JPS6059350U - Sample moving device - Google Patents
Sample moving deviceInfo
- Publication number
- JPS6059350U JPS6059350U JP15094283U JP15094283U JPS6059350U JP S6059350 U JPS6059350 U JP S6059350U JP 15094283 U JP15094283 U JP 15094283U JP 15094283 U JP15094283 U JP 15094283U JP S6059350 U JPS6059350 U JP S6059350U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- moving mechanism
- sample
- moving device
- sample moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来装置の構成図、第2図は従来装置を説明す
るための図、第3図は本考案の一実施例装置の構成図、
第4図は一実施例装置を説明するための図である。
1:試料室、2:側壁、3:保持体、4:傾斜機構、5
:Y軸移動機構、6:X軸移動機構、7:回転機構、8
:試料、9:試料ホルダー、1G、11,12,21:
駆動軸、13. 14. 15.22:自在継ぎ手、1
6. 17. 18. 19.23:駆動用ツマミ、2
0:y軸補助移動機構。FIG. 1 is a configuration diagram of a conventional device, FIG. 2 is a diagram for explaining the conventional device, and FIG. 3 is a configuration diagram of an embodiment of the device of the present invention.
FIG. 4 is a diagram for explaining one embodiment of the apparatus. 1: Sample chamber, 2: Side wall, 3: Holder, 4: Tilt mechanism, 5
: Y-axis movement mechanism, 6: X-axis movement mechanism, 7: Rotation mechanism, 8
: Sample, 9: Sample holder, 1G, 11, 12, 21:
Drive shaft, 13. 14. 15.22: Universal joint, 1
6. 17. 18. 19.23: Drive knob, 2
0: Y-axis auxiliary movement mechanism.
Claims (1)
移動機構及びY軸移動機構と、該X、 Y軸移動機構を
載置して光軸2と直交する傾斜軸のまわりに試料を傾斜
させる傾斜機構とを備えた装置において、前記X軸移動
機構又はY軸移動機構上に取り外し可能なy軸補助移動
機構又はX軸補助移動機構を備えたことを特徴とする試
料移動装置。An X-axis moving mechanism and a Y-axis moving mechanism that move the sample horizontally within the XY plane perpendicular to the optical axis Z, and the X- and Y-axis moving mechanisms are mounted to move the sample around an inclined axis perpendicular to the optical axis 2. What is claimed is: 1. A sample moving device comprising: a tilting mechanism for tilting a sample moving device, comprising: a y-axis auxiliary moving mechanism or an X-axis auxiliary moving mechanism that is removable on the X-axis moving mechanism or Y-axis moving mechanism;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15094283U JPS6059350U (en) | 1983-09-29 | 1983-09-29 | Sample moving device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15094283U JPS6059350U (en) | 1983-09-29 | 1983-09-29 | Sample moving device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6059350U true JPS6059350U (en) | 1985-04-25 |
Family
ID=30334631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15094283U Pending JPS6059350U (en) | 1983-09-29 | 1983-09-29 | Sample moving device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6059350U (en) |
-
1983
- 1983-09-29 JP JP15094283U patent/JPS6059350U/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6059350U (en) | Sample moving device | |
JPS58193453U (en) | Backscattered electron detection device in electron beam equipment | |
JPS6059977U (en) | Electronic component testing equipment | |
JPS5912184U (en) | CRT monitor tilt mechanism | |
JPS58181493U (en) | Robot joystick operating device | |
JPS60184014U (en) | Narrow space inspection device | |
JPS6053042U (en) | Sample stage for surface analysis equipment | |
JPS59162185U (en) | position indexing device | |
JPS58148000U (en) | lighting car | |
JPS5885345U (en) | Precision plane moving device | |
JPS59128611U (en) | Fiber optic connection equipment | |
JPS5836092U (en) | industrial robot | |
JPS616825U (en) | Photography device with transparency stand | |
JPS5887194U (en) | floppy disk device | |
JPS58154974U (en) | Light source device in display device | |
JPS59153725U (en) | Universal joint for inside vacuum vessel | |
JPS6013102U (en) | Shadowless light drive mechanism | |
JPS58189089U (en) | Probe up and down mechanism | |
JPS58192611U (en) | camera equipment | |
JPS59144690U (en) | Movable anti-glare screen | |
JPS59140894U (en) | depiction device | |
JPS58118412U (en) | Reflector scraping device | |
JPS5954923U (en) | metallization equipment | |
JPS5933549U (en) | computer input device | |
JPS59122592U (en) | Magnetic disk module inspection equipment |