JPS6054748A - 集塵電極の集塵限界検出装置 - Google Patents

集塵電極の集塵限界検出装置

Info

Publication number
JPS6054748A
JPS6054748A JP16182783A JP16182783A JPS6054748A JP S6054748 A JPS6054748 A JP S6054748A JP 16182783 A JP16182783 A JP 16182783A JP 16182783 A JP16182783 A JP 16182783A JP S6054748 A JPS6054748 A JP S6054748A
Authority
JP
Japan
Prior art keywords
dust collection
dust collecting
electrode
photodetector
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16182783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154463B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kimio Mogi
茂木　公男
Toshiro Takahashi
敏郎 高橋
Toshinori Okuno
奥野　俊典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DENGEN AUTOM KK
Original Assignee
DENGEN AUTOM KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DENGEN AUTOM KK filed Critical DENGEN AUTOM KK
Priority to JP16182783A priority Critical patent/JPS6054748A/ja
Publication of JPS6054748A publication Critical patent/JPS6054748A/ja
Publication of JPS6154463B2 publication Critical patent/JPS6154463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Electrostatic Separation (AREA)
JP16182783A 1983-09-05 1983-09-05 集塵電極の集塵限界検出装置 Granted JPS6054748A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16182783A JPS6054748A (ja) 1983-09-05 1983-09-05 集塵電極の集塵限界検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16182783A JPS6054748A (ja) 1983-09-05 1983-09-05 集塵電極の集塵限界検出装置

Publications (2)

Publication Number Publication Date
JPS6054748A true JPS6054748A (ja) 1985-03-29
JPS6154463B2 JPS6154463B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-22

Family

ID=15742664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16182783A Granted JPS6054748A (ja) 1983-09-05 1983-09-05 集塵電極の集塵限界検出装置

Country Status (1)

Country Link
JP (1) JPS6054748A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004170287A (ja) * 2002-11-21 2004-06-17 Shimadzu Corp 大気中の浮遊粒子状物質の捕集装置
JP2004177347A (ja) * 2002-11-28 2004-06-24 Shimadzu Corp 大気中の浮遊粒子状物質の捕集装置および測定装置
JP2012064935A (ja) * 2010-08-19 2012-03-29 Semiconductor Energy Lab Co Ltd 微粒子捕集装置及び真空処理装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760650A (ja) * 1993-08-25 1995-03-07 Tone Corp 消音、強力ダイヤモンドブレード基板
GB2390167B (en) 2002-06-25 2005-07-13 Hubbell Inc Method and apparatus for testing an electrical component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004170287A (ja) * 2002-11-21 2004-06-17 Shimadzu Corp 大気中の浮遊粒子状物質の捕集装置
JP2004177347A (ja) * 2002-11-28 2004-06-24 Shimadzu Corp 大気中の浮遊粒子状物質の捕集装置および測定装置
JP2012064935A (ja) * 2010-08-19 2012-03-29 Semiconductor Energy Lab Co Ltd 微粒子捕集装置及び真空処理装置

Also Published As

Publication number Publication date
JPS6154463B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-22

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