JPS6080293A - Carbonic acid gas laser device - Google Patents

Carbonic acid gas laser device

Info

Publication number
JPS6080293A
JPS6080293A JP18700883A JP18700883A JPS6080293A JP S6080293 A JPS6080293 A JP S6080293A JP 18700883 A JP18700883 A JP 18700883A JP 18700883 A JP18700883 A JP 18700883A JP S6080293 A JPS6080293 A JP S6080293A
Authority
JP
Japan
Prior art keywords
discharge
electrodes
electrode
laser device
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18700883A
Other languages
Japanese (ja)
Inventor
Masahiro Goto
後藤　正博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18700883A priority Critical patent/JPS6080293A/en
Publication of JPS6080293A publication Critical patent/JPS6080293A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To contrive the generation of stable glow discharge and the improvement of the working efficiency of the titled device by preventing electrode oxidation by the use of Au for a discharge electrode. CONSTITUTION:CO2 gas A sealed under less than the atmospheric pressure is circulated by a blower 2 along guide blades 3 from a wind tunnel 4 to a discharge section 5. Many split pin electrodes 6a and one to plurality of piceses bar electrodes 6b are provided in the section 5, and discharge parts are Au- plated. A glow discharge G is generated by application of a high voltage between the electrodes 6a and 6b. The discharge energy is converted into a laser beam B by a resonator 8, and the remnant decreases the oscillation efficiency by heating the CO2; therefore the temperature increase of the CO2 is prevented by a heat exchanger 9. The stable laser processing can be performed by this construction.

Description

【発明の詳細な説明】 ［発明の技術分野］ 本発明は炭酸ガスレーザ装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a carbon dioxide laser device.

［発明の技術的背景とその問題点］ 一般に炭酸ガスレーザ装置は、容器内に低圧のＣＯ２、
ｌｌｅガス等のレーザガスを封入し、放電部に循環供給
すると共に、その放電部でグロー放電を発生させ、この
エネルギーを共振器を用いてレーザ光に変換し、外部に
発射するように措成させている。[Technical background of the invention and its problems] In general, a carbon dioxide laser device uses low-pressure CO2 in a container,
A laser gas such as lle gas is sealed and circulated to the discharge part, and a glow discharge is generated in the discharge part, and this energy is converted into laser light using a resonator and emitted to the outside. ing.

このような炭酸ガスレーザ装置において、従来は、その
放電部の電極材料にモリブデン（ＭＯ）を用いていたた
め、運転中に放電電極の酸化が促進され、不導電性のモ
リブデン酸化物（Ｍ　ｏ　Ｏｓ等）が放電電極に形成４
１着する。この結果、放電電極の放電面積が減少し、減
少した部分に電流が集中し、温度の上がった電子の集中
的放電がアーク放電へと移行する。グロー放電からこの
雪状のアーク放電に移行すると、エネルギーが均一にガ
ス中に注入されず、有効なレーザ発振が生じない。また
、電極には大きな電流が集中し、損傷を受けることにな
る。Conventionally, in such carbon dioxide laser devices, molybdenum (MO) has been used as the electrode material of the discharge part, so oxidation of the discharge electrode is promoted during operation, and non-conductive molybdenum oxides (MoOs etc.) ) is formed on the discharge electrode 4
1st place. As a result, the discharge area of the discharge electrode is reduced, current is concentrated in the reduced area, and the concentrated discharge of heated electrons shifts to arc discharge. When transitioning from a glow discharge to this snow-like arc discharge, energy is not uniformly injected into the gas and no effective laser oscillation occurs. Also, a large current will concentrate on the electrodes, resulting in damage.

このように、モリブデン電極を放電部に有する従来の炭
酸ガスレーザ装置においては、保守点検を頻繋に実施し
て、放電電極に形成付着した酸化物を取り除く作業が必
要となり、メインテナンスが煩雑になる上、装置稼動率
が低下する問題点があった。In this way, conventional carbon dioxide laser devices that have a molybdenum electrode in the discharge section require frequent maintenance and inspections to remove oxides that have formed and adhered to the discharge electrode, which makes maintenance complicated and However, there was a problem in that the device operating rate decreased.

［発明の目的］ 本発明はメインテナンスフリーにして常に良好なレーザ
光線の得られる極めて稼動率の高い炭酸ガスレーザ装置
を提供することを目的とする。[Object of the Invention] An object of the present invention is to provide a carbon dioxide laser device that is maintenance-free and has an extremely high operating rate, which can always provide a good laser beam.

［発明の概要］ このため、本発明は放電部の電極材料に金（Ａｕ）を用
いるようにしたことを特徴としている。[Summary of the Invention] Therefore, the present invention is characterized in that gold (Au) is used as the electrode material of the discharge section.

［発明の実施例］ 以下、本発明の実施例を図面を参照して説明する。[Embodiments of the invention] Embodiments of the present invention will be described below with reference to the drawings.

第１図（ａ）および（ｂ）は本発明の一実施例に係る炭
酸ガスレーザ装置の概略正面図およびα矢視平面図を示
したもので、発振容器ｌ内にはレーザ媒体としてＣＯ２
、Ｈｅ等のレーザガスが大気圧以下の圧力で封入されて
いる。このレーザガスＡは送風機２によりガイドベーン
３に沿って風洞４から放電部５へと循環供給される。放
電部５には多数の分割されたピン電極６ａと、１乃至複
数本の棒電極６ｂが設けられるが、これらの電極を金（
Ａｕ）を用いて構成する。勿論、金は高価なものである
ため、放電に関与する部分だけで良く、メッキでも良い
。そのピン電極６ａと棒電極６ｂ間に高電圧を加えるこ
とにより、放電部５には、安定したクロー放電Ｇが発生
さ九る。その放電エネルギーが共振部７に設けられる共
振器８により、レーザ光Ｂに変換され、外部に発射され
る。このとき、放電部５で発生した放電エネルギーのう
ち、レーザ光に変換されなかった部分は、熱エネルギー
となってレーザガスを高温にし、レーザガスを高温にレ
ーザ発振効率を低下させる。これを防止するため、循環
通風路には熱変換器９が設けられる。FIGS. 1(a) and 1(b) show a schematic front view and a plan view along arrow α of a carbon dioxide laser device according to an embodiment of the present invention.
, He, or other laser gases are sealed at a pressure below atmospheric pressure. This laser gas A is circulated and supplied from the wind tunnel 4 to the discharge section 5 along the guide vanes 3 by the blower 2 . The discharge part 5 is provided with a large number of divided pin electrodes 6a and one or more rod electrodes 6b, and these electrodes are made of gold (
Au). Of course, since gold is expensive, only the parts involved in electric discharge may be plated. By applying a high voltage between the pin electrode 6a and the rod electrode 6b, a stable claw discharge G is generated in the discharge section 5. The discharge energy is converted into laser light B by a resonator 8 provided in the resonator 7, and is emitted to the outside. At this time, the portion of the discharge energy generated in the discharge section 5 that is not converted into laser light becomes thermal energy and makes the laser gas high temperature, which lowers the laser oscillation efficiency. To prevent this, a heat converter 9 is provided in the circulation ventilation path.

このように、放電電極にモリブデンより単極電位の高い
金を使用することにより、放電電極の酸化を防止するこ
とができる。この結果、常に安定したグロー放電を発生
させることができるようになる。また、放電電極への酸
化物の形成付着が無くなることにより、メインテナンス
フリーにして放電電極の消耗、損傷が減少し、装置稼動
率が飛跡的に向上して、安定したレーザ加工作業を行な
うことができるようになる。In this way, by using gold, which has a higher unipolar potential than molybdenum, for the discharge electrode, oxidation of the discharge electrode can be prevented. As a result, stable glow discharge can always be generated. In addition, by eliminating the formation and adhesion of oxides to the discharge electrode, maintenance is free, wear and damage to the discharge electrode is reduced, equipment operation rate is dramatically improved, and stable laser processing work can be performed. become able to.

［発明の効果］ 以上のように本発明によれば、放電電極に金を使用する
ようにしたので、電極への酸化物の形成付着が無くなり
、従来化じていたアーク放電への移行による電極の消耗
、損傷が無くなる。この結果、メインテナンスフリーに
して稼動率の高０炭酸ガスレーザ装置が得られる。[Effects of the Invention] As described above, according to the present invention, since gold is used for the discharge electrode, oxide formation and adhesion to the electrode is eliminated, and the electrode is prevented from forming and adhering to the electrode due to the transition to arc discharge, which has been the case in the past. No more wear and tear. As a result, a maintenance-free carbon dioxide laser device with a high operating rate can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例に係る炭酸ガスレーザ装置の
構成図で、（ａ）はその正面図、（ｂ）はその平面図で
ある。 ■・・・発振容器、２・・・送風機、３・・・ガイドベ
ーン、４・・・風洞、５・・・放電部、６ａ・・・ピン
電極、６ｂ・・・棒電極、７，８・・・共振部、９・・
・熱交換器。FIG. 1 is a configuration diagram of a carbon dioxide laser device according to an embodiment of the present invention, in which (a) is a front view thereof, and (b) is a plan view thereof. ■... Oscillation container, 2... Blower, 3... Guide vane, 4... Wind tunnel, 5... Discharge part, 6a... Pin electrode, 6b... Rod electrode, 7, 8 ...Resonance part, 9...
·Heat exchanger.

Claims (1)

【特許請求の範囲】[Claims] （１）密封された容器内に高速にてレーザガスを循環さ
せ、そのガス中に金を用いて溝底される多数の分割され
たピン電極と、対向する棒電極とを配置し、それら電極
間に高電圧を加えてグロー放電を生じさせる一方、それ
ら両電極群を挟んで両側に共振器を設け、放電エネルギ
ーをレーザ光として取り出すことを特徴とする炭酸ガス
レーザ装置。 （２、特許請求の範０第１項記載において、前記レーザ
ガス循環路に熱交換器を設けたことを特徴とする炭酸ガ
スレーザ装置。(1) Laser gas is circulated at high speed in a sealed container, and a number of divided pin electrodes with groove bottoms made of gold and opposing rod electrodes are arranged in the gas, and between these electrodes A carbon dioxide laser device is characterized in that a high voltage is applied to generate a glow discharge, and a resonator is provided on both sides of the electrode group to extract the discharge energy as laser light. (2. The carbon dioxide laser device according to claim 0, item 1, characterized in that a heat exchanger is provided in the laser gas circulation path.
JP18700883A 1983-10-07 1983-10-07 Carbonic acid gas laser device Pending JPS6080293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18700883A JPS6080293A (en) 1983-10-07 1983-10-07 Carbonic acid gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18700883A JPS6080293A (en) 1983-10-07 1983-10-07 Carbonic acid gas laser device

Publications (1)

Publication Number Publication Date
JPS6080293A true JPS6080293A (en) 1985-05-08

Family

ID=16198584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18700883A Pending JPS6080293A (en) 1983-10-07 1983-10-07 Carbonic acid gas laser device

Country Status (1)

Country Link
JP (1) JPS6080293A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791637A (en) * 1986-02-25 1988-12-13 Amada Company, Limited Gas laser generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791637A (en) * 1986-02-25 1988-12-13 Amada Company, Limited Gas laser generator

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