CN105180835B - The method that quick obtaining unpacks phase in streak reflex measurement - Google Patents
The method that quick obtaining unpacks phase in streak reflex measurement Download PDFInfo
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- CN105180835B CN105180835B CN201510237635.8A CN201510237635A CN105180835B CN 105180835 B CN105180835 B CN 105180835B CN 201510237635 A CN201510237635 A CN 201510237635A CN 105180835 B CN105180835 B CN 105180835B
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Abstract
The method that quick obtaining unpacks phase in streak reflex measuring device：(1) shows standard sine bar graph；(2) becomes reflection sine streak figure after the reflection of mirror-reflection sample；(3) shootings reflection sine streak figure；(4) obtains briquetting phase according to phase recovery method；Enable display project the tool that a width is obtained by coding there are four types of the normal orthogonal bar graphs of gray scale；(6) cameras shooting mirror-reflection sample reflection is formed by the orthogonal bar graph of reflection；(7) extracts the horizontally and vertically phase integer information needed for phase unwrapping operation；(8) changes spatial frequency obtains several normal orthogonal bar graphs；(9) projects normal orthogonal bar graph successively, and repeat step step (6) with step (7), obtain the phase integer information under different space frequency；(10) progress phase unwrapping, which operates to obtain, unpacks phase.Calculating speed of the present invention is fast, accurate, noise robustness is good；Measurement efficiency greatly improved.
Description
Technical field
The present invention relates to field of optical measurements, the method that especially quick obtaining unpacks phase in streak reflex measurement.
Background technology
Streak reflex measuring technique is a kind of measurement smooth object (including glass-mirror, polishing metal part, smooth plastics
Part etc.) surface face shape technology, the technology using display project one group of standard sine striped, pass through phase recuperation technique
(such as phase-shifting method, fourier transform method) obtains briquetting phase horizontally and vertically.Briquetting phase is a kind of numerical value
The main value data of π distributions are arrived in-π, are lost the integral multiple information of 2 π, it is therefore desirable to it carries out unpacking operation and obtains unpacking phase,
Solution body surface face shape could be reconstructed according to unpacking phase later.
Current phase unwrapping method can be divided into two classes, and one kind is spatial domain phase unwrapping method, directly passes through briquetting phase
The difference of phase in position between consecutive points is counter to push away unpacking phase, and this method only needs single briquetting phase that can carry out operation,
But operation is complicated, and accuracy and reliability is easily affected by noise.Another kind of is temporal phase unwrapping method, needs elder generation
A series of briquetting phase for obtaining different space frequencies, then carries out unpacking operation, due to operation independent between each pixel, because
This can accurately unpack discontinuous phase with good noise resisting ability.But in traditional temporal phase unwrapping
In method, the briquetting phase of each corresponding spatial frequency is required for one group of standard sine striped of projection, greatly reduces measurement
Efficiency, this problem is especially prominent in streak reflex measurement, since it is desired that the briquetting phase and vertical direction of horizontal direction
Briquetting phase all carry out unpack could obtain measured surface face shape.Therefore, only subtracted by improving temporal phase unwrapping method
The bar graph quantity projected needed for few can improve streak reflex under the premise of keeping temporal phase unwrapping method advantage
The efficiency of phase unwrapping in measurement.
Invention content
The purpose of the present invention is to provide a kind of method that quick obtaining unpacks phase in streak reflex measurement, this method
In required projection bar graph quantity far fewer than traditional temporal phase unwrapping method, remaining, temporal phase unwrapping method is fast
Speed while accurate, noiseproof feature is strong, has been obviously improved measurement efficiency.
Realize that the technical solution of the object of the invention is：One kind quick obtaining in streak reflex measuring device unpacks phase
The method of position, which is characterized in that steps are as follows：
(1) projects standard sine bar graph to step in streak reflex measuring device with display；Including horizontal direction
The standard sine bar graph of standard sine bar graph and vertical direction；
Step (2) steps (1) in standard sine bar graph after the reflection of mirror-reflection sample, it is sinusoidal to become reflection
Bar graph；
(3) shoots (2) reflection sine streak figure that step obtains to step with camera；
The step reflection sine streak figure that (4) (3) shoots step is operated according to fringe phase restoration methods, is needed
Carry out the briquetting phase Wy (x, y), wherein x of the briquetting phase Wx (x, y) and vertical direction of the horizontal direction of phase unwrapping operation
For lateral coordinates, y is longitudinal coordinate；
(5) enables the display in streak reflex measuring device project a width normal orthogonal bar graph to step, exists in the figure
Four kinds of gray scales being sequentially increased from low to high, respectively the first gray scale g1, the second gray scale g2, third gray scale g3, the 4th gray scale g4；
The coding mode of the normal orthogonal bar graph g (x, y) is：
Wherein int indicates that downward round numbers operation, fx are the spatial frequency of horizontal direction, and fy is the space frequency of vertical direction
Rate, the two are 1/2 by normalization value；
(6) is anti-by minute surface with the normal orthogonal bar graph of the camera shooting step (5) in streak reflex measuring device for step
It penetrates sample reflection and is formed by the orthogonal bar graph h (x, y) of reflection；
Step (7) according to following formula extraction phase unwrapping operation needed for horizontal direction phase integer information Ix (x, y,
) and vertical direction phase integer information Iy (x, y, fy) fx：
The value of wherein first threshold thr1, second threshold thr2 and third threshold value thr3 is respectively：
Thr1=(g1+g2)/2
Thr2=(g2+g3)/2
Thr3=(g3+g4)/2；
(8) changes rule to step according to the bar graph frequency needed for phase unwrapping operation, changes normal orthogonal bar graph
The spatial frequency fx of the horizontal direction and spatial frequency fy of vertical direction, and execute step (5), obtain several normal orthogonal stripeds
Figure, wherein the (1) highest width normal orthogonal bar graph of spatial frequency, the spatial frequency fx of horizontal direction are necessarily equal to step
Used in horizontal direction standard sine bar graph spatial frequency half, the spatial frequency fy of vertical direction is also equal to step
(1) the half of the vertical direction standard sine bar graph spatial frequency used in；
(9) projects (8) normal orthogonal bar graph that step obtains to step successively, and repeat step step (6) with step (7)；
Under to different space frequency horizontal direction phase integer information Ix (x, y, fx) and vertical direction phase integer information Iy (x, y,
fy)；
Step (10) according to the horizontal direction phase integer information and vertical direction phase integer information of different space frequency,
Phase unwrapping operation is carried out according to following weighted sum formula：
Ux(x, y)=Wx(x,y)+∑Ix(x,y,fx)·21/fx
Uy(x, y)=Wy(x,y)+∑Iy(x,y,fy)·21/fx；
The unpacking phase Ux (x, y) of horizontal direction and the unpacking phase Uy (x, y) of vertical direction are finally obtained, wherein summing
Oeprator Σ is used to be weighted and ask for the spatial frequency fx of different horizontal directions or the spatial frequency fy of vertical direction
And operation.
It is more optimized and more specifically,
The step of the present invention (2) mirror-reflection sample, including glass-mirror, polishing metal object, smooth plastics part
Deng；
The step of the present invention (4) fringe phase restoration methods, may be used the item that any one is general in the prior art
Line phase recovery method, such as：Three step phase-shifting methods, four step phase-shifting methods, fourier transform method etc..
The value of the step of the present invention (5) first gray scale g1, the second gray scale g2, third gray scale g3, the 4th gray scale g4,
As long as theoretically satisfaction is sequentially increased from low to high, but generally takes g1=0, g2=0.33, g3=0.67, g4=1.0 is
Preferably, it is assumed here that numerical value 0 and 1.0 is respectively the minimum gray scale and highest gray scale of display.
Compared with prior art, the present invention its remarkable advantage：
(1) compared to spatial domain phase unwrapping method, the present invention has calculating speed as a kind of temporal phase unwrapping method
Soon, accurately, the good advantage of noise robustness.
(2) compared to other similar temporal phase unwrapping methods, the bar graph quantity of the present invention required projection and shooting
It is greatly reduced, only about the 1/6 to 1/8 of conventional method, measurement efficiency greatly improved.
Description of the drawings
Fig. 1 is streak reflex measuring device and its standard sine bar graph used；Wherein, Fig. 1 a are the mark of horizontal direction
Quasi sine striped；Fig. 1 b are the standard sine bar graph of vertical direction；Fig. 1 c be streak reflex measuring device in display 1,
Camera 2, the position relationship schematic diagram with plane mirror 3.
Fig. 2 a, Fig. 2 b are respectively the briquetting phase Wx (x, y) of horizontal direction and the briquetting phase Wy (x, y) of vertical direction.
Fig. 3 a, Fig. 3 b are respectively normal orthogonal bar graph and the orthogonal bar graph of reflection；Wherein, the first gray scale 4, the second gray scale
5, third gray scale 6 and the 4th gray scale 7.
Fig. 4 a, Fig. 4 b are respectively the phase integer information Ix (x, y, fx) of horizontal direction and the phase integer letter of vertical direction
Cease Iy (x, y, fy).
Fig. 5 a- Fig. 5 d are respectively orthogonal bar graph of first width to the 4th width different space frequency.
Fig. 6 a- Fig. 6 b are respectively the unpacking phase Ux (x, y) of horizontal direction and the unpacking phase Uy (x, y) of vertical direction.
Specific implementation mode
Present invention is further described in detail below in conjunction with the accompanying drawings.
Embodiment 1, the method that quick obtaining unpacks phase in streak reflex measuring device, the present invention use typical item
Line reflecting measurement device projects standard sine bar graph by display, includes the standard of horizontal direction as shown in Fig. 1 a- Fig. 1 c
The standard sine bar graph of sine streak figure and vertical direction, after sample (being one piece of plane mirror in this example) reflection
It as reflection sine streak figure, then is shot by camera, the briquetting phase of sample can be obtained by reflection sine streak figure.It can make
(three step phase-shifting methods, four step phase-shifting methods, fourier transform method etc.) is completed with the general phase recovery method of any type, in this example
Middle selection is four step phase-shifting methods, obtain horizontal direction briquetting phase Wx (x, y) and vertical direction briquetting phase Wy (x,
Y), the two is respectively as shown in Fig. 2 a and Fig. 2 b.
In conjunction with Fig. 3 a, Fig. 3 b, the display in streak reflex measuring device projects width tool there are four types of the standards of gray scale just
Hand over bar graph g (x, y), four kinds of gray scales are sequentially increased, in this example, if the gray scale value range of display between 0~1.0, then
First gray scale g1=0, the second gray scale g2=0.33, third gray scale g3=0.67, the 4th gray scale g4=1.0 is set.According to following
Coding mode generates normal orthogonal bar graph g (x, y)：
Wherein int indicates that downward round numbers operation, fx are the spatial frequency of horizontal direction, and fy is the space frequency of vertical direction
Rate, the two are 1/2 by normalization value.
It is anti-by plane mirror with the camera shooting in streak reflex measuring device in conjunction with Fig. 3 a, Fig. 3 b and Fig. 4 a, Fig. 4 b
It penetrates and is formed by the orthogonal bar graph h (x, y) of reflection, as shown in Figure 3b；Required according to following formula extraction phase unwrapping operation
Horizontal direction phase integer information Ix (x, y, fx) and vertical direction phase integer information Iy (x, y, fy)：
The value of wherein first threshold thr1, second threshold thr2 and third threshold value thr3 in this example is respectively 0.17,
0.5 and 0.83.The phase integer information Ix (x, y, fx) of obtained horizontal direction and vertical direction phase integer information Iy (x,
Y, fy) as shown in Fig. 4 a, Fig. 4 b.
In conjunction with Fig. 5 a- Fig. 5 d, change the level of normal orthogonal bar graph according to the frequency change rule of temporal phase unwrapping
The spatial frequency fx in the direction and spatial frequency fy of vertical direction shares four width not using exponential increase rule in this example
The normal orthogonal bar graph of isospace frequency, as shown in Fig. 5 a- Fig. 5 d.Wherein, it is Fig. 5 d normal orthogonals that spatial frequency is highest
The spatial frequency fx of bar graph, horizontal direction is necessarily equal to the horizontal direction standard sine bar graph sky used in step 1
Between frequency half, be 1/32 in this example；The spatial frequency fy of vertical direction should also be equal to the Vertical Square used in step 1
To the half of standard sine bar graph spatial frequency, 1/32 is also equal in this example.These normal orthogonal bar graphs are projected successively simultaneously
Repeat step step (6) with step (7), can be obtained horizontal direction phase integer information Ix (x, y, fx) under different space frequency and
Vertical direction phase integer information Iy (x, y, fy).
It is whole according to the horizontal direction phase integer information of different space frequency and vertical direction phase in conjunction with Fig. 6 a- Fig. 6 b
Number information carries out phase unwrapping operation according to following weighted sum formula：
Ux(x, y)=Wx(x,y)+∑Ix(x,y,fx)·21/fx
Uy(x, y)=Wy(x,y)+∑Iy(x,y,fy)·21/fx；
Wherein summation operation symbol Σ is used for the space of spatial frequency fx or vertical direction for different horizontal directions
Frequency fy is weighted summation operation.Finally obtain the unpacking phase Ux (x, y) of horizontal direction and the unpacking phase of vertical direction
Uy (x, y), as shown in Fig. 6 a- Fig. 6 b.
Claims (5)
1. a kind of method that quick obtaining in streak reflex measuring device unpacks phase, which is characterized in that steps are as follows：
(1) projects standard sine bar graph to step in streak reflex measuring device with display；Standard including horizontal direction
The standard sine bar graph of sine streak figure and vertical direction；
Step (2) steps (1) in standard sine bar graph after the reflection of mirror-reflection sample, become reflection sine streak
Figure；
(3) shoots (2) reflection sine streak figure that step obtains to step with camera；
The step reflection sine streak figure that (4) (3) shoots step operates according to fringe phase restoration methods, obtains needing to carry out
The briquetting phase Wy (x, y) of the briquetting phase Wx (x, y) and vertical direction of the horizontal direction of phase unwrapping operation, wherein x are cross
To coordinate, y is longitudinal coordinate；
(5) enables the display in streak reflex measuring device project a width normal orthogonal bar graph to step, and there are four kinds in the figure
The gray scale being sequentially increased from low to high, respectively the first gray scale g1, the second gray scale g2, third gray scale g3, the 4th gray scale g4；
The coding mode of the normal orthogonal bar graph g (x, y) is：
Wherein int indicates that downward round numbers operation, fx are the spatial frequency of horizontal direction, and fy is the spatial frequency of vertical direction,
The two is 1/2 by normalization value；
(6) is specularly reflected sample to step with the normal orthogonal bar graph of the camera shooting step (5) in streak reflex measuring device
Product reflection is formed by the orthogonal bar graph h (x, y) of reflection；
Step (7) according to following formula extraction phase unwrapping operation needed for horizontal direction phase integer information Ix (x, y, fx) and
Vertical direction phase integer information Iy (x, y, fy)：
The value of wherein first threshold thr1, second threshold thr2 and third threshold value thr3 is respectively：
Thr1=(g1+g2)/2
Thr2=(g2+g3)/2
Thr3=(g3+g4)/2；
(8) changes rule to step according to the bar graph frequency needed for phase unwrapping operation, changes the level of normal orthogonal bar graph
The spatial frequency fx in the direction and spatial frequency fy of vertical direction, and execute step (5), several normal orthogonal bar graphs are obtained,
In, the spatial frequency fx of the highest width normal orthogonal bar graph of spatial frequency, horizontal direction is necessarily equal to step (1) middle institute
The half of the horizontal direction standard sine bar graph spatial frequency used, (1) the spatial frequency fy of vertical direction is also equal to step in
The half of used vertical direction standard sine bar graph spatial frequency；
(8) the bar graph frequency changes rule to step, be index growth method then or inverse exponential increase rule；
(9) projects (8) normal orthogonal bar graph that step obtains to step successively, and repeat step step (6) with step (7)；It obtains not
Horizontal direction phase integer information Ix (x, y, fx) under isospace frequency and vertical direction phase integer information Iy (x, y, fy)；
Step (10) according to the horizontal direction phase integer information and vertical direction phase integer information of different space frequency, according to
Following weighted sum formula carries out phase unwrapping operation：
Ux(x, y)=Wx(x,y)+∑Ix(x,y,fx)·21/fx
Uy(x, y)=Wy(x,y)+∑Iy(x,y,fy)·21/fx；
Finally obtain the unpacking phase Ux (x, y) of horizontal direction and the unpacking phase Uy (x, y) of vertical direction, wherein summation operation
Symbol Σ is used to be weighted summation fortune for the spatial frequency fx of different horizontal directions or the spatial frequency fy of vertical direction
It calculates.
2. the method that the quick obtaining according to claim 1 in streak reflex measuring device unpacks phase, feature exist
In, the step (2) mirror-reflection sample, including glass-mirror, polishing metal object, smooth plastics part；
The step (4) fringe phase restoration methods, may be used the fringe phase that any one is general in the prior art and restore
Method, such as：Three step phase-shifting methods, four step phase-shifting methods, fourier transform method；
The value of the step (5) first gray scale g1, the second gray scale g2, third gray scale g3, the 4th gray scale g4, g1=0, g2=
0.33, g3=0.67, g4=1.0, it is assumed here that numerical value 0 and 1.0 is respectively the minimum gray scale and highest gray scale of display.
3. the method that the quick obtaining according to claim 1 in streak reflex measuring device unpacks phase, feature exist
In, the step (2) mirror-reflection sample, including glass-mirror, polishing metal object or smooth plastics part.
4. the method that the quick obtaining according to claim 1 in streak reflex measuring device unpacks phase, feature exist
In, the step (4) fringe phase restoration methods, it is selected from following fringe phase restoration methods：Three step phase-shifting methods, four step phase shifts
Method or fourier transform method.
5. the method that the quick obtaining in streak reflex measuring device according to claim 1 or 3 or 4 unpacks phase,
Be characterized in that, step (5) the first gray scale g1, the second gray scale g2, third gray scale g3, the 4th gray scale g4 value be g1=
0, g2=0.33, g3=0.67, g4=1.0, it is assumed here that numerical value 0 and 1.0 is respectively the minimum gray scale and highest ash of display
Degree.
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