JPS6090833U

JPS6090833U - Semiconductor material draining and drying equipment

Info

Publication number: JPS6090833U
Application number: JP18264083U
Authority: JP
Inventors: 相合　征一郎
Original assignee: 黒谷　巌
Priority date: 1983-11-25
Filing date: 1983-11-25
Publication date: 1985-06-21
Also published as: JPH0514508Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は本考案の一例による水切乾燥装置を部分的に切
欠いた斜視図、第２図はその概略断面図、第３図はその
内部を示す平面図、第４図は第２図の線Ａ−Ａから見た
平面図、第５図は一つの社内部材の斜視図、第６図は他
の実施例を示すロータの部分的な斜視図、そして第７図
は他の実施例を示す第４図に類似の平面図である。図中、１・・田−タ、２・・・ケーシング、２ａ・・・
周壁、５・・・支持部、６・・・吸気口、７・・・排気
口、１１　　　゛・・・案内部材、１１′・・・案内板
の縁。Fig. 1 is a partially cutaway perspective view of a drain dryer according to an example of the present invention, Fig. 2 is a schematic sectional view thereof, Fig. 3 is a plan view showing the inside thereof, and Fig. 4 is a line taken along the line of Fig. 2. A plan view taken from A-A, FIG. 5 is a perspective view of one internal member, FIG. 6 is a partial perspective view of the rotor showing another embodiment, and FIG. 7 is another embodiment. FIG. 4 is a plan view similar to FIG. 4; In the figure, 1...data, 2...casing, 2a...
Peripheral wall, 5...Support part, 6...Intake port, 7...Exhaust port, 11゛...Guide member, 11'...Edge of guide plate.

Claims

[Scope of utility model registration request]

(1) comprising a rotor installed in a casing and having one or two supports on which carriers containing semiconductor materials such as silicon wafers to be drained and dried are placed; the rotor is introduced from an air inlet above the rotor; The semiconductor material placed on the rotor is dried by the gas passed through the rotor and discharged through the exhaust port in the casing peripheral wall. at least three guide members disposed in the outer region of the rotor, each guide member comprising a substantially vertical curved surface with its convex side inward, and the support portion being disposed between the guide members. The drain dryer featured on the left.

(2) Utility Model Registration Scope of Claim 1. The drain dryer according to claim 1, wherein the four guide members are provided on the rotor.

(3) Utility Model Registration Scope of Claims In the drain drying device according to claim 1, each of the guide members is made of a curved plate, and the edges on both sides of the guide member are slightly protruded outward from the outer periphery of the rotor. .

(4) Utility Model Registration Scope of Claim 1. The drain drying device according to claim 1, wherein each of the guide members is inclined downward in a widening shape.