JPS606885A - Shape detector for body to be measured - Google Patents

Abstract

PURPOSE:To detect the shape of a body to be measured with high precision by varying the relative position relation between an ultrasonic wave transmitting and receiving element and the body to be measured, and processing the intensity levels of reflected signals from the body to be measured succeeding to the 2nd signal intensity. CONSTITUTION:The operation of a manipulator 50 is controlled with a control signal from a data processing controller 51 through a manipulator controller 52, and consequently the relative position relation between the body to be measured and ultrasonic wave transducer 53 is varied. Reflected signals detected by the transducer 53 from the objective body are inputted to a memory 58 through a receive signal amplifier 56 and an A/D converter 57. The data processor 51 consists of an interface control unit 59, floppy-disk driving device 60, and CPU61, and the intensity levels of the reflected signals succeeding to the 2nd intensity are processed to detect the shape of the objective body.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for detecting the shape of an object to be measured using ultrasonic waves.

Configuration of conventional example and its problems Conventional device for detecting the shape of a measured object detects the position and orientation of the measured object from the reflected signal strength obtained by rotating and scanning the ultrasonic transceiver element with respect to the measured object. There is something that detects

The outline of the contents will be explained below.

FIG. 1 is a stem diagram showing the general configuration of a conventional device. FIG. 2 is a perspective view showing shape detection using a conventional device. In FIG. 1, when a high voltage pulse 17 shown in the third figure is applied to the ultrasonic transceiver element 1, an ultrasonic pulse of a predetermined frequency is emitted into the air. This ultrasonic pulse is the second
It is reflected by the target object 13 in the figure, and each side 14 of the target object 13
, 16° 16 reaches the ultrasonic transceiver element 1, and after being amplified by the receiving signal amplifier 3, the analog-
It is digitally converted and stored in the memory 16.

FIG. 3 shows the ultrasonic transceiver element 1 stored in the memory 16.
37 and 38 degrees 39 indicate the reflected signals from the respective sides 14 and 16 degrees 16 of the target object 13, respectively. The reflected signals stored in the memory 16 are transferred to the small electronic computer 6, and the reflected signals 37, 38 .
39 propagation time 40, 41.42 and reflected signal strength 43
, 44°46 are detected.

In addition, in FIG. 2, the ultrasonic transmitting/receiving element 1 (rjl) is configured to rotate and scan in the directions of arrows A and B via a pulse motor driver 11 and a pulse motor 10 according to a control signal from a small electronic computer 6. The propagation time and intensity of the reflected signal between the objects to be measured are detected while stepping the ultrasonic wave transmitting/receiving element 1 at a predetermined angle.Figure 4 shows the ultrasonic wave transmitting/receiving element 1 rotated and scanned. The intensity of the reflected signal from the object to be measured 13 is plotted with the rotation angle of the ultrasonic transceiver element on the horizontal axis and the intensity of the reflected signal on the vertical axis. The reflected signals from each side 14, 15, and 16 of the object to be measured 13 are arranged based on the rotational scanning angle of the ultrasonic wave transmitting/receiving element 1 when the respective reflected signal intensity is maximum.
, 15.16 directions are detected. Since the distance to each week of the object to be measured can be obtained from i7 from the propagation time of the reflected signal described above, the coordinates of each side 13, 14, 15 of the object to be measured 13 can be determined, and the position of the object to be measured 13 and Posture can be detected.

However, when a conventional position/orientation detection device is applied to detect the shape of a hole/groove, it is possible to detect the shape of a large diameter hole or Id wide groove, but it is not possible to detect the shape of a small diameter hole or small or medium groove.
There was a problem in that the reflected signals from each side of the hole/groove were superimposed, and the shape could not be detected unless the attenuation of the ultrasonic transceiver element was significantly improved.

Purpose of the Invention The present inventors conducted extensive research on a device that detects the shape of two series of small-diameter holes and narrow-width grooves without significantly improving the attenuation of the ultrasonic wave transmitting/receiving element, using the ultrasonic wave transmitting/receiving element. Among the reflected signals obtained by transmitting and receiving ultrasonic waves to and from the measured object,
The present invention has been achieved by discovering that all of the above problems can be solved by using means for signal processing the second and subsequent reflected signal strengths.In other words, the present invention eliminates the drawbacks mentioned above, has a simple structure, and has a small diameter. The purpose of this invention is to provide a device that can detect the shape of holes and narrow grooves with high precision.

Structure of the Invention The present invention provides means for transmitting and receiving ultrasonic waves to and from an object to be measured using an ultrasonic wave transmitting/receiving element, means for changing the relative positional relationship between the ultrasonic wave transmitting and receiving element and the object to be measured; The present invention provides an apparatus for detecting the shape of the object to be measured by means of signal processing the second and subsequent reflected signal intensities among the intensities of the reflected signals from the object to be measured.

DESCRIPTION OF EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings.

FIG. 6 is a system diagram showing an outline of the groove shape detection device in the first embodiment of the present invention. ′! ! , FIG. 6 is a perspective view of shape detection using the shape detection device of the first embodiment of the present invention, and FIG. 7 is a plan view thereof.

In FIG. 5, reference numeral 60 denotes a manipulator of the robot, whose operation is controlled via a manipulator control device 52 in response to control signals from a data processing control device 51. Further, on the manipulator 60, as shown in FIG. 6, an ultrasonic transducer 63 for both transmitting and receiving waves is installed.

The ultrasonic transducer 53 uses an oscillator 56 to transmit ultrasonic waves of a predetermined frequency toward the groove 66 of the target object 54, and receives the reflected signals as waves 1-2. Ultrasonic I・
The received signal output from the run dazer 53 passes through the received signal amplifier 66 and then passes through the analog-to-digital converter 6.
It is called a 1,000' A/D converter. ) is converted into a digital value and stored in the memory 68. Furthermore, a data processing control device 61 is provided, and this data processing control device 61
is InterfaceCo/TrollUni 1,169 (hereinafter referred to as I
It's called CU. )・Floppy disk drive device 60 (
Hereinafter referred to as FDD. ) and a small electronic B1 calculator 61 (hereinafter referred to as CPU). ICUcs9 is F
It is connected to DDeo and the CPU 61, and also to the oscillator 65 and memory 58 mentioned above. FDDeO inputs a program or various conditions for performing shape detection using this shape detection device. This data processing control device 61
, outputs a control signal for operating the oscillator 56, outputs a control signal to the manipulator control device 62 for controlling the operation of the manipulator 50, and preprocesses the long sword data transferred from the memory 58. , FDDeo detects the reflected signal intensity, calculates the shape of the groove of the target object, and calculates the amount of movement of the manipulator 50 using the CPUel, according to a program installed in advance from the FDDeo.

Next, the operation of the shape detection device configured as described above will be explained. In this embodiment, when the diameter of the ultrasonic transducer 63 shown in FIG.
The distance of the jinsducer 53 is 100 mm, the target object 64
A case will be described in which the width of the groove 660 is 5 mm and the depth is 10 mm, the wave transmitting/receiving surface of the ultrasonic transducer 53 faces the target object 64, and scanning is performed in the direction of the arrow in steps of 0.2 mm.

Shape detection is performed in accordance with the procedure of the shape detection program shown in the flowchart of FIG. 8, which has been preinstalled from FDDeo. In the flowchart of FIG. 8, in step 1, the manipulator 50 is driven by the control signal from the data processing control device 61 via the manipulator control device 62 to move the ultrasonic transducer 63 to the sensing start position. do. In FIG. 6, 62 indicates the center position of the ultrasonic beam transmitted from the ultrasonic transducer 53. Furthermore, the 63-digit sensing section 64 at the start of sensing indicates the intersection of the center position of the ultrasonic beam and the target object 64 at the end of sensing, and sensing is performed within this section. In this example, the number of sensing intervals is 4.
It is 0M.

Next, in step 2, the oscillator 66 is operated by the control signal from the data processing control device 51, and the ultrasonic transducer 63 transmits ultrasonic waves of a predetermined frequency toward the object to be measured 6-4. The D converter 67 and memory 68 are operated to store the reflected signal from the target object 64 in the memory 68. FIG. δ shows the reflections and signals stored in the memory 58.

Reference numeral 67 indicates the first reflected signal from the planar portion 66 of the target object 54, and 68' and 69 indicate the second reflected signals, respectively.

Next, in step 3, the reflected signal stored in the memory 68 is
Transfer to CPtJesl via CU69.

The CPU 61 detects the reflected signal intensities P1 to P3 of the reflected signal 67 from the planar portion 66 of the target object 64 according to a program inputted in advance from the FDD 60.

Next, in step 4, move the manipulator 50 by 0.2+nm in the eight directions of the arrows and repeat step 1. After repeating step 2 and completing a predetermined number of sensing operations (200 times in this embodiment), the process proceeds to step 5.

In Step 5, the center position and width of the detection target groove 65 are detected based on the intensity of the reflected signal from the target object 54 including the detection target groove 65 obtained in Steps 2 and 3 above. FIG. 10 shows the reflected signal intensity from the flat portion 66 of the target object 54 when the ultrasonic transducer 63 is scanned in the direction of the arrow, and the horizontal axis represents the scanning amount of the ultrasonic transducer 63.

The reflected signal intensity is plotted every 6 points on the vertical axis.The CPU 61 detects the minimum value of the reflected signal intensity according to a program input from the FDD 60 in advance to detect the center position of the groove 66. There is. In FIG. 10, B is an arrangement of reflected signal intensities P1 generated as a result of multiple reflections of the ultrasonic waves transmitted from the ultrasonic transducer 53 between the target objects 54 as shown in FIG. 9, and C1D is The reflected signal strength P2. This is an arrangement of P3. In Fig. 11, groove detection sensitivity 51d-0,7
dB, S2 was -2-dB, and S3 was -2.8 dB. The groove detection sensitivity S required to detect the center position of the groove 65 needs to be -1.5 dB or more considering the reliability of the detection result, and even if the first reflected signal strength S1 is processed, the groove detection sensitivity S is required to detect the center position of the groove 65. 65 is difficult to detect, and the second and third reflected signal intensities S2. It is possible to detect the center position of the groove 65 only by signal processing S3, and as a result of detecting the center position of the groove 66 from the minimum values of the reflected signal intensities P2 and P3, a position accuracy of 0.2 square meters was obtained for each.

Further, a threshold intensity is set, and the ultra-single wave transducer 6 corresponding to the section where the threshold intensity crosses the reflected signal intensity is set.
By detecting the parallel scanning amount W of 3, the detection target groove 65
The width of is being detected. Regarding the width detection of the groove 66, the groove detection sensitivity S needs to be -1.5 dB or more as in the above-mentioned center position detection, and the second and third reflected signal strengths S2. S
3) The groove 650 width can be detected only by signal processing, and parallel scanning of the ultrasonic transducer 63 is set in the section where the set threshold intensity 70.71 crosses the CD in which the respective reflected signal intensities are arranged. Amount W2. As a result of detecting W3, a position accuracy of 0.2 was obtained.

As described above, according to this embodiment, the ultrasonic transducer 63 is used to transmit and receive ultrasonic waves to the target object 54 having the groove 65, and at the same time, the manipulator 60 is operated to transmit the ultrasonic wave to the target object 54. Sound wave transducer 53
Among the reflected signal intensities from the groove 65 of the target object 54 obtained by scanning, the second and subsequent reflected signal intensities P2. By signal processing P3, it was possible to obtain high groove detection sensitivity, thereby obtaining highly accurate groove center position and width detection results.

As described above, among the multiple reflection signals from the target object 54, the groove detection sensitivity S is higher for the second signal than for the first signal, but this phenomenon can be explained as follows.

In this embodiment, the ultrasonic transducer 63 is
The intensity of the first reflected signal when placed at the center of the groove 66 is approximately 10 times lower than the intensity of the reflected signal when placed at the flat portion 66 where the groove 66 is not present. However, in the case of multiple reflections, This becomes a vibration source and the ultrasonic transducer 6
Ultrasonic waves are transmitted from the ultrasonic transducer 53
Due to the synergistic effect, the intensity of the second reflected signal when C is placed opposite the center position of the groove 66 is approximately 20
%descend. Therefore, groove detection sensitivity is reduced. Note that the relationship between the second reflected signal strength P2 and the third reflected signal strength is also the same as above.

Next, a second embodiment of the present invention will be described with reference to the drawings.

FIG. 11 is a system diagram schematically showing a hole shape detection device according to a second embodiment of the present invention. In FIG. 11, the manipulator control device 91 moves the manipulator 72 to
- It has a configuration that allows it to operate on two orthogonal axes, the Y-axis. The system configuration other than this is the same as that of the first embodiment described above.

FIG. 12 is a perspective view showing hole shape detection by the shape detection device of this embodiment.

Next, the operation of the shape detection device configured as described above will be explained. In this embodiment, the diameter of the ultrasonic transducer 73 shown in FIG. 12 is 36-2, the distance between the target object 81 and the ultrasonic transducer 73 is 100 mm, and
The diameter of the hole 82 is 6 cylinders, and the ultrasonic transducer 73
The transmitting/receiving wave surface faces the target object 81, and the case where the ultrasonic transducer 73 scans the target object 81 in the X-Y axis in steps of 0.2 mm will be explained.
Shape detection is performed using the 13th
This is carried out according to the procedure of the shape detection program shown in the flowchart of the figure. In the flowchart of FIG. 13, in step 1, the ultrasonic transducer 73 is moved to the X-axis sensing start position, as in the first embodiment.

In FIG. 11, 83 indicates the center position of the ultrasonic beam transmitted from the ultrasonic transducer 73. Dimensions 84
is when sensing starts in the X-axis direction, 85 is when sensing is completed in the X-axis direction, 86 is when sensing is started in the Y-axis direction, and 87 is the center position of the ultrasonic beam when sensing is completed in the Y-axis direction. Indicates the intersection of the target object 81, and
The sensing of the axis is performed within each of these intervals (each 40 degrees in this example).

Next, in steps 2 and 3.4, the manipulator 72 is operated in the same manner as in the first embodiment, and the ultrasonic transducer 73 is scanned in parallel in the X-axis direction to detect the detection target hole 82.
The center position of the detection target hole 82 in the X-axis direction is detected based on the intensity of the second reflected signal from the target object 81 including .

Next, in step 5, the manipulator 72 is operated to sense the ultrasonic transducer 73 in the Y-axis direction.
Move to the sensing start position on the Y axis. At this time, the X coordinate of the intersection between the center position of the ultrasonic beam and the target object 81 is set to be the same as the center position coordinate of the hole detected by sensing in the X-axis direction described above.

Next, in step 2.3.4, the manipulator 72 is operated in the same manner as in the first embodiment, and the ultrasonic transducer 73 is scanned in parallel in the Y-axis direction to obtain the detection target hole 8.
The center position of the hole 82 in the Y-axis direction is detected based on the intensity of the second reflected signal from the target object 81 including the hole 82. This allows the coordinates of the center position of the hole 82 to be detected. Furthermore, the diameter of the detection target hole 82 is detected in the same manner as in the first embodiment. In this example, the detection sensitivity of the hole 82 was 12 dB in both the X and Y axes directions, and the center position and diameter of the hole 82 were detected from this, and as a result, a position accuracy of 0.2 brains was obtained for each.

In this embodiment, an example has been described in which a hole 82 with a diameter of 6 rMl is detected using the ultrasonic transducer 73 with a diameter of 361M1, but a hole 82 with a smaller diameter can also be detected. Figure 14 shows the hole detection sensitivity when detecting a small diameter hole with the same configuration as this example. By doing this, the diameter of 3-meters is up to -1,5d.
Hole detection sensitivity of B or higher was obtained, and the center position and diameter of the hole could be detected, with a positional accuracy of 0.2 mm for each.

Effects of the Invention As described above, the present invention can be obtained by transmitting and receiving ultrasonic waves to and from an object to be measured using an ultrasonic wave transmitting and receiving element, and at the same time scanning the ultrasonic wave transmitting and receiving element to the object to be measured. Since the shape of the object to be measured is detected by signal processing the second and subsequent reflected signal intensities among the reflected signals, it is possible to obtain a highly accurate shape detection device with a simple configuration, and its practical effects are as follows. There is something called a dog.

[Brief explanation of the drawing]

FIG. 1 is a system diagram showing the general configuration of a conventional ultrasonic shape detection device, FIG. 2 is a perspective view of shape detection using the conventional device, and FIG. 3 is a diagram showing operating waveforms of the conventional device. FIG. 4 is a diagram arranging the operating waveforms of the conventional device, FIG. 6 is a system diagram showing the schematic configuration of the device in the first embodiment of the present invention, and FIG. FIG. 7 is a perspective view of shape detection, FIG. 7 is a cross-sectional view of the same, FIG. 8 is a flowchart showing an example of a program for groove shape detection in the first embodiment of the present invention, and FIG. 9 is a diagram of the first embodiment of the present invention. FIG. 10 is a diagram illustrating the operating waveforms of the shape detection device in the first embodiment of the present invention, and FIG. 11 is a schematic diagram of the device in the second embodiment of the present invention. A system diagram showing the configuration, FIG. 12 is a perspective view of hole shape detection in the second embodiment of the present invention, and FIG. 13 is a flow chart diagram showing an example of a program for hole shape detection in the second embodiment of the present invention. , FIG. 14 is a diagram showing the hole detection sensitivity in the second embodiment of the present invention. 50.72°゛°“・Manipulator, 53.73・・
...Ultrasonic transducer-161...CP
U. 66...groove, 82...hole. Fig. 1 Fig. 3 Fig. 4 Fig. 5 Dowa Oshi Climb of Month 1 Kidney Pipe i+%ii)
(Cliff) Fig. 7 5 Fig. 8 89 Fig. 18 Open Fig. 10 R't: AJ-Lance; i-fivLtLmm + 11th
Figure 12 Figure 13

Claims (2)

[Claims] (1) means for transmitting and receiving ultrasonic waves to and from the object to be measured using an ultrasonic wave transmitting and receiving element; means for changing the relative positional relationship between the ultrasonic wave transmitting and receiving element and the object to be measured; An apparatus for detecting the shape of an object to be measured, comprising a signal processing means for detecting the shape of the object by signal processing the second and subsequent reflected signal intensities among the reflected signal intensities of the object. (2) The shape detection device 0 of the object to be measured according to claim 1, wherein the object to be measured is a hole or a slit.