JPS5885345U - Precision plane moving device - Google Patents
Precision plane moving deviceInfo
- Publication number
- JPS5885345U JPS5885345U JP18113281U JP18113281U JPS5885345U JP S5885345 U JPS5885345 U JP S5885345U JP 18113281 U JP18113281 U JP 18113281U JP 18113281 U JP18113281 U JP 18113281U JP S5885345 U JPS5885345 U JP S5885345U
- Authority
- JP
- Japan
- Prior art keywords
- plane moving
- moving device
- precision plane
- movement table
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の平面移動装置（ｘｙテーブル）を示し
た斜視図、第２図は、本考案の具体的実施例の平面移動
機構を示す斜視図、第３図は、本考案に用いたりニアモ
ータの構成を示す説明図、第４図〜第７図は、本考案に
用いたりニアモータのソーヤの原理を示す説明図、第８
図〜第１０図は、本考案による、テーブルの位置制御方
法を示す説明図である。
１・・・・・・粗動テーブノへ２・・・・・・微動テー
ブル、１３・・・・・・電磁石、１４・・・・・・コン
トローラー、１５・・・・・・Ｌ形ミラー、１６・・・
・・・レーザ光、１７・・・・・・レーザ干渉測長器。FIG. 1 is a perspective view showing a conventional plane moving device (xy table), FIG. 2 is a perspective view showing a plane moving mechanism according to a specific embodiment of the present invention, and FIG. 3 is a perspective view showing a plane moving mechanism used in the present invention. Figures 4 to 7 are explanatory diagrams showing the configuration of the near motor, and Figure 8 is an explanatory diagram showing the Sawyer principle of the near motor used in the present invention.
1 to 10 are explanatory diagrams showing a method for controlling the position of a table according to the present invention. 1... To coarse movement table knob 2... Fine movement table, 13... Electromagnet, 14... Controller, 15... L-shaped mirror, 16...
...Laser light, 17...Laser interference length measuring device.
Claims (1)
ルとし、その上に微動テーブルを載置したことを特徴と
する精密平面移動装置。A precision plane movement device characterized in that a linear motor capable of freely moving on a plane is used as a coarse movement table, and a fine movement table is placed on the coarse movement table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18113281U JPS5885345U (en) | 1981-12-07 | 1981-12-07 | Precision plane moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18113281U JPS5885345U (en) | 1981-12-07 | 1981-12-07 | Precision plane moving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5885345U true JPS5885345U (en) | 1983-06-09 |
Family
ID=29978339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18113281U Pending JPS5885345U (en) | 1981-12-07 | 1981-12-07 | Precision plane moving device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5885345U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000065645A1 (en) * | 1999-04-27 | 2000-11-02 | Nikon Corporation | Stage device and exposure device |
-
1981
- 1981-12-07 JP JP18113281U patent/JPS5885345U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000065645A1 (en) * | 1999-04-27 | 2000-11-02 | Nikon Corporation | Stage device and exposure device |
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