JPS6068432U - ガス流量計用圧力補正装置 - Google Patents

ガス流量計用圧力補正装置

Info

Publication number
JPS6068432U
JPS6068432U JP15866883U JP15866883U JPS6068432U JP S6068432 U JPS6068432 U JP S6068432U JP 15866883 U JP15866883 U JP 15866883U JP 15866883 U JP15866883 U JP 15866883U JP S6068432 U JPS6068432 U JP S6068432U
Authority
JP
Japan
Prior art keywords
rotating shaft
gas flow
pressure
flow meter
wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15866883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213928Y2 (enExample
Inventor
横田　文夫
Original Assignee
オーバル機器工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オーバル機器工業株式会社 filed Critical オーバル機器工業株式会社
Priority to JP15866883U priority Critical patent/JPS6068432U/ja
Publication of JPS6068432U publication Critical patent/JPS6068432U/ja
Application granted granted Critical
Publication of JPH0213928Y2 publication Critical patent/JPH0213928Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
JP15866883U 1983-10-15 1983-10-15 ガス流量計用圧力補正装置 Granted JPS6068432U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15866883U JPS6068432U (ja) 1983-10-15 1983-10-15 ガス流量計用圧力補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15866883U JPS6068432U (ja) 1983-10-15 1983-10-15 ガス流量計用圧力補正装置

Publications (2)

Publication Number Publication Date
JPS6068432U true JPS6068432U (ja) 1985-05-15
JPH0213928Y2 JPH0213928Y2 (enExample) 1990-04-17

Family

ID=30349481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15866883U Granted JPS6068432U (ja) 1983-10-15 1983-10-15 ガス流量計用圧力補正装置

Country Status (1)

Country Link
JP (1) JPS6068432U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8114720B2 (en) 2008-12-25 2012-02-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873658U (enExample) * 1971-12-09 1973-09-13
JPS5125157A (enExample) * 1974-06-28 1976-03-01 Siemens Ag

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873658U (enExample) * 1971-12-09 1973-09-13
JPS5125157A (enExample) * 1974-06-28 1976-03-01 Siemens Ag

Also Published As

Publication number Publication date
JPH0213928Y2 (enExample) 1990-04-17

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