JPS59101190U - Top lid of drain dryer - Google Patents

Top lid of drain dryer

Info

Publication number
JPS59101190U
JPS59101190U JP19412482U JP19412482U JPS59101190U JP S59101190 U JPS59101190 U JP S59101190U JP 19412482 U JP19412482 U JP 19412482U JP 19412482 U JP19412482 U JP 19412482U JP S59101190 U JPS59101190 U JP S59101190U
Authority
JP
Japan
Prior art keywords
top lid
drain
main body
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19412482U
Other languages
Japanese (ja)
Inventor
相合　征一郎
Original Assignee
黒谷　信子
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　信子 filed Critical 黒谷　信子
Priority to JP19412482U priority Critical patent/JPS59101190U/en
Publication of JPS59101190U publication Critical patent/JPS59101190U/en
Pending legal-status Critical Current

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  • Drying Of Solid Materials (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一例による上蓋を備えた水切乾燥装置
を部分的に切欠いた斜視図、第２図はその概略断面図、
第３図は本体の内部を示す平面図、第４図は他の実施例
を示す一部の断面図である。 図中、１・・・ロータ、２・・・ケーシング、１０・・
・上ｉ、１１．１２・・・フィルター、１４・・・ガイ
ド、１４′・・・ガ、イドの下部。FIG. 1 is a partially cutaway perspective view of a drain dryer equipped with an upper lid according to an example of the present invention, and FIG. 2 is a schematic cross-sectional view thereof.
FIG. 3 is a plan view showing the inside of the main body, and FIG. 4 is a partial sectional view showing another embodiment. In the figure, 1... rotor, 2... casing, 10...
・Top i, 11. 12... Filter, 14... Guide, 14'... Guide, lower part of the id.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）水切乾燥すべきシリコンウェハ等を支持するロー
タを内蔵する本体上に置かれ且一つ本体内に送入される
空気が通過する上蓋において、前記′上蓋にはフィルタ
ーが装着されて前記上蓋のほぼ全面を通して空気が送入
され、前記上蓋の下面には本体内に成る程度挿入される
環状のガイドが取付けら１１でいることを特徴とする水
切乾燥装置の上蓋。(1) An upper lid that is placed on a main body that has a built-in rotor that supports silicon wafers, etc. to be drained and dried, and through which air is introduced into the main body. 1. A top lid of a drain dryer, characterized in that air is introduced through almost the entire surface of the top lid, and an annular guide (11) is attached to the bottom surface of the top lid to be inserted into the main body. （２）実用新案登録請求の範囲第１項に記載の上蓋にお
いて、前記ガイドは短い円筒からなる水切乾燥装置の上
蓋。(2) Utility Model Registration Scope of the Claims The upper lid of the drain drying device according to claim 1, wherein the guide is a short cylinder. （３）実用新案登録請求の範囲第１項に記載の上蓋にお
いて、前記ガイドの下部は末広状に拡開されている水切
乾燥装置の上蓋。(3) Utility Model Registration Scope of Claims 1. The upper lid of the drain drying device, wherein the lower part of the guide is expanded into a widening shape.
JP19412482U 1982-12-23 1982-12-23 Top lid of drain dryer Pending JPS59101190U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19412482U JPS59101190U (en) 1982-12-23 1982-12-23 Top lid of drain dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19412482U JPS59101190U (en) 1982-12-23 1982-12-23 Top lid of drain dryer

Publications (1)

Publication Number Publication Date
JPS59101190U true JPS59101190U (en) 1984-07-07

Family

ID=30417351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19412482U Pending JPS59101190U (en) 1982-12-23 1982-12-23 Top lid of drain dryer

Country Status (1)

Country Link
JP (1) JPS59101190U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448622U (en) * 1990-06-26 1992-04-24

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843576A (en) * 1971-10-04 1973-06-23
JPS57183038A (en) * 1981-05-07 1982-11-11 Toshiba Corp Wafer drying machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843576A (en) * 1971-10-04 1973-06-23
JPS57183038A (en) * 1981-05-07 1982-11-11 Toshiba Corp Wafer drying machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448622U (en) * 1990-06-26 1992-04-24

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