JPS6082506A - Article conveying device - Google Patents

Abstract

PURPOSE:To eliminate the needs of piping and wirings, etc., and thereby simplify a mechanism and operation of the captioned device by directly supplying a fluid or electric power conveyed in/out from each moving table for conveying in/out any article to a housing table upon conveying in/out an article by making use of said moving table between the housing table having plural stages stacked and said each moving table. CONSTITUTION:In an article conveying device comprising a conveying-in moving table 1 vertically movable including a U character-shaped fluid passage 2 having plural nozzles 3 provided on said table, a plural-stage housing table 5 including U character-shaped fluid passages 61, 71 having likewise plural nozzles 81, 91 perpendicularly to each other on the upper and lower parts of said housing table, and a conveying-out moving table 12 having substantially the same structure as said moving table 1, cylinders 28, 34 going forward/backward in the direction of the housing table 5 are provided on the respective moving tables 1, 12. Joints 29, 35 each having fluid supply holes are provided on the tips of piston rods of the respective cylinders 28, 34, and thereby said fluid supply holes can be adapted to be connected with said conveying-in/out fluid passages 61, 71 of the housing table 5 at elongation of the cylinders 28, 34.

Description

Detailed Description of the Invention (a) Technical Field of the Invention The present invention provides a method for temporarily storing semiconductor wafers, etc., which require curing after being exposed to an electron beam, by placing them in IIQ storage tables stacked in multiple stages. The present invention relates to an object transporting device for transporting an object from the storage table after the storage is carried out.

fbl PRIOR ART AND PROBLEMS Conventional object conveying devices include a multi-stage stacked storage stand equipped with a fluid nozzle structure or a belt mechanism, and a structure that is movable up and down so as to face each storage stand. Some systems include a fluid nozzle configuration or one moving platform for loading and one for loading, each equipped with a belt mechanism.

As an example, an outline of an object conveying device equipped with a fluid nozzle mechanism will now be described.

In the plan view of FIG. 1, reference numeral 1 denotes a moving table for carrying in that is movable up and down, and a U-shaped fluid passage 2 is provided in the moving table 1 and is inclined from the passage 2 in the carrying direction. A plurality of nozzles 3 are provided that open on the upper surface of the moving table 1, and a flexible fluid supply conduit 4 is connected to the end of the passage 2.

5 is a multi-layered storage stand, and the uppermost storage stand 51
U-shaped fluid passages 61.7I are provided vertically and perpendicularly therein, and nozzles 8+ are opened on the upper surface of the storage table 51 at inclines from the passages 61.71 in the loading and unloading directions, respectively.
A plurality of '9+' are provided, and fluid supply conduits 10+, 11+ are connected to the ends of each passage Ez, 7+.

In addition, each stage storage stand 52 located below the storage stand 51...
...5n is similarly configured.

Reference numeral 12 denotes a moving table for carrying out that can move up and down, and the moving table 12
A U-shaped fluid passage 13 is provided therein, and a plurality of nozzles 14 are provided that are inclined from the passage 13 in the unloading direction and open on the upper surface of the moving table 12. A flexible fluid supply line 15 is connected.

16.17 is a fluid storage tank, and the tank 16.1
7 through the solenoid valves 18 and 19 to the above 11! ! The fluid supply pipes 4.15 of the transfer table 1 and the transfer table 12 are connected, and the fluid passages 61...6n of the storage tables 51...5n are connected to each other. 7+...7n
Fluid supply pipe line 101...10n connected to.

111...Iln are respective solenoid valves 201...
...2On, 211...21n are connected to each of the above tanks 16 and 17.

22+, 23 are holes for vacuum chucks provided in each stage storage table 51...5n and the transporting table 12, and conduits 24□, 2 are connected to the holes 22+, 23.
5, the object A such as a wafer is drawn into the hole 221.2.
3, it is detected by the vacuum switch 26++27 interposed between the pipes 24+ and 25, and the electromagnetic valve 18.1 is
9 to stop the fluid supply.

Therefore, in order to carry the object A on the carrying-in moving table 1 to the storage table of a desired stage (for example, 52), the moving table 1 is moved up and down to face the storage table 52, and the solenoid valves 18 and 202 are opened. . The compressed fluid is transferred from the fluid storage tank 16 to the fluid supply pipe 4
, 102, enters each fluid passage 2, 62 of the moving table 1 and storage table 5□, and is ejected from each nozzle 3, 8□, and the object A
is transported from the moving table 1 to the storage table 52. When the vacuum chuck hole 222 is blocked by the object A, the solenoid valve 18.20
2 is closed, the supply of fluid is cut off, and the object A is left on the storage table 52.

Then, in order to take out the object A held in the storage table, the IM output moving table 12 is moved up and down to face the storage table (for example, 53) of the desired stage, and the solenoid valves 19 and 213 are opened. The compressed fluid from the fluid storage tank 17 passes through the fluid supply pipes 113 and 15 and enters the fluid passages 73 and 13 of the storage table 53 and the moving table 12, and is ejected from each nozzle 93 and 14 to move the object A from the storage table 53. It is transported to the stand 12. When the vacuum hole 23 is blocked by the object A, the electromagnetic valve 19.213 is closed and the supply of fluid is cut off, and the object A is taken out from the moving table 12.

As described above, in the conventional object conveyance device, fluid supply pipes for loading and unloading are connected to the storage tables at each stage.
In addition, since a solenoid valve is interposed in each pipeline, the structure is complicated and the number of parts is large (and it is necessary to select and operate the numerous solenoid valves each time you carry in or out, resulting in poor work efficiency, etc.) was there.

The above is an object conveyance device equipped with a fluid nozzle mechanism.
Even those with a belt mechanism have the same drawbacks as above because each stage storage table is provided with a heald driving morph and a switching mechanism such as a low-return switch for supplying power to each morph.

(C1 Purpose of the Invention The present invention provides for the purpose of directly supplying fluid or electric power for transporting people from each moving platform when carrying objects into or removing objects from a multi-tier stacked storage platform using each moving platform for loading and unloading. By supplying the fluid to the storage stand, it eliminates the need for fluid supply lines, low-flow switches, solenoid valves, and wiring to the storage stand, and the mechanism,
An object of the present invention is to provide an object conveying device that is easy to operate.

(d) Constituent of the Invention A multi-stage stacked storage stand equipped with a first conveyance mechanism for carrying in and out of objects, and for carrying objects into or taking out objects from each storage stand. The present invention is characterized by having a vertically movable moving table for loading and unloading objects, which has a second conveying mechanism, and has a joint that supplies power to operate the first conveying mechanism of each stage storage table. do.

(C1 Embodiment of the Invention FIG. 2 is a plan view of an embodiment of the present invention equipped with a fluid nozzle mechanism similar to the conventional example described above, and FIG. 3 is a side sectional view thereof.

Note that parts that are the same as those in the conventional example are given the same reference numerals, and their explanations will be omitted.

A cylinder 28 is installed inside the carry-in moving table 1, and a joint 29 is connected to a piston rod of the cylinder 28.

A fluid supply hole 30 with one end open is formed in the joint 29, and a flexible fluid supply conduit 31 is connected from the fluid storage tank 16 with a solenoid valve 18 interposed therebetween. There is. Further, a flexible fluid supply conduit 33 is connected to the cylinder 28 from the tank 16 with a solenoid valve 32 interposed therebetween.

Similarly to the carrying-in moving table 1, the IM output moving table 12 also has a cylinder 34, a joint 35, a fluid supply hole 36 with one end open formed in the joint 35, and a solenoid valve 19 interposed from the fluid storage tank 17. A flexible fluid supply conduit 37 is connected;
A flexible fluid supply conduit 39 is connected to the cylinder 34 from the tank 17 with a solenoid valve 38 interposed therebetween.

The end of each fluid passage 6□...6n, 7+...7n for the loading and unloading of each storage table 51...5n is at one end of each storage table. Each is open.

Therefore, in order to place 111 objects A such as wafers on the transfer stage 1 to a desired stage storage stage (for example, 52), the mobile stage 1 is moved up and down to face the storage stage 52, and the solenoid valve 3 is moved up and down to face the storage stage 52.
2 is opened to supply fluid to the cylinder 28. The joint 29 moves forward and comes into contact with the storage table 52, and its fluid supply hole 30 matches the loading fluid passage 62 of the storage table 52.

Next, the solenoid valve 18 is opened to supply fluid to the fluid passage 2 of the moving table 1 and ejected from the nozzle 3, and at the same time, fluid is supplied from the fluid supply hole 30 of the joint 29 to the fluid passage 62 of the storage table 52 and from the nozzle 82. It ejects and transports the object A from the moving table 1 to the storage table 52.

Then, the conveyance is stopped by the vacuum chuck mechanism, the joint 29 is retracted, and the object A is left on the storage table 52.

To take out the object A kept in the storage table, move the public transport table 12 up and down to move it to the desired storage table (for example, 5
3), open the solenoid valve 3 and supply fluid to the cylinder 34.

The joint 35 moves forward and comes into contact with the storage table 53, and its fluid supply hole 36 matches the fluid passage 73 for delivery of the storage table 53.

Next, the electromagnetic valve 19 is opened to supply fluid to the fluid passage 13 of the moving table 12 and ejected from the nozzle 14, and at the same time, the fluid is supplied from the fluid supply hole 36 of the joint 35 to the fluid passage 7 of the storage table 5.
Fluid is supplied to and ejected from the nozzle 9, and the object A is conveyed from the storage table 53 to the moving table 12.

Then, the conveyance is stopped by the vacuum chuck mechanism, the joint 35 is moved back, and the object A is taken out from the moving table 12.

Although the above is an embodiment equipped with a fluid nozzle mechanism, the above-mentioned joint can easily be implemented as an electric plug or outlet type even in a conveying device having a belt mechanism, and each of the first and second conveying mechanisms is not limited to only nozzles and belts, and other 111 feeding mechanisms can be implemented as appropriate; in short, it is one that is equipped with a means for supplying power for operating the first conveying mechanism of the storage table to the loading/unloading moving table. That's fine.

Further, the fluid may be air or hydrogen gas, for example.

(f) Effects of the Invention The present invention eliminates the need for installing fluid supply pipes for loading and unloading in each stage storage table or wiring to the motor. The more the switch operation can be eliminated and the number of stacked storage tables is greater, the greater the effect on the simplification of the mechanism and operation.

[Brief explanation of drawings]

FIG. 1 is a plan view of an object conveyance device equipped with a conventional nozzle mechanism, FIG. 2 is a plan view of an embodiment of the present invention, and FIG. 3 is a side sectional view. 1...Transportation platform, 5...Storage platform,
12...Moving table for carrying out, 29, j5...
...Joint. Patent applicant Fujitsu Ltd.

Claims (1)

[Claims] A multi-stage stacked storage platform equipped with a first transport mechanism for generally loading and unloading objects, and a second transport system for transporting objects into and out of each storage stage. an object conveyance device, comprising: a vertically movable moving table for carrying in and carrying out objects, which has a mechanism and a joint that supplies power to operate the first conveyance mechanism of each stage storage table; .