JPS6056823U - 静圧気体軸受の気体供給制御装置 - Google Patents

静圧気体軸受の気体供給制御装置

Info

Publication number
JPS6056823U
JPS6056823U JP14815983U JP14815983U JPS6056823U JP S6056823 U JPS6056823 U JP S6056823U JP 14815983 U JP14815983 U JP 14815983U JP 14815983 U JP14815983 U JP 14815983U JP S6056823 U JPS6056823 U JP S6056823U
Authority
JP
Japan
Prior art keywords
control device
supply control
gas
static pressure
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14815983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332983Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
直人 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP14815983U priority Critical patent/JPS6056823U/ja
Publication of JPS6056823U publication Critical patent/JPS6056823U/ja
Application granted granted Critical
Publication of JPS6332983Y2 publication Critical patent/JPS6332983Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP14815983U 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置 Granted JPS6056823U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Publications (2)

Publication Number Publication Date
JPS6056823U true JPS6056823U (ja) 1985-04-20
JPS6332983Y2 JPS6332983Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-02

Family

ID=30329261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14815983U Granted JPS6056823U (ja) 1983-09-27 1983-09-27 静圧気体軸受の気体供給制御装置

Country Status (1)

Country Link
JP (1) JPS6056823U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114852A (ja) * 2004-10-18 2006-04-27 Dainippon Screen Mfg Co Ltd 基板保持装置
WO2022025017A1 (ja) * 2020-07-30 2022-02-03 ファナック株式会社 加圧流体供給システム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925934U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-13 1974-03-05
JPS5022150A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-21 1975-03-10
JPS56138502A (en) * 1980-03-31 1981-10-29 Agency Of Ind Science & Technol Oil pressure servo driving device
JPS57117401U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-01-14 1982-07-21

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925934U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-13 1974-03-05
JPS5022150A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-21 1975-03-10
JPS56138502A (en) * 1980-03-31 1981-10-29 Agency Of Ind Science & Technol Oil pressure servo driving device
JPS57117401U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-01-14 1982-07-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114852A (ja) * 2004-10-18 2006-04-27 Dainippon Screen Mfg Co Ltd 基板保持装置
WO2022025017A1 (ja) * 2020-07-30 2022-02-03 ファナック株式会社 加圧流体供給システム

Also Published As

Publication number Publication date
JPS6332983Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-02

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