JPS49119481A - - Google Patents
Info
- Publication number
- JPS49119481A JPS49119481A JP3063273A JP3063273A JPS49119481A JP S49119481 A JPS49119481 A JP S49119481A JP 3063273 A JP3063273 A JP 3063273A JP 3063273 A JP3063273 A JP 3063273A JP S49119481 A JPS49119481 A JP S49119481A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Discharge Lamp (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063273A JPS49119481A (en) | 1973-03-16 | 1973-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063273A JPS49119481A (en) | 1973-03-16 | 1973-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49119481A true JPS49119481A (en) | 1974-11-14 |
Family
ID=12309209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3063273A Pending JPS49119481A (en) | 1973-03-16 | 1973-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49119481A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530122A (en) * | 1978-08-23 | 1980-03-03 | Toshiba Corp | Discharging lamp equipped with sintered electrode |
| JPS6057930A (en) * | 1983-09-10 | 1985-04-03 | Ushio Inc | Exposure device |
| JPS6059733A (en) * | 1983-09-13 | 1985-04-06 | Ushio Inc | Device for exposing semiconductor |
| JPS60218755A (en) * | 1984-04-13 | 1985-11-01 | Hamamatsu Photonics Kk | Discharge tube for light source |
| JPS6450358A (en) * | 1987-08-21 | 1989-02-27 | Hitachi Ltd | Extra-high pressure mercury lamp |
| JPH03274648A (en) * | 1990-03-23 | 1991-12-05 | Ushio Inc | Short arc-type mercury vapor discharge lamp |
-
1973
- 1973-03-16 JP JP3063273A patent/JPS49119481A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530122A (en) * | 1978-08-23 | 1980-03-03 | Toshiba Corp | Discharging lamp equipped with sintered electrode |
| JPS6057930A (en) * | 1983-09-10 | 1985-04-03 | Ushio Inc | Exposure device |
| JPS6059733A (en) * | 1983-09-13 | 1985-04-06 | Ushio Inc | Device for exposing semiconductor |
| JPS60218755A (en) * | 1984-04-13 | 1985-11-01 | Hamamatsu Photonics Kk | Discharge tube for light source |
| JPH0213420B2 (en) * | 1984-04-13 | 1990-04-04 | Hamamatsu Photonics Kk | |
| JPS6450358A (en) * | 1987-08-21 | 1989-02-27 | Hitachi Ltd | Extra-high pressure mercury lamp |
| JPH03274648A (en) * | 1990-03-23 | 1991-12-05 | Ushio Inc | Short arc-type mercury vapor discharge lamp |
| JPH0587937B2 (en) * | 1990-03-23 | 1993-12-20 | Ushio Electric Inc |