JPS6078870U - 成膜装置用加熱体 - Google Patents

成膜装置用加熱体

Info

Publication number
JPS6078870U
JPS6078870U JP16969683U JP16969683U JPS6078870U JP S6078870 U JPS6078870 U JP S6078870U JP 16969683 U JP16969683 U JP 16969683U JP 16969683 U JP16969683 U JP 16969683U JP S6078870 U JPS6078870 U JP S6078870U
Authority
JP
Japan
Prior art keywords
heating element
airtight container
film forming
mounting surface
forming equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16969683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351333Y2 (en:Method
Inventor
淡野　直一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP16969683U priority Critical patent/JPS6078870U/ja
Publication of JPS6078870U publication Critical patent/JPS6078870U/ja
Application granted granted Critical
Publication of JPH0351333Y2 publication Critical patent/JPH0351333Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP16969683U 1983-10-31 1983-10-31 成膜装置用加熱体 Granted JPS6078870U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16969683U JPS6078870U (ja) 1983-10-31 1983-10-31 成膜装置用加熱体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16969683U JPS6078870U (ja) 1983-10-31 1983-10-31 成膜装置用加熱体

Publications (2)

Publication Number Publication Date
JPS6078870U true JPS6078870U (ja) 1985-06-01
JPH0351333Y2 JPH0351333Y2 (en:Method) 1991-11-01

Family

ID=30370665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16969683U Granted JPS6078870U (ja) 1983-10-31 1983-10-31 成膜装置用加熱体

Country Status (1)

Country Link
JP (1) JPS6078870U (en:Method)

Also Published As

Publication number Publication date
JPH0351333Y2 (en:Method) 1991-11-01

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