JPS608754A - Electrostatic potential measuring device - Google Patents
Electrostatic potential measuring deviceInfo
- Publication number
- JPS608754A JPS608754A JP11874783A JP11874783A JPS608754A JP S608754 A JPS608754 A JP S608754A JP 11874783 A JP11874783 A JP 11874783A JP 11874783 A JP11874783 A JP 11874783A JP S608754 A JPS608754 A JP S608754A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- voltage sensor
- voltage
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、帯電している流体の静電気の発生電圧を測
定するだめの測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measuring device for measuring the voltage generated by static electricity in a charged fluid.
液体、気体、粉体等の静F[電気を帯電し得る流(L例
えば油脂類を例にとると、油脂類をパイプ輸送して貯蔵
タンクに貯蔵する場合、油脂類がパイプ、ポンプ、フィ
ルターを通って流動するとき、これらと接触することに
よって帯電し貯蔵タンク内では高電位帯電物となる。Static flow of liquids, gases, powders, etc. [flow that can be charged with electricity (L) Taking oils and fats as an example, when oils and fats are transported through pipes and stored in storage tanks, the oils and fats are transported through pipes, pumps, filters, etc. As it flows through, it comes into contact with them and becomes electrically charged, becoming a highly charged object in the storage tank.
ところで、貯蔵タンク等ではその貯蔵量を知るために測
定を行なう場合、検尺等金属体を降下浸漬することがあ
る。By the way, when measuring to know the amount stored in a storage tank or the like, a metal object such as a measuring stick may be lowered and immersed.
このとき帯電して込る油脂類と金属体との間で火花放電
が起シ、これが油脂類や気化ガスに法人して爆発する火
災を起すことがある。At this time, a spark discharge occurs between the electrically charged oil and fat and the metal body, and this may combine with the oil and fat and vaporized gas, causing an explosion and fire.
このため、消防、運輸等の関係機関においては尚該静電
気の発生による事故を未然に防止する対策として静電気
の発生電圧を事fifiに測定する手段の検討が進めら
れ、静電気を安全にしかも正確に測定できる装置の出現
が望まれている。For this reason, related organizations such as fire departments and transportation are currently studying ways to accurately measure the voltage generated by static electricity as a measure to prevent accidents caused by the generation of static electricity. It is hoped that a device that can measure this will emerge.
ところで貯蔵された流体の帯電状況を知るために、その
帯電位を測定する従来の方法として、第1図に示すよう
に油槽lの油中に浸漬させるl電極2と静電電圧計3を
金属リード線4で接続した測定装置が用いられていた。By the way, in order to know the charged state of the stored fluid, the conventional method of measuring the charged potential is as shown in FIG. A measuring device connected by line 4 was used.
しかし、上記のような測定装置1tは、測定リード線に
金属を使うため途中放電現象を起し電界じよう乱するた
め、正確な測定ができない。However, since the measuring device 1t as described above uses metal for the measurement lead wire, a discharge phenomenon occurs during the measurement and the electric field is disturbed, so that accurate measurement cannot be performed.
上記のような金属リード線を使用した測定装置の問題を
解消するため、’I(j;気光学効果を利用した電圧セ
ンサーと光フアイバーケーブルを用いたτH1ll定装
置が近年提案されている。In order to solve the above-mentioned problems with measurement devices using metal lead wires, a τH1ll determination device using a voltage sensor using the pneumatic effect and an optical fiber cable has been proposed in recent years.
電気光学効果を利用した電圧センサー(ビスマス、シリ
コンオキサイド、通称BSOセンサーという)の基本的
に構造は第2図に示すように、級数の電気光学結晶11
,12.13.14を並べ、中間′4気結晶13の前後
に電極a、bを設け、−電極aとbをリードか]!a′
、b′で電源15に接続して電圧センサー16を形成す
ると共に、発光ダイオード17の光P′を光フアイバー
ケーブル18で一方端部の電気光学結晶11に導き、他
方端部の電気光学結晶14から出た光Pを光フアイバー
ケーブル19で受光ダイオード20に辱くようにしたも
のである。The basic structure of a voltage sensor (bismuth, silicon oxide, commonly known as BSO sensor) that utilizes the electro-optic effect is as shown in Figure 2, which consists of a series of electro-optic crystals 11
, 12.13.14 are lined up, electrodes a and b are provided before and after the intermediate crystal 13, and - electrodes a and b are leads]! a′
, b' are connected to the power supply 15 to form a voltage sensor 16, and the light P' of the light emitting diode 17 is guided to the electro-optic crystal 11 at one end by an optical fiber cable 18, and the electro-optic crystal 14 at the other end is connected to the power supply 15 at The light P emitted from the optical fiber cable 19 is directed to a light receiving diode 20.
ところで、上Ff1.:のセンサー16を通過する光の
iPは電極aと5間に印加される電圧Vに対して湧3図
に示すような特性を有する。By the way, the upper Ff1. The light iP passing through the sensor 16 has the characteristics shown in Figure 3 with respect to the voltage V applied between the electrodes a and 5.
つまり、被測定電圧Vが零のとき光の強さpに対し、正
極性の電圧を印加すると光の強さpはp。In other words, when the voltage to be measured V is zero, the light intensity p becomes p, but when a positive voltage is applied, the light intensity p becomes p.
よシ強くなり負極性であるとp。より弱く々る。If it becomes stronger and has negative polarity, p. It looks weaker.
上記のようなセンサーを電圧IH11定に使用したti
t来のallll法として11士、探針型と球状電極型
の二捜類がある。ti using the above sensor with voltage IH11 constant
There are 11 types of all methods since then, the probe type and the spherical electrode type.
前者の探針型は第4図に示すように、油槽21内の油入
中に探針電極22を挿入し、センサー16における一方
@極をリードへa′で(望針電極22に、また他方電極
をリードP;+ bで油:’rl 21に接続し、油A
と油lR21即ち大地間の電位差を測定するものである
。The former probe type, as shown in FIG. Connect the other electrode to oil:'rl 21 with lead P;
It measures the potential difference between the oil and the ground.
また、球状電極型は第5図に示すように、絶縁した二つ
の電極23と24で形成した球状電極25内にセンサー
16を密封収納し、画策(j323.24にセンサー1
6の電極をリード線a’、6で接続し、光フアイバーケ
ーブル18.19を接続した球状電極25を油槽26の
油A内に挿入し、球状電極25の表面電界を検出するよ
うにしたものである。In the spherical electrode type, as shown in FIG.
A spherical electrode 25 with electrodes 6 connected by lead wires a' and 6 and optical fiber cables 18 and 19 connected thereto is inserted into oil A in an oil tank 26 to detect the surface electric field of the spherical electrode 25. It is.
ところで上記両測定方法は、光フアイバーケーブル18
.19の伝送撰失が長時間の間に変化したシ、発光ダイ
オード17の出力が変化すると、第3図における光の強
さにおけるpoが変化する。By the way, both of the above measurement methods are based on the optical fiber cable 18.
.. When the transmission loss of the light emitting diode 19 changes over a long period of time and the output of the light emitting diode 17 changes, po in the light intensity in FIG. 3 changes.
このため、あたかも被測定電圧Vが変化したため光の強
さpが変化したかの如く検出測定され、正確な測定結果
が得られないという問題がある。For this reason, there is a problem in that detection and measurement are performed as if the light intensity p had changed due to a change in the voltage to be measured V, and accurate measurement results could not be obtained.
従来、被゛測定電圧Vが交流の場合は第6図に示すよう
に光の強さpを直流成分PDCと交流成分PACに分離
し、変満度mをめることによりp。つまり直流成分PD
Cの変化を無視することができだ。Conventionally, when the measured voltage V is alternating current, p is determined by separating the light intensity p into a direct current component PDC and an alternating current component PAC, as shown in FIG. 6, and calculating the degree of variation m. In other words, the DC component PD
It is possible to ignore changes in C.
しかし、静電気の場合第6図に示したような交流のとき
の上う−に、光の強さpの変化分の直流成分PDCと交
流成分PACを分離することができないので、光の強さ
pの変化はそのまま測定誤差となって表われ、正確な測
定が行なえないという問題がある。However, in the case of static electricity, unlike the case of alternating current as shown in Figure 6, it is not possible to separate the direct current component PDC and the alternating current component PAC corresponding to the change in the light intensity p. There is a problem in that changes in p directly appear as measurement errors, making it impossible to perform accurate measurements.
この発明は、静電気の電圧測定時に生じた上記のような
間尾点を解消するだめになされたものであり、静電気を
安全かつ正確に検出測定できる測定装置を提供すること
を目的とする。This invention was made to eliminate the above-mentioned problems that occur when measuring voltage of static electricity, and an object of the present invention is to provide a measuring device that can safely and accurately detect and measure static electricity.
この発明の構成は、光フアイバーケーブルを介してブC
線をit;Ti続的に照射する光源を設けた電圧センサ
ーを、フロートに取付けだカプセル型の密閉補助電極内
、に収納し、この補助電極の外周全絶縁性の保護ケーセ
で美い、内部空間に電気抵抗物〕dを充填し、静電気の
電圧を高精肚に測定できるようにしたものである。The configuration of this invention is to connect a PC via an optical fiber cable.
A voltage sensor equipped with a light source that continuously irradiates the wire is housed in a capsule-shaped sealed auxiliary electrode that is attached to a float, and the auxiliary electrode's outer periphery is covered with a beautiful, insulating protective casing. The space is filled with an electrical resistor [d] to enable high-precision measurement of static electricity voltage.
以下、この発明を添付図面のMS 7図乃至il1図に
基づいてh発明する。Hereinafter, the present invention will be described based on the accompanying drawings MS7 to IL1.
第7図は、この発明の測定装置1顔に用いる電圧セ・ン
サー16’の44造を示しておシ、2132図で示した
従来の電圧センサーと同一部分は同一符号を付して説明
を省略する。FIG. 7 shows the structure of the voltage sensor 16' used in the face of the measuring device 1 of the present invention, and the same parts as the conventional voltage sensor shown in FIG. Omitted.
電極a、bを設けた中間′[k気光字結晶13を外周の
一辺に所要大きさの突出部13’を111.Iえた太き
さに形成し、別の光源31から光フアイバーケーブル3
2を介して突出部31’に光33を照射するように構成
されている。A protruding portion 13' of a required size is formed on one side of the outer periphery of the intermediate ′ [k crystal 13 with electrodes a and b provided thereon. The optical fiber cable 3 is formed to have a certain thickness, and is connected from another light source 31 to the optical fiber cable 3.
The light 33 is configured to irradiate the protrusion 31' through the light 31'.
上Fit:電気光学結晶11,12.13および14は
例えばBll□S io、 0のような光伝導効果と電
気光学効果をあわせもったものを用いて形成する。Upper Fit: The electro-optic crystals 11, 12, 13, and 14 are formed using a crystal having both a photoconductive effect and an electro-optic effect, such as Bll□Sio, 0.
第7図にボした電圧センサー16′において、いま中間
電気光学結晶13の突出部13’に光33を佃射すると
、光伝導効果にょシ絶縁抵抗が低下する。絶縁抵抗が低
下すると、電気ブ0学結晶13の”rI”i% aと5
間に蓄えられた′14L荷か減少し、r!i :j;l
j aと5間の電用vabが低下する。In the voltage sensor 16' shown in FIG. 7, when light 33 is now directed onto the protrusion 13' of the intermediate electro-optic crystal 13, the insulation resistance is reduced due to the photoconductive effect. When the insulation resistance decreases, the "rI" i% a and 5 of the electrically conductive crystal 13
The '14L load stored in the meantime decreases, r! i:j;l
The power vab between j a and 5 decreases.
また、突出部13’に対する光33の照射を停止すると
、絶縁抵抗が回俵し、電極aと5間の重圧vabが再び
高くなる。Furthermore, when the irradiation of the light 33 to the protrusion 13' is stopped, the insulation resistance is reduced and the heavy pressure vab between the electrodes a and 5 becomes high again.
このように、突出ffl目3′に対する光33の照射と
停止を繰返すことによシ、第8図に示すような交流的に
変化する電圧が表われることになり、第8図のような電
圧が゛電気光学結晶13に印加されると、電圧センサー
16′を透過する光の量Pは第9図に示す通シとなる。In this way, by repeating the irradiation and stopping of the light 33 on the protruding ffl eye 3', a voltage that changes in an alternating current manner as shown in FIG. 8 appears, and the voltage as shown in FIG. When P is applied to the electro-optic crystal 13, the amount P of light transmitted through the voltage sensor 16' becomes as shown in FIG.
第9図のように、光を照射している間の出力光Poと照
射光を停止した場合の変化分PA、Cを比較1m=PA
c/poで変irq liをめることによシ、入力′1
に圧の大きさをめることが可能である。As shown in Figure 9, compare the output light Po while irradiating the light and the changes PA and C when the irradiation light is stopped 1m=PA
By changing irq li in c/po, input '1
It is possible to set the magnitude of pressure to .
従って、第7図に示した電圧センサー16’を第4図ま
たは第5図の従来例と同様に使用することによってp。Therefore, by using the voltage sensor 16' shown in FIG. 7 in the same manner as the conventional example shown in FIG. 4 or 5, p.
の変化分(ドリフト)の影響を受けずに静電気の検出が
可能となる。It becomes possible to detect static electricity without being affected by changes in (drift).
この発明は、上記のよりな゛11圧センサー16’を用
い、さらに高い静′屯圧を検出することによって測定精
度の向上を図るようにしたものであシ、第10図に示す
ように、絶縁体フロー)41を上下に貝辿するように設
けた筒体42の上端にカプセル型の補助電極43と下端
に同じくカプセル型の補助′電極44を螺合による締付
けによって、密閉状態に取付け、両補助電極43.44
内に′電圧センサー16’を収納し、このセンサー16
’の’t4tNaとbをリード線a’、bで補助電極4
3.44に接続している。V゛
前記両補助電極43.44の外周は、筒体42に螺合し
て取付けた絶縁性のよい保護ケース45で覆われ、両補
助電極43.44の内部空間には固有抵抗が10’〜1
0 ” ’−Q cmの電気抵抗をもつ粉体あるいは粘
度質の混和物46が充」イaされている。This invention uses the above-mentioned 11-pressure sensor 16' to detect even higher static pressure to improve measurement accuracy. As shown in FIG. 10, A capsule-shaped auxiliary electrode 43 is attached to the upper end of a cylindrical body 42 provided so as to trace the insulator flow) 41 vertically, and a capsule-shaped auxiliary electrode 44 is attached to the lower end thereof in a sealed state by tightening by screwing. Both auxiliary electrodes 43.44
A 'voltage sensor 16' is housed inside, and this sensor 16
't4tNa and b with lead wires a' and b to auxiliary electrode 4
It is connected to 3.44. V. The outer periphery of both auxiliary electrodes 43, 44 is covered with a protective case 45 with good insulation, which is screwed onto the cylindrical body 42, and the internal space of both auxiliary electrodes 43, 44 has a specific resistance of 10'. ~1
A powder or viscous mixture 46 having an electrical resistance of 0''-Q cm is filled.
なお、筒体42に対する補助電極43.44および保護
ケース45.45の麻合部分は防水接着剤で接着して防
水処理が245こされ、補助電極内への浸水の発生がな
いようになっている。In addition, the mating parts of the auxiliary electrodes 43, 44 and the protective case 45, 45 with respect to the cylindrical body 42 are glued with waterproof adhesive and waterproofed 245 to prevent water from seeping into the auxiliary electrodes. There is.
上記補助電極43の上部に絶縁継手47を介lて柔軟性
のある防水ホース48が接続され、電圧センサー16”
に接続された光フアイバーケーブル18.19および3
2がこの防水ホース48内を通って外部に引出されてい
る。A flexible waterproof hose 48 is connected to the upper part of the auxiliary electrode 43 via an insulating joint 47, and the voltage sensor 16''
Fiber optic cables 18, 19 and 3 connected to
2 passes through this waterproof hose 48 and is drawn out to the outside.
前記補助電極43.44内に充」ム(シた電気抵抗物質
46は一種の導電路を形成し、内部雰囲気の抵抗を下げ
ることによって、補助電極44の外部に生じた電圧を電
圧センサー16’で検出し、光ファイバーケルプル19
を介して光/電圧計の茨示値を読みとシ、静電気の検出
測定を行なうものである。The electrically resistive material 46 filled in the auxiliary electrodes 43 and 44 forms a kind of conductive path, and by lowering the resistance of the internal atmosphere, the voltage generated outside the auxiliary electrode 44 is transferred to the voltage sensor 16'. Detected by optical fiber Kelp19
It is used to detect and measure static electricity by reading the light reading of the optical/voltmeter via the voltmeter.
第1I図は測定精度を向上させる具体的な構造を示して
おり、フロー)41に三個の測定装[j 50を各4間
に距離を保って取付け、位置l□、12.18のf、f
、2界強度分布を測定するようにしたものであり、油ぺ
a内にフロート50を浮上させて移動させることによシ
、油槽51内全体にわたって1η、界強度分布測定がで
き、静電気の発生状況が41度よ<、?!f位分布をイ
准実に摘於ことかできる。Figure 1I shows a specific structure for improving measurement accuracy, in which three measuring devices [j 50 are installed in the flow) 41 with a distance maintained between each 4, positions l □, and f at 12.18. , f
By floating and moving the float 50 in the oil tank 51, it is possible to measure the field strength distribution at 1η over the entire interior of the oil tank 51, thereby reducing the generation of static electricity. The situation is 41 degrees <,? ! The f-rank distribution can be effectively reduced.
この発明の測定装置は上記のような構成であり、例えば
第11図に示すように、測定装9’t−50をフロート
41でタンカーの油1m 51内の油面に浮上させ、送
油g52による注油時に際して発生する静電気を検出測
定するものであシ、光源31がら電圧センサー16’の
電気光学結晶13における突出部13’に光の照射と停
止を縁返し、poの変化分の影響を受けずに油面に生じ
た1p′7i’i;気の検出を行なうものである。The measuring device of the present invention has the above-mentioned configuration. For example, as shown in FIG. In order to detect and measure the static electricity generated during oil lubrication by This is to detect the 1p'7i'i; air that is generated on the oil surface without receiving it.
なお、金属製補助電極43.44の外周を絶縁性の保護
ケース45.45で後って油面と隔離すると共に、測定
装置をフロートに取付けたので、注油、送油等で油面が
変動しても油面に追従し、υIII ’i装置と油面の
間において火花放電を起すことがなく、安全かつ精舵よ
く測定することができる。In addition, the outer periphery of the metal auxiliary electrodes 43, 44 is isolated from the oil level with an insulating protective case 45, 45, and the measuring device is attached to a float, so the oil level does not fluctuate due to lubrication, oil feeding, etc. It follows the oil level even when the υIII 'i device is moving, and there is no spark discharge between the υIII 'i device and the oil surface, making it possible to perform measurements safely and efficiently.
るいは流動する粉体中の帯電状態を測定する等にも使用
できる。It can also be used to measure the electrical charge state in flowing powder.
以上のように、この発明によると光電導効果を持つ電気
光学結晶に光を照射して抵抗を下げ、検出電位を上げる
電圧センサーを、フロートに取付けたカプセル型の補助
′r:’J、 4.Q内に収納し、補助?F1極の外周
を絶縁性の保護ケースで49い、内部空間を電気抵抗物
質で埋め、補助電極内の抵抗を下げるようにしたので、
静電気の検出ilZ位が大幅に上昇し、正確に安全に静
電気の電圧を検出測定が可能になる。As described above, according to the present invention, a capsule-shaped auxiliary device is equipped with a voltage sensor attached to a float by irradiating an electro-optic crystal with a photoconductive effect with light to lower its resistance and increase its detection potential. .. Is it stored in Q and auxiliary? The outer periphery of the F1 pole is covered with an insulating protective case, and the internal space is filled with electrically resistive material to lower the resistance inside the auxiliary electrode.
The static electricity detection level increases significantly, making it possible to accurately and safely detect and measure static electricity voltage.
また、補助電極の外周を絶縁性保護ケースで緩い、しか
も測定電圧の取出しおよび光の照射に光フアイバーケー
ブルを使用し、補助電極をフロートに取付けだので、被
測定流体との間での放電現象がなくなり、放電が原因で
爆発や火災が生じる流体に対しても安全に静電気を1i
lll定することができる0In addition, since the outer circumference of the auxiliary electrode is loosely covered with an insulating protective case, and an optical fiber cable is used to take out the measurement voltage and irradiate the light, and the auxiliary electrode is attached to a float, there is no possibility of electrical discharge occurring between the auxiliary electrode and the fluid being measured. Safely removes static electricity from fluids that can cause explosions or fires due to discharge.
lll can be determined 0
イーJ’; 1図は従来の靜■7気測定装:4を示す説
明図、第2図は電圧センサーの基本)114造を示す系
統1ス、第3図は′電圧センサーを7カ過する元C片の
特性図、第4図は電圧センサーを使用したイlL米の第
1のし1]を示す御j定系統図、第5図は同第2のり′
uを示す1HIj定系統同系統6図は光の照射と1゛j
〜止による入力4圧と変調度を示す関係図、第7図はこ
の発明に使用する′電圧センサーの接続系統図、第8図
は′「よ圧センサーにかかる印加電圧と1I−J:に1
]の1月係ケ示す説明図、第9図は同上における元の1
1(1射と停止の入力端子と変調層の関係を示す説明図
、第10図はこの発明に係る6111足装置の縦uf面
図、第11図は同上の使用状態を示す縦断1目110図
である。
11.12.13.14・・・電気光学結晶、13’・
・・突出部、16・・・′、a圧センサー18.19.
32・・光フアイバーケーブル、31・・・光源、41
・・・フロート、43.44・・・・i+ii助電愼、
45・・・’l’l′::r:ぐiケース、46・・・
I!lL気抵抗吻う・h
特許出)山大 住友市気工業株式会社Figure 1 is an explanatory diagram showing the conventional 7-meter voltage sensor; Figure 2 is an explanatory diagram showing the basic voltage sensor) 114 structure; Figure 3 is an explanatory diagram showing the voltage sensor Figure 4 is a control system diagram showing the first process using a voltage sensor, and Figure 5 is a diagram showing the second process using a voltage sensor.
1HIj fixed system same system 6 diagram showing u is light irradiation and 1゛j
Figure 7 is a connection system diagram of the voltage sensor used in this invention, and Figure 8 is a diagram showing the relationship between the four input voltages and the degree of modulation due to the stop. 1
] Figure 9 is the original 1 in the same page.
1 (an explanatory diagram showing the relationship between the input terminals for one shot and stop and the modulation layer, FIG. 10 is a vertical UF view of the 6111 foot device according to the present invention, and FIG. 11 is a vertical cross-section 110 showing the usage state of the same as above) Figure 11.12.13.14... Electro-optic crystal, 13'.
...Protrusion, 16...', a pressure sensor 18.19.
32...Optical fiber cable, 31...Light source, 41
...Float, 43.44...i+ii help electrician,
45...'l'l'::r:gui case, 46...
I! LL Qi resistance snout/h Patent issued) Yamadai Sumitomo City Qi Kogyo Co., Ltd.
Claims (2)
ンサーに光フアイバーケーブルを介して光/電気変換電
圧計を接続し、この電圧センサーの電気光学結晶に光フ
アイバーケーブルを介して光線を断続的に照射する光源
を設け、絶縁状態でフロートに取付けてカプセル型に形
成した一対の補助電極内に前記電圧センサーを内蔵し、
このカプセル補助電極の外周を絶縁性の保該ケースで覆
い、内部空間内に電気抵抗物質を充填したことを特徴と
する静電気電位測定装置。(1) An optical/electric conversion voltmeter is connected to a voltage sensor using an electro-optic crystal with a photoconductive effect via an optical fiber cable, and a light beam is intermittent to the electro-optic crystal of the voltage sensor via an optical fiber cable. A light source that irradiates the target is provided, and the voltage sensor is built in a pair of auxiliary electrodes that are attached to the float in an insulated state and formed into a capsule shape,
An electrostatic potential measuring device characterized in that the outer periphery of the capsule auxiliary electrode is covered with an insulating preservation case, and the internal space is filled with an electrically resistive material.
助電極をフロートに取付けた特許請求の範囲第1項記載
の静電気電位測定装置。(2) Does it have a built-in voltage sensor? The electrostatic potential measuring device according to claim 1, wherein seven or more capsule-type auxiliary electrodes are attached to a float.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11874783A JPS608754A (en) | 1983-06-28 | 1983-06-28 | Electrostatic potential measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11874783A JPS608754A (en) | 1983-06-28 | 1983-06-28 | Electrostatic potential measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS608754A true JPS608754A (en) | 1985-01-17 |
Family
ID=14744050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11874783A Pending JPS608754A (en) | 1983-06-28 | 1983-06-28 | Electrostatic potential measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS608754A (en) |
-
1983
- 1983-06-28 JP JP11874783A patent/JPS608754A/en active Pending
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