CN103727895B - Single-frame color composite grating stripe reflection mirror surface three-dimensional surface shape measuring method - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及不规则的表面或轮廓的计量的技术领域，尤其是一种基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法。The present invention relates to the technical field of measurement of irregular surfaces or contours, in particular to a specular three-dimensional surface shape measurement method based on single-frame color composite grating stripe reflection.
背景技术Background technique
随着精密光学加工，汽车喷漆，工业制造和产品质量检测的发展，人们日益迫切地希望能够对镜面或类镜面反射物体进行精确测量，如对自由曲面的镜面或透镜（如眼镜）的检测，对汽车表面等喷漆质量的控制（桔皮现象），精密器件表面加工质量评估等。通过对各种镜面或类镜面表面的测量分析，可以得到相应制造过程中各种参数（如打磨转速，打磨材料，机械振动等）对表面加工质量的影响，可以为提高改进加工工艺提供参考。但是，传统的镜面物体测量方式如全息测量、接触式三坐标测量仪等具有很大的局限性，不易实现自动化、在线检测。干涉仪通常只能测量类平面或球面物体，无法测量自由曲面物体。接触式三坐标机测量时间相当长（通常数小时以上），而且可能破坏待测物体表面。对此，人们提出一种基于条纹反射的镜面物体三维测量方法。这是一种高灵敏、非相干的光学全场测量技术，可对任何材质的自由面形光滑表面（如各种非球面镜片，抛光的金属表面，汽车和飞机喷漆表面等）对进行快速和高精度的曲率分布以及三维形貌测量。通过对精密加工工件表面微结构的分解分析，可以得到加工过程中工具的移动、振动等信息，也可以通过对喷漆表面起伏结构和微观结构的分解分析来研究改进不同漆料的配比和喷涂工艺等。但是，条纹反射法通常分别投射水平方向和垂直方向的条纹，而且每个方向通常需要投射多步条纹来解调相位，因此，测量速度不快，不利于动态测量。With the development of precision optical processing, automotive painting, industrial manufacturing and product quality inspection, people are increasingly eager to accurately measure mirrors or mirror-like reflection objects, such as the detection of free-form mirrors or lenses (such as glasses), The control of spray paint quality (orange peel phenomenon) on the surface of automobiles, the quality evaluation of surface processing of precision devices, etc. Through the measurement and analysis of various mirror or mirror-like surfaces, the influence of various parameters (such as grinding speed, grinding materials, mechanical vibration, etc.) in the corresponding manufacturing process on the surface processing quality can be obtained, which can provide reference for improving the processing technology. However, traditional mirror object measurement methods such as holographic measurement and contact three-coordinate measuring instrument have great limitations, and it is not easy to realize automatic and online detection. Interferometers can usually only measure flat or spherical objects, and cannot measure free-form objects. The measurement time of the contact three-coordinate machine is quite long (usually more than several hours), and it may damage the surface of the object to be measured. In this regard, a method for three-dimensional measurement of specular objects based on fringe reflection is proposed. This is a highly sensitive, incoherent optical full-field measurement technology, which can quickly and accurately measure free-form smooth surfaces of any material (such as various aspherical lenses, polished metal surfaces, painted surfaces of automobiles and aircraft, etc.) High-precision curvature distribution and 3D shape measurement. Through the decomposition and analysis of the surface microstructure of precision machining workpieces, information such as tool movement and vibration during processing can be obtained. It is also possible to study and improve the ratio and spraying of different paints through the decomposition and analysis of the undulating structure and microstructure of the sprayed paint surface. craft etc. However, the fringe reflection method usually projects horizontal and vertical fringes separately, and each direction usually needs to project multi-step fringes to demodulate the phase, so the measurement speed is not fast, which is not conducive to dynamic measurement.
发明内容Contents of the invention
本发明的目的在于：针对上述存在的问题，提供一种基于单帧彩色复合光栅条纹反射对镜面三维面形快速测量的方法。The purpose of the present invention is to provide a method for quickly measuring the three-dimensional surface shape of a mirror surface based on the reflection of single-frame color composite grating stripes to solve the above-mentioned problems.
本发明采用的技术方案如下：The technical scheme that the present invention adopts is as follows:
本发明提供一种基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法，包括以下步骤：The invention provides a method for measuring the three-dimensional surface shape of a specular surface based on single-frame color composite grating stripe reflection, comprising the following steps:
S1：设置实验系统：实验系统包括计算机、显示屏、待测镜面、数码相机，调整实验系统使数码相机通过待测镜面观测到显示屏；S1: Set up the experimental system: the experimental system includes a computer, a display screen, a mirror to be tested, and a digital camera. Adjust the experimental system so that the digital camera can observe the display screen through the mirror to be tested;
S2：计算机控制在显示屏上生成彩色复合条纹，彩色复合条纹中的水平条纹和垂直条纹由于占据不同的独立的颜色通道而具有不同的颜色；S2: The computer controls to generate color composite stripes on the display screen, and the horizontal stripes and vertical stripes in the color composite stripes have different colors due to occupying different independent color channels;
S3：数码相机观察S2步骤中得到的彩色复合条纹经过待测镜面反射后得到的彩色复合变形条纹，待测镜面的梯度信息被调制在彩色复合变形条纹的相位中；S3: The digital camera observes the colored composite deformed fringes obtained in the step S2 after being reflected by the specular surface to be measured, and the gradient information of the specular surface to be measured is modulated in the phase of the colored composite deformed fringes;
S4：对S3步骤中得到的彩色复合变形条纹进行色彩分离得到水平方向和垂直方向的变形条纹；S4: color-separating the colored composite deformed stripes obtained in step S3 to obtain horizontally and vertically deformed stripes;
S5：对S4步骤中得到的水平方向和垂直方向的变形条纹进行相位解调得到变形条纹的相位，解调得到的相位是截断的，将其载频去除，然后进行相位展开；S5: Perform phase demodulation on the deformed fringes in the horizontal direction and vertical direction obtained in the step S4 to obtain the phase of the deformed fringes, the phase obtained by demodulation is truncated, the carrier frequency is removed, and then phase unwrapping is performed;
S6：根据S5步骤中得到展开后的相位，通过条纹反射法的相位梯度关系获得待测镜面的梯度信息，对梯度积分得到三维形貌。S6: According to the developed phase obtained in step S5, the gradient information of the mirror surface to be measured is obtained through the phase gradient relationship of the fringe reflection method, and the three-dimensional shape is obtained by integrating the gradient.
对上述方案作进一步优选，所述彩色复合变形条纹表示为：To further optimize the above scheme, the color compound deformation stripes are expressed as:
其中，表示数码相机记录的光强分布，和分别表示水平方向和竖直方向的背景光强，和分别表示水平方向和竖直方向的调制度分布，表示载频的频率函数，和分别表示水平方向和竖直方向的与待测镜面的梯度相关的相位，具体的相位梯度关系如下：in, Indicates the light intensity distribution recorded by a digital camera, and represent the background light intensity in the horizontal and vertical directions, respectively, and represent the modulation degree distribution in the horizontal direction and the vertical direction, respectively, and represent the frequency function of the carrier frequency, and represent the phases related to the gradient of the mirror surface to be tested in the horizontal direction and the vertical direction respectively, and the specific phase gradient relationship is as follows:
上式分别表示待测镜面表面的梯度在水平方向和竖直方向上的分量与相位的关系，式中表示显示屏到待测镜面的距离，和分别表示显示屏上水平方向和垂直方向的正弦条纹的周期。The above formulas represent the relationship between the components and the phase of the gradient of the mirror surface to be tested in the horizontal direction and vertical direction, respectively, where Indicates the distance from the display screen to the mirror surface to be tested, and represent the periods of the sinusoidal stripes in the horizontal and vertical directions on the display, respectively.
对上述方案作进一步优选，所述步骤S4得到的水平方向和垂直方向的变形条纹表示为：The above scheme is further optimized, the deformation stripes in the horizontal direction and vertical direction obtained in the step S4 are expressed as:
对上述方案作进一步优选，所述对S4步骤中得到的水平方向和垂直方向的变形条纹进行相位解调为对变形条纹的图像中的相位信息通过傅里叶变换分析解调得到总相位，即首先对条纹傅里叶变换，选取频谱中的一个基频分量，然后对该分量逆傅里叶变换，最后求逆傅里叶变换后的相位角即是原变形条纹的相位。The above scheme is further optimized, the phase demodulation of the deformed fringes in the horizontal direction and vertical direction obtained in the step S4 is to obtain the total phase by Fourier transform analysis and demodulation of the phase information in the image of the deformed fringes, that is First, for the Fourier transform of the fringe, a fundamental frequency component in the spectrum is selected, and then the component is inversely Fourier transformed, and finally the phase angle after the inverse Fourier transform is the phase of the original deformed fringe.
综上所述，由于采用了上述技术方案，本发明的有益效果是：In summary, owing to adopting above-mentioned technical scheme, the beneficial effect of the present invention is:
1.本发明在显示屏上同时生成不同颜色的水平条纹和垂直条纹，然后用数码相机记录通过待测镜面的变形条纹，整个测量过程只需向待测镜面投影一帧彩色复合光栅条纹就可以得到水平方向和垂直方向的梯度，最后对梯度进行积分得到待测镜面的三维形貌信息，有效地提高了测量效率，具有快速、高动态范围的特点，利用本发明可以实现快速、高精度的镜面物体三维面形测量。1. The present invention simultaneously generates horizontal stripes and vertical stripes of different colors on the display screen, and then uses a digital camera to record the deformed stripes passing through the mirror surface to be tested. The entire measurement process only needs to project a frame of color composite grating stripes to the mirror surface to be tested. Obtain the gradient in the horizontal direction and the vertical direction, and finally integrate the gradient to obtain the three-dimensional shape information of the mirror surface to be measured, which effectively improves the measurement efficiency and has the characteristics of fast and high dynamic range. The invention can realize fast and high-precision Three-dimensional surface shape measurement of specular objects.
2．本发明利用普通非相干光源进行测量，具有纳米级别的测量精度，无需扫描装置。2. The invention utilizes ordinary incoherent light sources for measurement, has nanometer-level measurement precision, and does not need a scanning device.
3.本发明与干涉法测量三维面形相比，可靠性和耐用性更高，成本更低；与运用超高精度接触式三维坐标测量仪测量的方法相比，具有测量速度快，横向分辨率高等优点。3. Compared with the measurement of three-dimensional surface shape by interferometry, the present invention has higher reliability and durability and lower cost; compared with the method of using ultra-high-precision contact three-dimensional coordinate measuring instrument, it has fast measurement speed and horizontal resolution Advanced advantages.
4.本发明应用于动态、在线测量方面，适用于测量各种尺寸、曲率分布、甚至液体等表面。4. The present invention is applied to dynamic and on-line measurement, and is suitable for measuring surfaces of various sizes, curvature distributions, and even liquids.
附图说明Description of drawings
本发明将通过例子并参照附图的方式说明，其中：The invention will be illustrated by way of example with reference to the accompanying drawings, in which:
图1是本发明基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法的流程图；Fig. 1 is the flow chart of the present invention based on the specular three-dimensional surface shape measurement method of single-frame color composite grating fringe reflection;
图2是本发明基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法的系统图；Fig. 2 is the system diagram of the specular three-dimensional surface shape measurement method based on single-frame color composite grating fringe reflection of the present invention;
图3是本发明的彩色复合条纹生成过程图；Fig. 3 is a diagram of the process of generating colored composite fringes of the present invention;
图4是本发明彩色复合条纹经过待测镜面反射后得到的彩色复合变形条纹图。Fig. 4 is a color composite deformed fringe diagram obtained after the colored composite fringes of the present invention are reflected by the specular surface to be tested.
图2中：1为计算机；2为显示屏；3为待测镜面；4为数码相机。In Fig. 2: 1 is a computer; 2 is a display screen; 3 is a mirror surface to be tested; 4 is a digital camera.
具体实施方式detailed description
本说明书中公开的所有特征，或公开的所有方法或过程中的步骤，除了互相排斥的特征和/或步骤以外，均可以以任何方式组合。All features disclosed in this specification, or steps in all methods or processes disclosed, may be combined in any manner, except for mutually exclusive features and/or steps.
下面结合附图及实施例对本发明作详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
实施例Example
如图1所示为基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法的流程图。As shown in Figure 1, it is a flowchart of a method for measuring three-dimensional surface shape of a specular surface based on single-frame color composite grating fringe reflection.
本实施例以硅晶片作为待测物体进行测量。In this embodiment, a silicon wafer is used as the object to be measured for measurement.
一种基于单帧彩色复合光栅条纹反射的镜面三维面形测量方法，包括以下步骤：A method for measuring the three-dimensional surface shape of a specular surface based on single-frame color composite grating fringe reflection, comprising the following steps:
S1：设置实验系统：实验系统包括计算机1、显示屏2、待测镜面3、数码相机4，调整实验系统使数码相机4通过硅晶片3表面观测到显示屏，如图2所示；S1: Setting up the experimental system: the experimental system includes a computer 1, a display screen 2, a mirror surface to be tested 3, and a digital camera 4. Adjust the experimental system so that the digital camera 4 can observe the display screen through the surface of the silicon wafer 3, as shown in Figure 2;
S2：计算机1控制在显示屏2上生成彩色复合条纹，彩色复合条纹中的水平条纹和垂直条纹由于占据不同的独立的颜色通道而具有不同的颜色，如图3所示；S2: The computer 1 controls to generate colored composite stripes on the display screen 2. The horizontal stripes and vertical stripes in the colored composite stripes have different colors due to occupying different independent color channels, as shown in FIG. 3 ;
S3：数码相机4观察S2步骤中得到的彩色复合条纹经过硅晶片3反射后得到的彩色复合变形条纹，如图4所示为彩色复合变形条纹图，硅晶片3表面的梯度信息被调制在彩色复合变形条纹的相位中其中，彩色复合变形条纹表示为：S3: The digital camera 4 observes the colored composite deformed fringes obtained in the step S2 after being reflected by the silicon wafer 3, as shown in FIG. In the phase of compound deformation fringes, the color compound deformation fringes are expressed as:
其中，表示数码相机4记录的光强分布，和分别表示水平方向和竖直方向的背景光强，和分别表示水平方向和竖直方向的调制度分布，表示载频的频率函数，和分别表示水平方向和竖直方向的与硅晶片3表面的梯度相关的相位，具体的相位梯度关系如下：in, represents the light intensity distribution recorded by the digital camera 4, and represent the background light intensity in the horizontal and vertical directions, respectively, and represent the modulation degree distribution in the horizontal direction and the vertical direction, respectively, and represent the frequency function of the carrier frequency, and Respectively represent the phases related to the gradient of the silicon wafer 3 surface in the horizontal direction and the vertical direction, and the specific phase gradient relationship is as follows:
上式分别表示硅晶片3表面的梯度在水平方向和竖直方向上的分量与相位的关系，式中表示显示屏2到硅晶片3的距离，和分别表示显示屏2上水平方向和垂直方向的正弦条纹的周期。The above formula represents the relationship between the components and the phase of the gradient on the surface of the silicon wafer 3 in the horizontal direction and the vertical direction respectively, in the formula Indicates the distance from the display screen 2 to the silicon wafer 3, and represent the periods of the sinusoidal stripes in the horizontal and vertical directions on the display screen 2, respectively.
S4：对S3步骤中得到的彩色复合变形条纹进行色彩分离得到水平方向和垂直方向的变形条纹，其中，两个方向的变形条纹分别表示为：S4: Carry out color separation on the colored composite deformed stripes obtained in step S3 to obtain deformed stripes in the horizontal direction and vertical direction, wherein the deformed stripes in the two directions are respectively expressed as:
S5：对S4步骤中得到的水平方向和垂直方向的变形条纹进行相位解调，由于是单帧条纹，采用傅里叶变换的方法解调相位，首先对变形条纹傅里叶变换，选取频谱中的一个基频分量，然后对该分量逆傅里叶变换，最后求逆傅里叶变换后的相位角即为原变形条纹的相位。S5: Perform phase demodulation on the deformed fringes in the horizontal direction and vertical direction obtained in the step S4. Since it is a single frame fringe, the Fourier transform method is used to demodulate the phase. First, the Fourier transform of the deformed fringes is selected in the frequency spectrum A fundamental frequency component of the component, and then inverse Fourier transform of the component, and finally the phase angle after the inverse Fourier transform is the phase of the original deformed fringe .
S6：由于S5步骤中得到的相位是截断的，需要将展开到连续分布，相位展开的思路如下：对比截断相位图中相邻两点的相位值，若后一点的相位值减去前一点的相位值大于π，则后一点的相位值减去2π；若后一点的相位值减去前一点的相位值小于-π，则后一点的相位值加上2π；否则相位值不变。S6: Since the phase obtained in step S5 is truncated, it is necessary to Expanding to continuous distribution, the idea of phase unwrapping is as follows: compare the phase values of two adjacent points in the truncated phase diagram, if the phase value of the latter point minus the phase value of the previous point is greater than π, then the phase value of the latter point is subtracted by 2π; If the phase value of the latter point minus the phase value of the previous point is less than -π, add 2π to the phase value of the latter point; otherwise, the phase value remains unchanged.
S7：由上述S6步骤得到连续的后，利用S3步骤中的相位梯度关系得到硅晶片3表面的梯度分布数据，对梯度积分得到硅晶片3表面的三维形貌。S7: obtain continuous by above-mentioned S6 step Finally, the gradient distribution data on the surface of the silicon wafer 3 is obtained by using the phase gradient relationship in step S3, and the three-dimensional topography of the surface of the silicon wafer 3 is obtained by integrating the gradient.
本发明并不局限于前述的具体实施方式。本发明可扩展到任何在本说明书中披露的新特征或任何新的组合，以及披露的任一新的方法或过程的步骤或任何新的组合。The present invention is not limited to the foregoing specific embodiments. The present invention may extend to any new feature or any new combination disclosed in this specification, as well as any new method or process step or any new combination disclosed.
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| CN105180835B (en) * | 2015-05-11 | 2018-08-28 | 中国科学院国家天文台南京天文光学技术研究所 | The method that quick obtaining unpacks phase in streak reflex measurement |
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| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| TWI662262B (en) * | 2018-04-20 | 2019-06-11 | 國立臺灣大學 | System for quantitative differential phase contrast microscopy with isotropic transfer function |
| CN109141290A (en) * | 2018-08-28 | 2019-01-04 | 西安工业大学 | A kind of detection method of big bias freeform optics surface face shape |
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| CN110057841A (en) * | 2019-05-05 | 2019-07-26 | 电子科技大学 | A kind of defect inspection method based on transmittance structure light |
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| CN110554847A (en) * | 2019-08-29 | 2019-12-10 | 东莞锐视光电科技有限公司 | System, method and application for generating color stripe light by LCD display screen |
| CN110569009A (en) * | 2019-08-29 | 2019-12-13 | 东莞锐视光电科技有限公司 | Software system for generating stripe light |
| CN112082510A (en) * | 2020-09-03 | 2020-12-15 | 南昌航空大学 | A method to reduce the surface shape recovery error of the middle axis part in the measurement of concave mirror |
| CN116625275B (en) * | 2023-03-31 | 2024-02-13 | 东莞理工学院 | Ultra-thin multi-layer graph micro-nano structure three-dimensional reconstruction method based on light field information fusion |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101509764A (en) * | 2009-02-27 | 2009-08-19 | 东南大学 | Method for rapidly acquiring object three-dimensional form |
| CN101788274A (en) * | 2010-03-15 | 2010-07-28 | 电子科技大学 | Method for 3D shape measurement of colourful composite grating |
| CN101975558A (en) * | 2010-09-03 | 2011-02-16 | 东南大学 | Rapid three-dimensional measurement method based on color grating projection |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4062581B2 (en) * | 2001-07-19 | 2008-03-19 | フジノン株式会社 | Region extraction method for fringe analysis |
| CN101986098B (en) * | 2010-09-21 | 2012-02-22 | 东南大学 | Three-dimensional measuring method based on three-color light projection using Fourier transform |
-
2014
- 2014-01-16 CN CN201410019594.0A patent/CN103727895B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101509764A (en) * | 2009-02-27 | 2009-08-19 | 东南大学 | Method for rapidly acquiring object three-dimensional form |
| CN101788274A (en) * | 2010-03-15 | 2010-07-28 | 电子科技大学 | Method for 3D shape measurement of colourful composite grating |
| CN101975558A (en) * | 2010-09-03 | 2011-02-16 | 东南大学 | Rapid three-dimensional measurement method based on color grating projection |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
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