JPS6072141A - Liquid metal ion source - Google Patents
Liquid metal ion sourceInfo
- Publication number
- JPS6072141A JPS6072141A JP18187183A JP18187183A JPS6072141A JP S6072141 A JPS6072141 A JP S6072141A JP 18187183 A JP18187183 A JP 18187183A JP 18187183 A JP18187183 A JP 18187183A JP S6072141 A JPS6072141 A JP S6072141A
- Authority
- JP
- Japan
- Prior art keywords
- sample metal
- heating power
- sample
- vapor
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は液体金属イオン源、とくにその試料金属の溶
融状態の制御に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a liquid metal ion source, and particularly to control of the molten state of a sample metal thereof.
従来この種の装置として第1図に示すものがあった。。 A conventional device of this type is shown in FIG. .
第1図は従来の液体金属イオン源ケ示す構成図であり、
図において、(りは真空排気装置、(2)はエミッタの
加熱用電源、l311d試料金属で、(41のエミッタ
にマウントされている。エミッタ(4)の先端は針状に
加工されており、その先端半径は通常数μmまで研磨さ
れている。(61ハ高圧電源、(6al。Figure 1 is a configuration diagram showing a conventional liquid metal ion source.
In the figure, (ri) is a vacuum evacuation device, (2) is a power source for heating the emitter, l311d is a sample metal, and (41) is mounted on the emitter. The tip of the emitter (4) is processed into a needle shape. The radius of its tip is usually polished to several micrometers. (61c high voltage power supply, (6al).
(6b)に電流計、(7)扛覗き窓、(8)は非接触式
測温器、(9)は絶縁端子、(10)はドーナツ状電極
、(11)は電極である。(6b) is an ammeter, (7) is a viewing window, (8) is a non-contact temperature measuring device, (9) is an insulated terminal, (10) is a donut-shaped electrode, and (11) is an electrode.
次に動作について説明する。Next, the operation will be explained.
真空排気装vi+にて真空槽内f 10 ’Torr台
の真空度1で排気後、加熱用電源(2)?作動し、試料
金属(3)が溶融する温度までエミッタ(4)先端ケ加
熱すると、溶けた試料金属はエミッタ先端の針状部まで
薄く試料金属被膜を形成する。次いで高圧電源(51全
作動させ、1okV程度の高電圧をエミッタ(4]ニ印
加すれば、その針状先端部から試料金属(3)のイオン
化が始まる。そのイオン電流は電流計(6a)、 (6
b)で測定される。After evacuating the vacuum chamber at a vacuum level of f 10' Torr level 1 using the vacuum evacuation system vi+, power supply for heating (2)? When the sample metal (3) is activated and the tip of the emitter (4) is heated to a temperature at which the sample metal (3) melts, the molten sample metal forms a thin sample metal coating up to the acicular portion of the emitter tip. Next, when the high-voltage power supply (51) is fully activated and a high voltage of about 1 okV is applied to the emitter (4), ionization of the sample metal (3) begins from its needle-like tip.The ion current is measured by the ammeter (6a), (6
b).
ところで、安定したイオン化放出7行なわせるためには
、試料金属(3)の温度ケ上げてその粘度を下げてやる
ことが望ましいが、温度が上りすぎると、蒸発嵐が増え
、かえってイオン化放出特性は不安定となる。By the way, in order to achieve stable ionization release 7, it is desirable to raise the temperature of the sample metal (3) to lower its viscosity, but if the temperature rises too much, evaporation storms will increase and the ionization release characteristics will deteriorate. Becomes unstable.
したがって、エミッタ先端部の温度を適正に制御するこ
とが必要となり、通常、覗き窓(7)ケ通して非接触式
測温器(8)で測温し、自動あるいけ手動で加熱用電源
(2)全制御していた。Therefore, it is necessary to properly control the temperature of the emitter tip, and usually the temperature is measured with a non-contact thermometer (8) through the viewing window (7), and the temperature is measured automatically or manually with the heating power source (8). 2) It had full control.
従来の液体金属イオン源は以上のように構成されており
、試料金属の温度を正確に知ることが難しく、試料金属
の粘度全適正に保ちにくいため、イオン化放出特性が安
定しないという欠点があった0
〔発明の概要〕
この発f5E1t6上記のような従来のも′のの欠点ケ
除去するためになされたもので“、試料金属に固有なホ
ロカソードランプよりなり、試料金属の蒸気に光を発す
る光源、上記蒸気中を通過した光信号ケ検出する光検出
部、およびこの光検出部から出方される信号値により、
加熱用電源全フィードバック制御する制御回路により、
試料金属の溶融状態全制御することにより、安定したイ
オン化放出ケ行うことのできる液体金属イオン源全提供
することケ目的としている。Conventional liquid metal ion sources are configured as described above, but have the disadvantage that the ionization and release characteristics are unstable because it is difficult to accurately know the temperature of the sample metal and it is difficult to maintain the viscosity of the sample metal at an appropriate level. 0 [Summary of the Invention] This invention was made in order to eliminate the drawbacks of the conventional model as described above.It consists of a hollow cathode lamp unique to the sample metal, and emits light into the vapor of the sample metal. A light source, a photodetection unit that detects the optical signal passing through the vapor, and a signal value output from this photodetection unit,
A control circuit that performs full feedback control of the heating power supply,
The purpose is to provide a liquid metal ion source that can perform stable ionization and release by fully controlling the melting state of the sample metal.
以下この発明の実施例2図について説明する。 Embodiment 2 of the present invention will be described below.
第2図はこの発明の一実施例による液体金属イオン源を
示す構成図であり、イオン化放出が実際に行われている
状態を示している。図において、(6)は電流計、(7
a)、 (乃)は各々光の入射窓、出射窓である。(1
21は光源で、試料金属(3)に固有なホロカソードラ
ンプよりなり、試料金属(3)の蒸気(15)に光を発
する。03)は蒸気α5)中を通過した光言号071ケ
検出する光検出部で、通常干渉フィルタおよび光71i
子増倍管から構成されている。α4)は光検出部α3)
から出力される[信号値により、加熱用電源(2)全フ
ィードバック制御する制御回路である。矢印(16)は
溶融した試料金属(3)表面から蒸発している試”料金
用(3)の蒸−気である。Q6)Uイオン流である。FIG. 2 is a block diagram showing a liquid metal ion source according to an embodiment of the present invention, and shows a state in which ionization and emission are actually performed. In the figure, (6) is an ammeter, (7
a) and (no) are a light entrance window and an exit window, respectively. (1
A light source 21 is a hollow cathode lamp specific to the sample metal (3), and emits light to the vapor (15) of the sample metal (3). 03) is a light detection unit that detects the light signal 071 that has passed through the steam α5), and is usually equipped with an interference filter and light 71i.
Consists of child multiplier tubes. α4) is the photodetector part α3)
This is a control circuit that performs full feedback control of the heating power source (2) based on the signal value output from the heating power source (2). The arrow (16) is the sample vapor (3) evaporating from the surface of the molten sample metal (3).Q6) U ion flow.
次に動作について説明する。Next, the operation will be explained.
光源(1212発した光は試料金属蒸気Q51中?通過
する際に、一部吸収され、この光随号(1ηが光検出部
03)で検出される。これにより試料金属蒸気量(蒸気
濃度)全測定することができる。この試料金属蒸気量は
試料金属(3)の温度により変化するので、蒸気濃度が
一定となる様に加熱用電源(2)全フィードバック制御
する。即ち、制御回路θ4)により光検出部(13)か
ら出力される信号値をあらかじめ設定された所定値と比
較し、光検出部(13)からのは号値が大のときけ加熱
用電源(2)の出力電圧が小さくなるように制御し、上
記信号値が小のときけ出力電圧を太きくするようにフィ
ードバック制御して、光検出部(13)で検出されるは
号が所定値になるようにしている。このようにすること
により、試料金属(3)の温度全適正に制御でき、安定
なイオン化放出が行える。When the light emitted from the light source (1212) passes through the sample metal vapor Q51, it is partially absorbed, and this light is detected by the light detector (1η is the photodetector 03).This allows the amount of sample metal vapor (vapor concentration) Since the sample metal vapor amount changes depending on the temperature of the sample metal (3), the heating power source (2) is fully feedback-controlled so that the vapor concentration is constant. That is, the control circuit θ4) The signal value output from the photodetector (13) is compared with a predetermined value set in advance, and if the signal value from the photodetector (13) is large, the output voltage of the heating power source (2) is When the signal value is small, feedback control is performed to increase the output voltage so that the signal detected by the photodetector (13) becomes a predetermined value. By doing so, the temperature of the sample metal (3) can be controlled appropriately, and stable ionization and release can be performed.
なお、上記実施例では、蒸気濃度が一定となるように、
加熱用電源(2)をフィードバック制御しているが、蒸
気濃度が所定値以上になった場合に加熱用電源(2)金
切り、所定値以下になれば入れるというだけの制御でも
よい。In addition, in the above example, so that the vapor concentration is constant,
Although the heating power source (2) is feedback-controlled, the heating power source (2) may be simply turned off when the vapor concentration exceeds a predetermined value, and turned on when the vapor concentration is below a predetermined value.
〔発明の効果〕
以上のように、この発E3AKよれは、試料金属に固有
なホロカソードラングよりなり、試料金Hの蒸気に光を
発する光源、上記蒸気中全通過した光信号を検出する光
検出部、およびこの光検出部から出力される信号値によ
り、加熱用電源をフィードバック制御する制御回路によ
り、試料金属の溶融状態を制御したので、イオン化放出
特性が安定する効果がある。[Effects of the Invention] As described above, this emitting E3AK twist consists of a hollow cathode rung unique to the sample metal, a light source that emits light into the vapor of the sample H, and a light source that detects the optical signal that has completely passed through the vapor. Since the molten state of the sample metal was controlled by a control circuit that feedback-controlled the heating power supply based on the detection section and the signal value output from the photodetection section, the ionization emission characteristics were stabilized.
第1図は従来の液体金属イオン源を示す構成図、第、2
図げこの発明の一実施例に、Cる液体金属イオン源を示
す構成図である。
図において、(2)・・・加熱用電源、(3)・・・試
料金属、(4)・・・エミッタ、021・・・光源、t
131・・・光検出部、(I4)・・・制御回路、06
)・・蒸気、(16)・・イオン流、071・・・光1
言号なお、図中、同一符号は同−又げ相当部分を示す。
代理人 大岩増雄
第1図
第2図Figure 1 is a block diagram showing a conventional liquid metal ion source;
FIG. 1 is a configuration diagram showing a liquid metal ion source C in an embodiment of the present invention. In the figure, (2)...Heating power supply, (3)...Sample metal, (4)...Emitter, 021...Light source, t
131...Photodetection section, (I4)...Control circuit, 06
)...Steam, (16)...Ion flow, 071...Light 1
In the drawings, the same reference numerals indicate the same and corresponding parts. Agent Masuo Oiwa Figure 1 Figure 2
Claims (2)
させ、上記試料金属の被膜により覆われたエミッタに高
電圧を印加して、上記エミッタ先端より上記試料金属分
イオン化放出させるものにおいて、上記試料金属に固有
なホローカン−トランプよりなり、上記試料金属の蒸気
に光を発する光源、上記蒸気中?通過した光信号全検出
する光検出部、および上記光検出部から出方されるは号
値により上記加熱用電源をフィードバック制御する制御
回1gVCより上記試料金属の溶融状態全制御したこと
を特徴とする液体金属イオン源。(1) The sample metal on the emitter is melted by a heating power source, and a high voltage is applied to the emitter covered with a film of the sample metal to ionize and release the sample metal from the tip of the emitter. A light source consisting of a hollow can-tramp unique to metals, which emits light into the vapor of the sample metal; The molten state of the sample metal is completely controlled by a photodetector that detects all the optical signals that have passed through it, and a control circuit 1gVC that feedback-controls the heating power source based on the signal value output from the photodetector. liquid metal ion source.
値になるように、上記信号個分あらかじめ設定された所
定値と比較して加熱用電源全制御するようVca成した
ことを特徴とする特許請求の範囲第1項記載の液体金属
イオン源。(2) The control circuit is characterized in that Vca is set so that the signal value output from the photodetector section becomes a predetermined value by comparing the signal with a preset predetermined value and controlling the entire heating power supply. A liquid metal ion source according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18187183A JPS6072141A (en) | 1983-09-28 | 1983-09-28 | Liquid metal ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18187183A JPS6072141A (en) | 1983-09-28 | 1983-09-28 | Liquid metal ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6072141A true JPS6072141A (en) | 1985-04-24 |
Family
ID=16108302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18187183A Pending JPS6072141A (en) | 1983-09-28 | 1983-09-28 | Liquid metal ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6072141A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100484629B1 (en) * | 2002-10-30 | 2005-04-22 | 모딘코리아 유한회사 | Oxygen Supply Device and Control Process for Vehicle |
-
1983
- 1983-09-28 JP JP18187183A patent/JPS6072141A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100484629B1 (en) * | 2002-10-30 | 2005-04-22 | 모딘코리아 유한회사 | Oxygen Supply Device and Control Process for Vehicle |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Lundgren et al. | Temperature controlled heating of the graphite tube atomizer in flameless atomic absorption spectrometry | |
US20060214580A1 (en) | Photoelectric ion source photocathode regeneration system | |
US4526034A (en) | Krypton hygrometer | |
JPS6072141A (en) | Liquid metal ion source | |
US2727118A (en) | Heat sensitive resistor | |
FR1454765A (en) | Improvements to electrical vapor detectors | |
JP3287140B2 (en) | Light beam heating device | |
US3535088A (en) | Halogen vapor detector | |
US3967904A (en) | Precision radiation source regulation circuit | |
US4941743A (en) | High stability high intensity atomic emission light source | |
JPH05281073A (en) | Pirani gauge | |
US4866722A (en) | Metal vapor laser device stabilizing system | |
JP2793032B2 (en) | Accelerated weathering tester | |
SU1451591A1 (en) | Triple-contact crucible-type electrothermal atomizer | |
JP3006057B2 (en) | Sample atomization device | |
JPS60225345A (en) | Power supply for electric field emitting cathode | |
JPS6248182B2 (en) | ||
JPS608400Y2 (en) | X-ray device | |
JPS60251270A (en) | Liquid metal as ion source | |
JPH0582061A (en) | Flushing control device for liquid metal ion source | |
JPS58223391A (en) | Gas laser device | |
JP2565068B2 (en) | Atomic absorption spectrophotometer | |
Bentley et al. | Improved Method for Making Electrodeless Discharge Lamps | |
Worden Jr | High intensity light sources (Part II of Thesis) | |
JPH0369137B2 (en) |