JPS6076604A - Method and apparatus for measuring deformation of body having coarse surface by phase modulated speckle interferometer - Google Patents

Method and apparatus for measuring deformation of body having coarse surface by phase modulated speckle interferometer

Info

Publication number
JPS6076604A
JPS6076604A JP18493283A JP18493283A JPS6076604A JP S6076604 A JPS6076604 A JP S6076604A JP 18493283 A JP18493283 A JP 18493283A JP 18493283 A JP18493283 A JP 18493283A JP S6076604 A JPS6076604 A JP S6076604A
Authority
JP
Japan
Prior art keywords
deformation
phase
laser light
light
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18493283A
Other languages
Japanese (ja)
Other versions
JPH052924B2 (en
Inventor
Suezo Nakatate
Katsuhisa Tsutsumi
Toyohiko Yatagai
Hiroyoshi Saito
Original Assignee
Rikagaku Kenkyusho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rikagaku Kenkyusho filed Critical Rikagaku Kenkyusho
Priority to JP18493283A priority Critical patent/JPH052924B2/ja
Publication of JPS6076604A publication Critical patent/JPS6076604A/en
Publication of JPH052924B2 publication Critical patent/JPH052924B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/16Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02Interferometers
    • G01B9/02094Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Abstract

PURPOSE:To perform automatic analysis of the amount of deformation, by obtaining the phase of three sheets or more of speckle images caused by the interference of laser light before the deformation of a body to be measured, and determining the amount of the deformation based on the difference between said phase and the phase obtained by the same way after the deformation. CONSTITUTION:Laser light 2 from a laser light source 1 is divided into light paths 6 and 7 through a mirror 3 and an objective lens 4 by a semitransparent mirror 5. The laser light beams of the light paths 6 and 7 are projected on a body to be measured 8 and a reference surface 9. Scattered light rays 10 and 11 are combined by the semitransparent mirror 5, and an image is formed on a photoelectric converter device 12. The phase of the reference light 11 is changed by N times by 2pi/N (N>=3) by a driving device 4, and the interference intensity is stored in a memory 15. The phase theta1 of a speckle image before deformation is obtained by using the data of a large-capacity memory 17 by an operating device 16. The phase theta2 after the deformation is obtained by the same way. The amount of the deformation is computed by theta2-theta1, and the result is displayed on a display device 18.
JP18493283A 1983-10-03 1983-10-03 Expired - Lifetime JPH052924B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18493283A JPH052924B2 (en) 1983-10-03 1983-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18493283A JPH052924B2 (en) 1983-10-03 1983-10-03

Publications (2)

Publication Number Publication Date
JPS6076604A true JPS6076604A (en) 1985-05-01
JPH052924B2 JPH052924B2 (en) 1993-01-13

Family

ID=16161864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18493283A Expired - Lifetime JPH052924B2 (en) 1983-10-03 1983-10-03

Country Status (1)

Country Link
JP (1) JPH052924B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03502008A (en) * 1988-09-02 1991-05-09
EP0915317A1 (en) * 1997-11-04 1999-05-12 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
JP2008045922A (en) * 2006-08-11 2008-02-28 Toyama Univ Method and apparatus for measuring nanometer displacement by laser speckle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03502008A (en) * 1988-09-02 1991-05-09
EP0915317A1 (en) * 1997-11-04 1999-05-12 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
WO1999023446A1 (en) * 1997-11-04 1999-05-14 European Community Method of improving the contrast of images obtained using the pulsed image-addition espi technique
US6362873B1 (en) 1997-11-04 2002-03-26 European Community Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique
JP2008045922A (en) * 2006-08-11 2008-02-28 Toyama Univ Method and apparatus for measuring nanometer displacement by laser speckle

Also Published As

Publication number Publication date
JPH052924B2 (en) 1993-01-13

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