大きくして発熱を
防止する必要が無く、このため小型の真空容器を得るこ
とができる。(4) As explained above, according to the present invention, it is possible to prevent the temperature rise of the cylindrical tube attached to the vacuum container and to accurately measure the degree of vacuum. Therefore, it is possible to obtain a small-sized vacuum container.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、従来の真空容器の断面図、ｆｆ１２１２！け
本発明の真空容器の側面図、第３図は本発明の真空容器
に取付けられる冷却フィンの斜視図である。 １・・・フランジ、２・・・ヒータ、３・・・フランジ
、４・・・ボルト、５・・・円筒管、６・・・ガスケツ
［・、７・・・冷却フィン、８・・・ボルト、９・・・
真空容器。 代理人　弁理士　高橋明夫 （５） 第　１　図 ｆｌ　ｚ　図 Ｌ Ｔ　Ｊ　図Figure 1 is a sectional view of a conventional vacuum container, ff1212! FIG. 3 is a side view of the vacuum container of the present invention, and FIG. 3 is a perspective view of cooling fins attached to the vacuum container of the present invention. 1...Flange, 2...Heater, 3...Flange, 4...Bolt, 5...Cylindrical tube, 6...Gasket [..., 7...Cooling fin, 8... Bolt, 9...
vacuum container. Agent Patent Attorney Akio Takahashi (5) Figure 1 fl z Figure L T J Figure

Claims (1)

【特許請求の範囲】[Claims] １、冷却を必要とする円筒管付きの真空容器において１
円筒管の外周面に密着する内面と周囲に複数の板状ある
いは線状突起を有し、分割可能な冷却フィンを取付けた
ことを特徴とする真空容器。1. In a vacuum container with a cylindrical tube that requires cooling 1.
A vacuum vessel characterized by having a plurality of plate-shaped or linear protrusions on the inner surface and the periphery that are in close contact with the outer peripheral surface of a cylindrical tube, and having divisible cooling fins attached thereto.
JP20092983A 1983-10-28 1983-10-28 Vacuum container Pending JPS6093935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20092983A JPS6093935A (en) 1983-10-28 1983-10-28 Vacuum container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20092983A JPS6093935A (en) 1983-10-28 1983-10-28 Vacuum container

Publications (1)

Publication Number Publication Date
JPS6093935A true JPS6093935A (en) 1985-05-25

Family

ID=16432627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20092983A Pending JPS6093935A (en) 1983-10-28 1983-10-28 Vacuum container

Country Status (1)

Country Link
JP (1) JPS6093935A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169226A (en) * 2017-03-29 2018-11-01 株式会社堀場エステック Pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169226A (en) * 2017-03-29 2018-11-01 株式会社堀場エステック Pressure sensor

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