CN103727895B - Single-frame color composite grating stripe reflection mirror surface three-dimensional surface shape measuring method - Google Patents
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
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Abstract
The invention discloses a single-frame color composite grating stripe reflection mirror surface three-dimensional surface shape measuring method. An experiment system comprises a digital camera, a display screen, a mirror surface to be measured and a computer. The experiment system is adjusted to enable the digital camera to observe the display screen through the mirror surface to be measured, horizontal stripes and perpendicular stripes of different colors are generated simultaneously on the display screen, the digital camera is used for recording deformed stripes through an object with the mirror to be tested, horizontal and perpendicular gradients can be obtained by only projecting one frame of color composite grating stripe to the mirror to be tested throughout the measuring process, and the gradients are integrated to obtain three-dimensional shape information. According to the method, rapid and high-accuracy mirror surface object three-dimensional shape measuring can be achieved.
Description
Technical Field
The invention relates to the technical field of measurement of irregular surfaces or profiles, in particular to a mirror surface three-dimensional surface shape measuring method based on single-frame color composite grating stripe reflection.
Background
With the development of precision optical processing, automobile painting, industrial manufacturing and product quality inspection, there is an increasing demand for accurate measurement of mirror surfaces or mirror-like reflective objects, such as inspection of free-form surfaces of mirrors or lenses (e.g., glasses), control of painting quality on automobile surfaces and the like (orange peel phenomenon), precision device surface processing quality evaluation, and the like. Through the measurement and analysis of various mirror surfaces or mirror surface-like surfaces, the influence of various parameters (such as grinding rotating speed, grinding materials, mechanical vibration and the like) on the surface processing quality in the corresponding manufacturing process can be obtained, and reference can be provided for improving the processing technology. However, the traditional mirror surface object measurement methods such as holographic measurement and contact type three-coordinate measuring instrument have great limitations, and are not easy to realize automatic and online detection. Interferometers can usually only measure plane-like or spherical objects, but cannot measure free-form objects. Contact three-coordinate measuring machines have a relatively long measuring time (typically several hours or more) and may damage the surface of the object to be measured. In view of the above, a three-dimensional measurement method for a specular object based on fringe reflection is proposed. The method is a high-sensitivity incoherent optical full-field measurement technology, and can be used for quickly and accurately measuring the curvature distribution and the three-dimensional shape of a free-surface smooth surface (such as various aspheric lenses, polished metal surfaces, painted surfaces of automobiles and airplanes and the like) made of any material. Through the decomposition analysis of the microstructure on the surface of the precision machining workpiece, the information of movement, vibration and the like of a tool in the machining process can be obtained, and the ratio, the spraying process and the like of different paint materials can be researched and improved through the decomposition analysis of the relief structure and the microstructure of the sprayed paint surface. However, the fringe reflection method usually projects fringes in the horizontal direction and the vertical direction, respectively, and each direction usually needs to project a plurality of steps of fringes to demodulate the phase, so the measurement speed is not fast and the dynamic measurement is not facilitated.
Disclosure of Invention
The invention aims to: aiming at the existing problems, a method for rapidly measuring the three-dimensional surface shape of the mirror surface based on the stripe reflection of the single-frame color composite grating is provided.
The technical scheme adopted by the invention is as follows:
the invention provides a mirror surface three-dimensional surface shape measuring method based on single-frame color composite grating stripe reflection, which comprises the following steps:
s1: setting an experimental system: the experimental system comprises a computer, a display screen, a mirror surface to be measured and a digital camera, and is adjusted to enable the digital camera to observe the display screen through the mirror surface to be measured;
s2: the computer controls to generate color composite stripes on the display screen, and the horizontal stripes and the vertical stripes in the color composite stripes have different colors because of occupying different independent color channels;
s3: the digital camera observes the color composite deformed stripe obtained in the step S2 after the color composite stripe is reflected by the mirror surface to be measured, and the gradient information of the mirror surface to be measured is modulated in the phase position of the color composite deformed stripe;
s4: carrying out color separation on the color composite deformed stripes obtained in the step S3 to obtain deformed stripes in the horizontal direction and the vertical direction;
s5: performing phase demodulation on the deformed stripes in the horizontal direction and the vertical direction obtained in the step S4 to obtain phases of the deformed stripes, wherein the phases obtained by demodulation are truncated, the carrier frequency of the phase is removed, and then phase unwrapping is performed;
s6: and obtaining gradient information of the mirror surface to be measured through the phase gradient relation of a fringe reflection method according to the unfolded phase obtained in the step S5, and integrating the gradient to obtain the three-dimensional morphology.
Further preferably, the color composite deformed stripe is expressed as:
wherein,representing the light intensity distribution recorded by the digital camera,andrespectively representing the background light intensity in the horizontal and vertical directions,andrespectively, the modulation degree distribution in the horizontal direction and the vertical direction, the frequency function of the carrier frequency,andthe phases related to the gradient of the mirror surface to be measured in the horizontal direction and the vertical direction are respectively represented, and the specific phase gradient relation is as follows:
the above formula represents the relationship between the components and phases of the gradient of the mirror surface to be measured in the horizontal direction and the vertical direction, respectively, in the formulaThe distance from the display screen to the mirror surface to be measured is shown,andrespectively representing the periods of the sinusoidal stripes in the horizontal and vertical directions on the display screen.
Further preferably, the deformed stripes in the horizontal direction and the vertical direction obtained in step S4 are expressed as:
preferably, the phase demodulation of the deformed stripes in the horizontal direction and the vertical direction obtained in step S4 is performed to obtain a total phase by performing fourier transform analysis and demodulation on phase information in an image of the deformed stripes, that is, first performing fourier transform on the stripes, selecting a fundamental frequency component in a frequency spectrum, then performing inverse fourier transform on the component, and finally performing inverse fourier transform on a phase angle, which is the phase of the original deformed stripe.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. the invention simultaneously generates horizontal stripes and vertical stripes with different colors on the display screen, then records the deformation stripes passing through the mirror surface to be measured by using a digital camera, the gradient in the horizontal direction and the vertical direction can be obtained by projecting a frame of color composite grating stripes to the mirror surface to be measured in the whole measuring process, and finally the gradient is integrated to obtain the three-dimensional shape information of the mirror surface to be measured, thereby effectively improving the measuring efficiency.
2. The invention uses the common incoherent light source for measurement, has nanometer-level measurement precision and does not need a scanning device.
3. Compared with the method for measuring the three-dimensional surface shape by an interferometry, the method has higher reliability and durability and lower cost; compared with the method of measuring by using the ultrahigh-precision contact type three-dimensional coordinate measuring instrument, the method has the advantages of high measuring speed, high transverse resolution and the like.
4. The invention is applied to the aspects of dynamic and online measurement, and is suitable for measuring various sizes, curvature distribution, even surfaces of liquid and the like.
Drawings
The invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a flow chart of the mirror surface three-dimensional shape measurement method based on single-frame color composite grating fringe reflection according to the invention;
FIG. 2 is a system diagram of the mirror surface three-dimensional shape measurement method based on single-frame color composite grating fringe reflection according to the present invention;
FIG. 3 is a diagram of the process of generating color composite stripes according to the present invention;
FIG. 4 is a color composite deformed stripe diagram obtained after the color composite stripe of the present invention is reflected by the mirror surface to be measured.
In fig. 2: 1 is a computer; 2 is a display screen; 3 is a mirror surface to be measured; and 4, a digital camera.
Detailed Description
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Examples
FIG. 1 is a flow chart of a mirror surface three-dimensional shape measurement method based on single-frame color composite grating fringe reflection.
This example carried out measurement with a silicon wafer as an object to be measured.
A mirror surface three-dimensional shape measuring method based on single-frame color composite grating stripe reflection comprises the following steps:
s1: setting an experimental system: the experimental system comprises a computer 1, a display screen 2, a mirror surface 3 to be measured and a digital camera 4, and is adjusted to enable the digital camera 4 to observe the display screen through the surface of the silicon wafer 3, as shown in figure 2;
s2: the computer 1 controls to generate a color composite stripe on the display screen 2, wherein the horizontal stripe and the vertical stripe in the color composite stripe have different colors because of occupying different independent color channels, as shown in fig. 3;
s3: the digital camera 4 observes the color compound deformed stripes obtained after the color compound deformed stripes obtained in the step S2 are reflected by the silicon wafer 3, as shown in fig. 4, the color compound deformed stripes are a color compound deformed stripes graph, and the gradient information of the surface of the silicon wafer 3 is modulated in the phase of the color compound deformed stripes, wherein the color compound deformed stripes are expressed as:
wherein,representing the light intensity distribution recorded by the digital camera 4,andrespectively representing the background light intensity in the horizontal and vertical directions,andrespectively, the modulation degree distribution in the horizontal direction and the vertical direction, the frequency function of the carrier frequency,andthe phases related to the gradient of the surface of the silicon wafer 3 in the horizontal direction and the vertical direction are respectively expressed, and the specific phase gradient relationship is as follows:
the above formula shows the relationship between the components of the gradient of the surface of the silicon wafer 3 in the horizontal direction and the vertical direction and the phase, respectively, in whichThe distance of the display screen 2 from the silicon wafer 3 is shown,andwhich respectively represent the periods of the sinusoidal stripes in the horizontal and vertical direction on the display screen 2.
S4: and performing color separation on the color composite deformed stripes obtained in the step S3 to obtain deformed stripes in the horizontal direction and the vertical direction, wherein the deformed stripes in the two directions are respectively represented as:
s5: the deformed stripes in the horizontal direction and the vertical direction obtained in step S4 are subjected to phase demodulation becauseThe phase of the single frame stripe is demodulated by adopting a Fourier transform method, firstly, the deformed stripe is subjected to Fourier transform, a fundamental frequency component in a frequency spectrum is selected, then the component is subjected to inverse Fourier transform, and finally, the phase angle after inverse Fourier transform is obtained and is the phase of the original deformed stripe。
S6: since the phase obtained in step S5 is truncated, it is necessary to cut off the phaseThe method is developed to a continuous distribution, and the idea of phase development is as follows: comparing phase values of two adjacent points in the truncated phase diagram, and if the phase value of the next point minus the phase value of the previous point is greater than pi, subtracting 2 pi from the phase value of the next point; if the phase value of the next point minus the phase value of the previous point is smaller than-pi, adding 2 pi to the phase value of the next point; otherwise the phase value is not changed.
S7: obtained continuously by the above-mentioned step S6Then, the gradient distribution data of the surface of the silicon wafer 3 is obtained by using the phase gradient relation in the step S3, and the three-dimensional topography of the surface of the silicon wafer 3 is obtained by integrating the gradients.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification, and to any novel method or process steps or any novel combination of steps disclosed.
Claims (3)
1. A mirror surface three-dimensional shape measuring method based on single-frame color composite grating stripe reflection is characterized by comprising the following steps:
s1: setting an experimental system: the experimental system comprises a computer, a display screen, a mirror surface to be measured and a digital camera, and is adjusted to enable the digital camera to observe the display screen through the mirror surface to be measured;
s2: generating color composite stripes on a display screen through computer control, wherein the horizontal stripes and the vertical stripes in the color composite stripes have different colors;
s3: observing the color composite deformed stripe obtained in the step S2 after the color composite deformed stripe is reflected by the mirror surface to be measured through a digital camera, wherein the gradient information of the mirror surface to be measured is modulated in the phase position of the color composite deformed stripe;
s4: carrying out color separation on the color composite deformed stripes obtained in the step S3 to obtain deformed stripes in the horizontal direction and the vertical direction;
s5: performing phase demodulation on the deformed stripes in the horizontal direction and the vertical direction obtained in the step S4 to obtain phases of the deformed stripes, removing carrier frequencies of the deformed stripes, and then performing phase unwrapping;
s6: obtaining gradient information of the mirror surface to be measured through the phase gradient relation of a fringe reflection method according to the unfolded phase obtained in the step S5, and integrating the gradient to obtain a three-dimensional shape;
the color composite deformed stripes are expressed as:
wherein,representing the light intensity distribution recorded by the digital camera,andrespectively representing the background light intensity in the horizontal and vertical directions,andrespectively representing the modulation degree distributions in the horizontal and vertical directions,a frequency function representing the frequency of the carrier frequency,andthe phases related to the gradient of the mirror surface to be measured and the phases related to the gradient of the mirror surface in the horizontal direction and the vertical direction are respectively expressed, and the specific phase gradient relation is as follows
The above formula represents the relationship between the components and phases of the gradient of the mirror surface to be measured in the horizontal direction and the vertical direction, respectively, in the formulaThe distance from the display screen to the mirror surface to be measured is shown,andrespectively representing the periods of the sinusoidal stripes in the horizontal and vertical directions on the display screen.
2. The method for measuring three-dimensional shape of mirror surface based on single-frame color composite grating stripe reflection as claimed in claim 1, wherein
Is characterized in that: the horizontal and vertical deformed stripes obtained in step S4 are expressed as:
。
3. the mirror surface three-dimensional shape measuring method based on single-frame color composite grating stripe reflection as claimed in claim 1, characterized in that: the phase demodulation of the deformed stripes in the horizontal direction and the vertical direction obtained in the step S4 is to demodulate the phase information in the image of the deformed stripes by fourier transform analysis to obtain the total phase.
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| CN104458764B (en) * | 2014-12-14 | 2017-03-22 | 中国科学技术大学 | Curved uneven surface defect identification method based on large-field-depth stripped image projection |
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| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
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| CN110554847A (en) * | 2019-08-29 | 2019-12-10 | 东莞锐视光电科技有限公司 | System, method and application for generating color stripe light by LCD display screen |
| CN110554848A (en) * | 2019-08-29 | 2019-12-10 | 东莞锐视光电科技有限公司 | System, method and application for generating stripe light by LCD display screen |
| CN110569009A (en) * | 2019-08-29 | 2019-12-13 | 东莞锐视光电科技有限公司 | Software system for generating stripe light |
| CN110543288A (en) * | 2019-08-29 | 2019-12-06 | 东莞锐视光电科技有限公司 | System, method and application for generating adjustable stripe light by LCD display screen |
| CN112082510A (en) * | 2020-09-03 | 2020-12-15 | 南昌航空大学 | Method for reducing surface shape recovery error of middle shaft part in concave mirror measurement |
| CN116625275B (en) * | 2023-03-31 | 2024-02-13 | 东莞理工学院 | Ultra-thin multi-layer graph micro-nano structure three-dimensional reconstruction method based on light field information fusion |
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