JPS6085837U - Heat insulation cap for furnace core tube - Google Patents

Heat insulation cap for furnace core tube

Info

Publication number
JPS6085837U
JPS6085837U JP17857983U JP17857983U JPS6085837U JP S6085837 U JPS6085837 U JP S6085837U JP 17857983 U JP17857983 U JP 17857983U JP 17857983 U JP17857983 U JP 17857983U JP S6085837 U JPS6085837 U JP S6085837U
Authority
JP
Japan
Prior art keywords
heat insulating
core tube
furnace core
insulating cap
heat insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17857983U
Other languages
Japanese (ja)
Other versions
JPS6342524Y2 (en
Inventor
純一 高原
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP17857983U priority Critical patent/JPS6085837U/en
Publication of JPS6085837U publication Critical patent/JPS6085837U/en
Application granted granted Critical
Publication of JPS6342524Y2 publication Critical patent/JPS6342524Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来一般の半導体熱処理装置の断面図である。 第２図はこの考案の背景となる断熱キャップを取り付け
た熱処理装置の要部断面図である。第３図はこの考案の
背景となる複数本のガス導入管を有する炉芯管の要部断
面図である。第４図はこの考案の一実施例の断熱キャッ
プの構成部品である断熱キャップ本体の正面図である。 第５図は第４図の■−■線に沿う断面図である。第６図
は断熱材の断面図である。第７図は断熱キャップを取り
付けた熱処理装置の要部断面図である。 ２０・・・・・・断熱キャップ本体、２１・・・・・・
主部材、２２・・・・・・前面部材、２９・・・・・・
開口、３１・・・・・・断熱材、３４・・・・・・断熱
キャップ。 第２図 第４図FIG. 1 is a sectional view of a conventional general semiconductor heat treatment apparatus. FIG. 2 is a sectional view of a main part of a heat treatment apparatus equipped with a heat insulating cap, which is the background of this invention. FIG. 3 is a sectional view of a main part of a furnace core tube having a plurality of gas introduction tubes, which is the background of this invention. FIG. 4 is a front view of a heat insulating cap main body which is a component of a heat insulating cap according to an embodiment of this invention. FIG. 5 is a sectional view taken along the line ■-■ in FIG. 4. FIG. 6 is a cross-sectional view of the heat insulating material. FIG. 7 is a sectional view of a main part of the heat treatment apparatus with a heat insulating cap attached. 20... Insulation cap body, 21...
Main member, 22...Front member, 29...
Opening, 31...Insulating material, 34...Insulating cap. Figure 2 Figure 4

Claims (1)

【実用新案登録請求の範囲】 炉芯管のガス入口側に装着される断熱キャップであって
、 炉体に固定される主部材および前記主部材に対して回動
可能に取り付けられ、炉芯管のガス導入管を挿通する開
口を有する前面部材とよりなる断熱キャップ本体と、 前記断熱キャップ本体内の空間部に保持された断熱材と
を備えることを特徴とする炉芯管用断熱キャップ。[Scope of Claim for Utility Model Registration] A heat insulating cap attached to the gas inlet side of a furnace core tube, comprising a main member fixed to a furnace body and a heat insulating cap rotatably attached to the main member, A heat insulating cap for a furnace core tube, comprising: a heat insulating cap body comprising a front member having an opening through which a gas introduction pipe is inserted; and a heat insulating material held in a space within the heat insulating cap body.
JP17857983U 1983-11-17 1983-11-17 Heat insulation cap for furnace core tube Granted JPS6085837U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17857983U JPS6085837U (en) 1983-11-17 1983-11-17 Heat insulation cap for furnace core tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17857983U JPS6085837U (en) 1983-11-17 1983-11-17 Heat insulation cap for furnace core tube

Publications (2)

Publication Number Publication Date
JPS6085837U true JPS6085837U (en) 1985-06-13
JPS6342524Y2 JPS6342524Y2 (en) 1988-11-08

Family

ID=30387677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17857983U Granted JPS6085837U (en) 1983-11-17 1983-11-17 Heat insulation cap for furnace core tube

Country Status (1)

Country Link
JP (1) JPS6085837U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221731U (en) * 1988-07-29 1990-02-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221731U (en) * 1988-07-29 1990-02-14

Also Published As

Publication number Publication date
JPS6342524Y2 (en) 1988-11-08

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