JPS6092835U - クリ−ニングウエハの保持機構 - Google Patents

クリ−ニングウエハの保持機構

Info

Publication number
JPS6092835U
JPS6092835U JP18546483U JP18546483U JPS6092835U JP S6092835 U JPS6092835 U JP S6092835U JP 18546483 U JP18546483 U JP 18546483U JP 18546483 U JP18546483 U JP 18546483U JP S6092835 U JPS6092835 U JP S6092835U
Authority
JP
Japan
Prior art keywords
loader
wafer
transports
cleaning wafer
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18546483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331392Y2 (enrdf_load_stackoverflow
Inventor
矢嶌　淳
秋田　栄一
Original Assignee
安藤電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 安藤電気株式会社 filed Critical 安藤電気株式会社
Priority to JP18546483U priority Critical patent/JPS6092835U/ja
Publication of JPS6092835U publication Critical patent/JPS6092835U/ja
Application granted granted Critical
Publication of JPS6331392Y2 publication Critical patent/JPS6331392Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18546483U 1983-11-30 1983-11-30 クリ−ニングウエハの保持機構 Granted JPS6092835U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18546483U JPS6092835U (ja) 1983-11-30 1983-11-30 クリ−ニングウエハの保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18546483U JPS6092835U (ja) 1983-11-30 1983-11-30 クリ−ニングウエハの保持機構

Publications (2)

Publication Number Publication Date
JPS6092835U true JPS6092835U (ja) 1985-06-25
JPS6331392Y2 JPS6331392Y2 (enrdf_load_stackoverflow) 1988-08-22

Family

ID=30400852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18546483U Granted JPS6092835U (ja) 1983-11-30 1983-11-30 クリ−ニングウエハの保持機構

Country Status (1)

Country Link
JP (1) JPS6092835U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6331392Y2 (enrdf_load_stackoverflow) 1988-08-22

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