JPS608490U - 防振装置を備えたクライオポンプの固定装置 - Google Patents

防振装置を備えたクライオポンプの固定装置

Info

Publication number
JPS608490U
JPS608490U JP10028683U JP10028683U JPS608490U JP S608490 U JPS608490 U JP S608490U JP 10028683 U JP10028683 U JP 10028683U JP 10028683 U JP10028683 U JP 10028683U JP S608490 U JPS608490 U JP S608490U
Authority
JP
Japan
Prior art keywords
cryopump
fixing device
vibration isolator
bellows
pump case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10028683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346234Y2 (enrdf_load_stackoverflow
Inventor
秀敏 森本
守住　克己
Original Assignee
アルバツク・クライオ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルバツク・クライオ株式会社 filed Critical アルバツク・クライオ株式会社
Priority to JP10028683U priority Critical patent/JPS608490U/ja
Publication of JPS608490U publication Critical patent/JPS608490U/ja
Application granted granted Critical
Publication of JPH0346234Y2 publication Critical patent/JPH0346234Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP10028683U 1983-06-30 1983-06-30 防振装置を備えたクライオポンプの固定装置 Granted JPS608490U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10028683U JPS608490U (ja) 1983-06-30 1983-06-30 防振装置を備えたクライオポンプの固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10028683U JPS608490U (ja) 1983-06-30 1983-06-30 防振装置を備えたクライオポンプの固定装置

Publications (2)

Publication Number Publication Date
JPS608490U true JPS608490U (ja) 1985-01-21
JPH0346234Y2 JPH0346234Y2 (enrdf_load_stackoverflow) 1991-09-30

Family

ID=30237305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10028683U Granted JPS608490U (ja) 1983-06-30 1983-06-30 防振装置を備えたクライオポンプの固定装置

Country Status (1)

Country Link
JP (1) JPS608490U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664195A (en) * 1979-10-25 1981-06-01 Jeol Ltd Exhaust system in electron microscope or the like
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664195A (en) * 1979-10-25 1981-06-01 Jeol Ltd Exhaust system in electron microscope or the like
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus

Also Published As

Publication number Publication date
JPH0346234Y2 (enrdf_load_stackoverflow) 1991-09-30

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