JPS6090833U - 半導体材料の水切乾燥装置 - Google Patents

半導体材料の水切乾燥装置

Info

Publication number
JPS6090833U
JPS6090833U JP18264083U JP18264083U JPS6090833U JP S6090833 U JPS6090833 U JP S6090833U JP 18264083 U JP18264083 U JP 18264083U JP 18264083 U JP18264083 U JP 18264083U JP S6090833 U JPS6090833 U JP S6090833U
Authority
JP
Japan
Prior art keywords
rotor
guide members
utility
model registration
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18264083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514508Y2 (enrdf_load_stackoverflow
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP18264083U priority Critical patent/JPS6090833U/ja
Publication of JPS6090833U publication Critical patent/JPS6090833U/ja
Application granted granted Critical
Publication of JPH0514508Y2 publication Critical patent/JPH0514508Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP18264083U 1983-11-25 1983-11-25 半導体材料の水切乾燥装置 Granted JPS6090833U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18264083U JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18264083U JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Publications (2)

Publication Number Publication Date
JPS6090833U true JPS6090833U (ja) 1985-06-21
JPH0514508Y2 JPH0514508Y2 (enrdf_load_stackoverflow) 1993-04-19

Family

ID=30395477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18264083U Granted JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Country Status (1)

Country Link
JP (1) JPS6090833U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0170330U (enrdf_load_stackoverflow) * 1987-10-28 1989-05-10

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295167A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer
JPS5324299A (en) * 1976-08-18 1978-03-06 Nec Corp Fm-cw radar
JPS5528549A (en) * 1978-08-19 1980-02-29 Sony Corp Servo circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295167A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer
JPS5324299A (en) * 1976-08-18 1978-03-06 Nec Corp Fm-cw radar
JPS5528549A (en) * 1978-08-19 1980-02-29 Sony Corp Servo circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0170330U (enrdf_load_stackoverflow) * 1987-10-28 1989-05-10

Also Published As

Publication number Publication date
JPH0514508Y2 (enrdf_load_stackoverflow) 1993-04-19

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