JPS6076604A - Method and apparatus for measuring deformation of body having coarse surface by phase modulated speckle interferometer - Google Patents
Method and apparatus for measuring deformation of body having coarse surface by phase modulated speckle interferometerInfo
- Publication number
- JPS6076604A JPS6076604A JP18493283A JP18493283A JPS6076604A JP S6076604 A JPS6076604 A JP S6076604A JP 18493283 A JP18493283 A JP 18493283A JP 18493283 A JP18493283 A JP 18493283A JP S6076604 A JPS6076604 A JP S6076604A
- Authority
- JP
- Japan
- Prior art keywords
- deformation
- phase
- laser light
- light
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000051 modifying Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/16—Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Instruments as specified in the subgroups and characterised by the use of optical measuring means
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
- G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
Abstract
PURPOSE:To perform automatic analysis of the amount of deformation, by obtaining the phase of three sheets or more of speckle images caused by the interference of laser light before the deformation of a body to be measured, and determining the amount of the deformation based on the difference between said phase and the phase obtained by the same way after the deformation. CONSTITUTION:Laser light 2 from a laser light source 1 is divided into light paths 6 and 7 through a mirror 3 and an objective lens 4 by a semitransparent mirror 5. The laser light beams of the light paths 6 and 7 are projected on a body to be measured 8 and a reference surface 9. Scattered light rays 10 and 11 are combined by the semitransparent mirror 5, and an image is formed on a photoelectric converter device 12. The phase of the reference light 11 is changed by N times by 2pi/N (N>=3) by a driving device 4, and the interference intensity is stored in a memory 15. The phase theta1 of a speckle image before deformation is obtained by using the data of a large-capacity memory 17 by an operating device 16. The phase theta2 after the deformation is obtained by the same way. The amount of the deformation is computed by theta2-theta1, and the result is displayed on a display device 18.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18493283A JPH052924B2 (en) | 1983-10-03 | 1983-10-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18493283A JPH052924B2 (en) | 1983-10-03 | 1983-10-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6076604A true JPS6076604A (en) | 1985-05-01 |
JPH052924B2 JPH052924B2 (en) | 1993-01-13 |
Family
ID=16161864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18493283A Expired - Lifetime JPH052924B2 (en) | 1983-10-03 | 1983-10-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH052924B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03502008A (en) * | 1988-09-02 | 1991-05-09 | ||
EP0915317A1 (en) * | 1997-11-04 | 1999-05-12 | European Community | Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique |
JP2008045922A (en) * | 2006-08-11 | 2008-02-28 | Toyama Univ | Method and apparatus for measuring nanometer displacement by laser speckle |
-
1983
- 1983-10-03 JP JP18493283A patent/JPH052924B2/ja not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03502008A (en) * | 1988-09-02 | 1991-05-09 | ||
EP0915317A1 (en) * | 1997-11-04 | 1999-05-12 | European Community | Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique |
WO1999023446A1 (en) * | 1997-11-04 | 1999-05-14 | European Community | Method of improving the contrast of images obtained using the pulsed image-addition espi technique |
US6362873B1 (en) | 1997-11-04 | 2002-03-26 | European Community | Method of improving the contrast of images obtained using the pulsed image-addition ESPI technique |
JP2008045922A (en) * | 2006-08-11 | 2008-02-28 | Toyama Univ | Method and apparatus for measuring nanometer displacement by laser speckle |
Also Published As
Publication number | Publication date |
---|---|
JPH052924B2 (en) | 1993-01-13 |
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