JPS6057930A - Exposure device - Google Patents

Abstract

PURPOSE:To bake a fine pattern stably for a prolonged term at low cost by forming an anode for a short-arc type mercury lamp incorporated into an exposure device to a specific shape and forming an arc spot only at the nose of a cathode. CONSTITUTION:The nose section 73 of an anode 7 for a short-arc type mercury lamp 100 is formed to a tapered shape with a flat nose surface 72. Consequently, an arc spot at the nose of the anode 7 disappears, an arc is throttled to a small shape, and an arc spot is formed only at the nose 62 of a cathode 6, and functions as a point source. Beams can be focussed easily by mounting the mercury lamp 100 so that the arc spot is positioned onto a focus in a beam-condensing lens 101, the illuminance of beams on the surface to be irradiated of a semiconductor wafer 400 can be increased without augmenting power consumption, a temperature rise is inhibited comparatively, the generation of a sputtering phenomenon at the nose section 73 is reduced remarkably, and use-life can be lengthened.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a side light device er for printing, for example, circuit patterns using ultraviolet rays.

11 of the semiconductor electronic circuit 1 circuit such as electric circuit or IC
For baked VC with a one-way pattern, Shiyu 1 is usually used on the substrate soil.
Line-sensitive resin layers are laminated and baked by irradiating the resin layer with ultraviolet light through a circuit pattern.

FIG. 1 is a diagram schematically showing an example of an exposure apparatus that can be used for printing, for example, a conductive electronic Ll path.

(2) Reference numeral 100 denotes a short-arc mercury lamp used as a light source for exposure. This short-arc mercury lamp 100 is mounted so that its arc is located on the focal point of the condenser mirror 101. The source of light from this day-to-arc type mercury illusion 100 is collected by a condensing mirror 101, and a first plane mirror 102
, Inch Greater 103% X2 'F 1111 The light is projected onto a photomask 300 on which a circuit pattern is drawn through the rice 104 and the condenser lens 105, and the light transmitted through this photomask 300 is reduced by the reduction lens 106. Leaf on its upper surface, a! held on the base 200! Semiconductor wafer 40 on which lit/hiei resin is laminated
A circuit pattern corresponding to the photomask 300 is printed onto the semiconductor wafer 400.0 107 is projected onto the filter.

A sheet-arc type mercury lamp 1 incorporated in this exposure device
An example of 00 is shown in FIG.

Reference numeral 1 denotes a quartz glass enclosure, and two caps 2B are provided at both ends of the enclosure 1. 3 and 4 are an anode support rod and a cathode support rod, respectively. The anode 5 and the cathode 6 are opposed to each other at the center inside the enclosure 1. The tips 51 and 61 of the positive electrode 5 and the negative electrode 6 are both formed into a cone shape. This is because it is easy to start the lighting. The device is widely used in industry, but recently, due to the demand for higher integration of semiconductor electronic circuits and lower production costs, the device is also being used as a light source. To increase the illumination of the irradiated surface for illuminating semiconductor wafers while increasing the power consumption of the short-arc type water lamp. month]
There is an increasing desire to extend lifespan.

It is possible to individually solve these requirements (a) and (b)k using different means.

That is, for (a) K, for example, by using a specially configured It is possible to solve the problem by doing something like However, with such individual solutions, the structure of the exposure equipment becomes complicated and the cost of the equipment increases, making it difficult to achieve the original purpose of reducing the production cost of semiconductor sub-circuits. I can't.

Under these circumstances, the present inventor investigated the state of the arc during lighting in the sitart arc type mercury lamp having the configuration shown in FIG. According to the distribution, arc bright spots are formed at two locations, the tip 62 of the cathode 6 and the tip 52 of the anode 5, and therefore a simple optical system cannot converge the light from the two arc bright spots well. It is difficult to emit light, and furthermore, the wear and tear of the tip 51 of the anode 5 is severe, and the blackening phenomenon occurs light years early, which ultimately satisfies the above-mentioned requirements C1) and (B) at the same time. Based on this knowledge, we conducted extensive research and found that (5) In the sheet-arc water lamp installed in the exposure equipment,
It has been found that the above requirements (a) and (b) can be simultaneously satisfied extremely easily by forming the anode into a specific shape, and the present invention has been completed.

An object of the present invention is to provide an exposure apparatus that can print fine patterns stably over a long period of time with a simple configuration, efficiently, and at low cost. is a sheet arc type in which the tip of the cathode is formed into a cone shape and the tip of the anode is formed into a tapered shape with a flat tip surface, so that when lighting, an arc bright spot is formed only at the tip of the cathode. The key point is that it incorporates a mercury lamp as the light source for exposure.

Embodiment f of the present invention will be explained below with reference to the drawings.

FIG. 4 shows an example of a sheet arc type water plate 100 that is incorporated as an exposure light source in an exposure apparatus according to an embodiment of the present invention, and 7 is an anode. As shown in enlarged form in Fig. 5 and Fig. 6, there is a large-diameter columnar body 71, and a tip 73 extending in a tapered shape from the body IN1\71 (6), the tip 72 of which is a flat dish surface. 0 and other parts are the same as the structure shown in FIG. 2, and the same parts are denoted by the same reference numerals.

An example of the combined structure of this sheet arc type mercury lamp 10a is shown below.

First, the mercury vapor lamp used in the present invention is:
It is a high-pressure or ultra-high-pressure single-arc type mercury lamp driven by a DC power source, and the pressure inside the envelope at V (including the above configuration example) is within the range of approximately (7) 7 to 30 atmospheres when lit. .

Using the arc-type mercury lamp 100 having such a configuration as a light source for exposure, an exposure apparatus is configured in the same manner as the configuration shown in Figure WJ1 (7).

According to the above-described exposure apparatus, in the sheet arc type mercury lamp 100, the tip 73 of the cathode 7 has a tapered shape with a flat tip surface 72, so that when the lamp is lit,
A brightness distribution as shown in Figure 7 was obtained, and the arc bright spot at the anode tip, which occurred when the anode tip was cone-shaped as in the conventional case, disappeared. As a result, an arc bright spot is formed at only one place on the cone-shaped tip 62 of the cathode 6, and this arc bright spot functions as a point light source. Since the energy is concentrated, what is the brightness of the arc bright spot? l!l The power consumption is higher than that of the same conventional configuration, and since this arc bright spot is the actual point light source, the arc brightness The bright spot is the condenser mirror 101
The mercury lamp 100 is placed on the focal point of the
By attaching a Since the tip 73 has a tapered shape with a flat tip surface 72 and the area of the tip is large, temperature rise is relatively suppressed, and the occurrence of sputtering phenomenon at the tip 73 is significantly reduced, resulting in the occurrence of a blackening phenomenon. This can extend the service life of the exposure light source.

In this way, the above-mentioned water conveyance (a) and (b) can be carried out at the same time by making the positive &7 of the arc-type mercury lamp 100 used as an exposure light source into a specific shape as described above. As a result, a remarkable advantage can be obtained in that fine patterns can be printed stably over a long period of time efficiently and at low cost. Various modifications can be made to the present invention, and the type of optical system used to shape the light from the arc bright spot of the stationary arc type mercury lamp 100 may be freely selected.

The exposure apparatus of the present invention can also be used for exposure and printing of materials other than semiconductor wafers, and in this case also the same effects as described above can be obtained.

As described above, in the present invention, the tip of the cathode is formed in a cone shape, and the tip of the anode is formed in a tapered shape with a flat tip surface. This exposure device is characterized by incorporating a snow-tight arc type mercury phantom, which is formed in the wafer, as an exposure light source, so it has a simple configuration, can print fine patterns efficiently, and at low cost for a long period of time. This can be done stably.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram schematically showing an example of an exposure apparatus;
Figure 2 is an explanatory diagram showing an example of a sheet-arc type mercury lamp used in a micro exposure device. Figure 3 is the brightness distribution of the arc that occurs when the sheet-arc type mercury lamp shown in Figure 2 is turned on. (10) FIG. 4 is an explanatory diagram showing an example of a sheet arc type mercury lamp that can be used in the exposure apparatus of the present invention.
6 and 6 are an explanatory front view and an explanatory side view, respectively, showing enlarged main parts of FIG. 4, and FIG. It is an explanatory diagram showing brightness distribution. 100...Shot arc type mercury lamp 101...Focusing fi 102...First plane mirror 10
3... Inch grater 104... Second plane mirror 105... Condenser lens 106... Reducing lens 107... Filter 200... Base 300.
...Photomask 400...Semiconductor sea urchin heart...
Quartz glass enclosure 5... Anode 51... Tip part
6... Cathode 61... Tip 7... Anode 71... Body 72... Tip surface 73... At the end of the tip.

Claims (1)

[Claims] 1) The tip of the cathode is formed into a cone shape, and the tip of the pole is formed into a tapered V shape with a flat tip surface.
A screen in which an arc bright spot is formed only at the tip of the cathode during lighting
Sushi Hikari Soju is unique in that it incorporates a mercury vapor lamp as a light source for exposure.