JPS6079588U - 振動帰還型超音波洗浄装置 - Google Patents

振動帰還型超音波洗浄装置

Info

Publication number
JPS6079588U
JPS6079588U JP17188383U JP17188383U JPS6079588U JP S6079588 U JPS6079588 U JP S6079588U JP 17188383 U JP17188383 U JP 17188383U JP 17188383 U JP17188383 U JP 17188383U JP S6079588 U JPS6079588 U JP S6079588U
Authority
JP
Japan
Prior art keywords
vibrator
cleaning device
ultrasonic cleaning
feedback type
type ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17188383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242796Y2 (enrdf_load_stackoverflow
Inventor
芳樹 橋本
Original Assignee
海上電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 海上電機株式会社 filed Critical 海上電機株式会社
Priority to JP17188383U priority Critical patent/JPS6079588U/ja
Publication of JPS6079588U publication Critical patent/JPS6079588U/ja
Application granted granted Critical
Publication of JPS6242796Y2 publication Critical patent/JPS6242796Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP17188383U 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置 Granted JPS6079588U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17188383U JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17188383U JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Publications (2)

Publication Number Publication Date
JPS6079588U true JPS6079588U (ja) 1985-06-03
JPS6242796Y2 JPS6242796Y2 (enrdf_load_stackoverflow) 1987-11-02

Family

ID=30374826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17188383U Granted JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Country Status (1)

Country Link
JP (1) JPS6079588U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128834A (en) * 1979-03-28 1980-10-06 Nec Corp Method of ultrasonically cleaning semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128834A (en) * 1979-03-28 1980-10-06 Nec Corp Method of ultrasonically cleaning semiconductor wafer

Also Published As

Publication number Publication date
JPS6242796Y2 (enrdf_load_stackoverflow) 1987-11-02

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