JPS607486Y2 - Sheet enlarger - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sheet stretching device used in the manufacturing process of electronic components.

Generally, in the manufacture of electronic components, such as semiconductor devices such as transistors, a plurality of semiconductor pellets (hereinafter simply referred to as pellets) are formed on a single semiconductor wafer (hereinafter simply referred to as wafer), and then this wafer is The wafer is fixed on a stretchable sheet and divided into pellets, then the sheet is stretched radially to separate the divided pellets at a predetermined interval, and the wafer is separated from the sheet using a collet or the like. The process includes peeling off the pellets one by one and taking them out to the pellet position.

By the way, the stretching of the sheet has conventionally been carried out using a device as shown in FIGS. 1 to 4.

That is, in FIGS. 1 and 2, 1 is a stretchable sheet, 2 is a pellet obtained by finely dividing a wafer fixed on the approximate center of the sheet 1, 3 is a heating table, and 4 is a heating device. A support ring 5 attached along the outer periphery of the upper end of the table 3 is a chuck ring having a larger diameter than the support ring 4, and this chuck ring 5 clamps the peripheral portion 1a of the sheet 1 from above and below.

The sheet stretching by this device is performed in the following order.

First, as shown in Fig. 2, the sheet 1 is
Hold the bottom surface of the sheet 1 between the heating table 3 and the support ring 4.
The sheet 1 is placed on a heating table 3 and heated to a temperature suitable for stretching.

Next, the chuck ring 5 is gradually lowered along the rear side of the support ring 4 while supporting the peripheral portion 1a of the sheet 1.

Then, the sheet 1 is pulled by the chuck ring 5, slides on the corner portion 4' of the support ring 4, and is stretched radially as shown in FIG.

When the sheet 1 is stretched, for example, to about 120 to 150% from the initial state, the peripheral portion 1a of the sheet 1 is fixed on the periphery of the support ring 4 via a rubber ring or the like while the sheet 1 is stretched. .

By the way, the above-mentioned conventional device has a direction in which the center portion 1b of the sheet 1 is stretched, and a
As the angle formed by the pulling direction of the peripheral part 1a approaches a right angle, the frictional force of the sheet 1 sliding on the corner part of the support ring 4 increases, and the tension in the peripheral part 1a becomes less likely to be transmitted to the central part 1b. As a result, the stretching efficiency of the central portion 1b is lowered, and the stretching cannot be performed uniformly.

In addition, if the central portion 1b of the tape 1 is stretched insufficiently or unevenly, the interval between the pellets 2 may become narrower than a predetermined value or become uneven, and the pellets 2 may be separated from the sheet 1 in a later process. It becomes difficult to take out each piece one by one.

The present invention improves and eliminates the above-mentioned conventional drawbacks, and provides a device for radially stretching a sheet with simple structure and operation.

For example, when the sheet 1 is stretched, the present invention is carried out using an apparatus as shown in FIGS. 5 to 7.

In FIGS. 5 and 6, 6 is a heating table, and 7 is a support frame attached to the outer periphery of the upper end of the heating table 6. This support frame 7 has a tube 8, which will be described later, along the outer periphery of the upper end. Concave groove 9 to fit into
has.

The tube 8 is ring-shaped as shown in FIG. 9, made of a stretchable material such as rubber, and has an air injection nozzle 10 attached to a part thereof.

The tube 8 is fitted into the groove 9 of the support frame 7, and the air injection nozzle 10 penetrates a part of the groove 9 and is detachably connected to an external air supply system 11.

Next, the sheet enlarging operation by the above apparatus will be sequentially explained.

First, remove the air inside the tube 8, cover the support frame 7 and the heating table 6 with the sheet 1, bend the peripheral part 1a of the sheet 1 from the outer peripheral edge of the upper end surface of the support frame 7, and place it at a position below the concave groove part 9. For example, as shown in FIG. 6, a part of the peripheral portion 1a is fixed on the circumference of the support frame 7 using a rubber band 12.

Next, while mainly heating the central portion 1b of the sheet 1 with the heating table 6, the valve 11' of the air supply system 11 is opened to inject compressed air into the tube 8 from the air injection nozzle 10.

Then, the tube 8 gradually expands, deforms, and presses against the inner peripheral surface of the groove 9.

When compressed air is further injected, a portion of the tube 8 protrudes outward from the groove 9 and swells, and the outer diameter of the tube gradually increases.

At this time, the bulge 8' from the concave groove 9 of the tube 8 is
Press and spread the sheet 1 as shown in the figure.

On the other hand, since a portion of the peripheral portion 1a of the sheet 1 is fixed below the tube 8, the central portion 1b of the sheet 1 is radially stretched by the bulging portion 8' of the tube 8.

When the central portion 1b of the sheet 1 is stretched to a predetermined amount, the injection of compressed air into the tube 8 is stopped and the air pressure inside the tube 8 is maintained constant, and the sheet 1 remains stretched. state is maintained.

Note that the present invention is not limited to stretching tapes used in semiconductor manufacturing equipment, but can also be applied to stretching tapes for laminated ceramic capacitors and the like.

Also, in the illustrated example above, the tape was stretched into a perfect circular shape, but
It may be stretched into an elliptical shape or the like, and such a deformation is possible simply by changing the shape of the support frame.

As explained above, according to the present invention, the outer diameter of the sheet is expanded using a tube that is expanded by injecting compressed air, and the peripheral part of the sheet is expanded and the central part is stretched radially. The stretching direction of the central part of the sheet coincides with the direction of stretching, and therefore the frictional force between the sheet and the tube is reduced, and since this frictional force has almost no effect on the sheet stretching rate, the stretching efficiency of the sheet is the same as above, Uniform stretching becomes possible.

Moreover, since it is only necessary to inject compressed air into the tube, the structure and operation are simplified.

[Brief explanation of drawings]

Fig. 1 is a plan view of a conventional sheet enlarging device before sheet enlarging, Fig. 2 is a sectional view taken along line A-A in Fig. 1, and Fig. 3 is a plan view of Fig. 1 after sheet enlarging. Figure 4 is Figure 3B
5 is a plan view of an embodiment of the apparatus according to the present invention before sheet stretching, and FIG. 6 is a sectional view taken along line B of FIG.
7 is a plan view of the sheet shown in FIG. 5 after being stretched, FIG. 8 is a sectional view taken along line D--D in FIG. 7, and FIG. 9 is a perspective view of the tube. 1... Seat, 1a... Seat periphery, 7... Support frame, End... Tube.

Claims (1)

[Scope of utility model registration request] In an apparatus for radially stretching a stretchable sheet, a stretchable ring-shaped tube is fitted around the upper end of a support frame for stretching the sheet, and the periphery of the sheet placed on the support frame is A sheet stretching device characterized in that a sheet is supported below a tube, air is injected into the tube, and the sheet is pushed and expanded by the tube that expands outward.