JPS6063371A - チタニウムカ−バイド被覆方法 - Google Patents

チタニウムカ−バイド被覆方法

Info

Publication number
JPS6063371A
JPS6063371A JP16932383A JP16932383A JPS6063371A JP S6063371 A JPS6063371 A JP S6063371A JP 16932383 A JP16932383 A JP 16932383A JP 16932383 A JP16932383 A JP 16932383A JP S6063371 A JPS6063371 A JP S6063371A
Authority
JP
Japan
Prior art keywords
coating
gaseous
temperature
tic
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16932383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147905B2 (https=
Inventor
Shiro Morita
森田　四郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
Fujikoshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nachi Fujikoshi Corp, Fujikoshi KK filed Critical Nachi Fujikoshi Corp
Priority to JP16932383A priority Critical patent/JPS6063371A/ja
Publication of JPS6063371A publication Critical patent/JPS6063371A/ja
Publication of JPS6147905B2 publication Critical patent/JPS6147905B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP16932383A 1983-09-16 1983-09-16 チタニウムカ−バイド被覆方法 Granted JPS6063371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16932383A JPS6063371A (ja) 1983-09-16 1983-09-16 チタニウムカ−バイド被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16932383A JPS6063371A (ja) 1983-09-16 1983-09-16 チタニウムカ−バイド被覆方法

Publications (2)

Publication Number Publication Date
JPS6063371A true JPS6063371A (ja) 1985-04-11
JPS6147905B2 JPS6147905B2 (https=) 1986-10-21

Family

ID=15884413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16932383A Granted JPS6063371A (ja) 1983-09-16 1983-09-16 チタニウムカ−バイド被覆方法

Country Status (1)

Country Link
JP (1) JPS6063371A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8579768B2 (en) 2007-05-08 2013-11-12 Nike, Inc. Training ladder formed with polygon segments

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424914A (en) * 1977-07-27 1979-02-24 Tokyo Shibaura Electric Co Method of making ceramic sintered body

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424914A (en) * 1977-07-27 1979-02-24 Tokyo Shibaura Electric Co Method of making ceramic sintered body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8579768B2 (en) 2007-05-08 2013-11-12 Nike, Inc. Training ladder formed with polygon segments

Also Published As

Publication number Publication date
JPS6147905B2 (https=) 1986-10-21

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